公开(公告)号：US10545490B2

公开(公告)日：2020-01-28

申请号：US14727800

申请日：2015-06-01

Applicant: Applied Materials Israel Ltd.

Inventor： Michele Dalla-Torre ,  Amit Batikoff ,  Efrat Rozenman ,  Ron Katzir ,  Imry Kissos

IPC: G06K9/00 ,  G05B19/418 ,  G06T7/00 ,  G06K9/62

Abstract: There are provided a method of generating an inspection recipe usable for inspecting an inspection area of a specimen and a recipe generating unit. The recipe generating unit is configured: upon obtaining design data informative of design structural elements comprised in a design PoI corresponding to the at least one PoI, to provide global segmentation of a test image captured by an inspection tool unit from the inspection area and comprising at least one test PoI of substantially the same design as the at least one PoI, thereby to obtain segmented structural elements comprised in the test PoI and segmentation configuration data; to associate the segmented structural elements comprised in the test PoI with the design structural elements comprised in the design PoI, thereby to obtain design association data; and to generate an inspection recipe comprising, at least, segmentation configuration data and design association data.

公开(公告)号：US09851714B2

公开(公告)日：2017-12-26

申请号：US14728495

申请日：2015-06-02

Applicant: Applied Materials Israel Ltd.

Inventor： Michele Dalla-Torre ,  Amit Batikoff ,  Efrat Rozenman ,  Ron Katzir ,  Imry Kissos

IPC: G06K9/00 ,  G05B19/418 ,  G06K9/62 ,  G06T7/00

CPC classification number: G05B19/41875 ,  G05B2219/37224 ,  G05B2219/45031 ,  G06K9/6202 ,  G06T7/0004 ,  G06T7/001 ,  G06T2200/24 ,  G06T2207/30148 ,  Y02P90/265

Abstract: There are provided a method of inspecting the inspection area and an inspection system thereof. The inspection system comprises an inspection control unit operatively coupled to an inspection tool unit and to a recipe generating unit. The inspection control unit is configured to obtain the design data and the inspection recipe; to provide local segmentation of at least one inspection PoI comprised in an inspection image captured from the inspection area by the inspection tool unit, thereby obtaining inspection structural elements comprised in the at least one inspection PoI, the local segmentation is provided using segmentation configuration data specified in the inspection recipe; to identify one or more target structural elements and design structural elements corresponding thereto, identifying is provided using design association data specified in the inspection recipe; and to enable metrology measurements for the one or more target structural elements using the identified design structural elements.

公开(公告)号：US20150310600A1

公开(公告)日：2015-10-29

申请号：US14792238

申请日：2015-07-06

Applicant: Applied Materials Israel Ltd.

Inventor： Michele Dalla-Torre ,  Gil Shabat ,  Adi Dafni ,  Amit Batikoff

IPC: G06T7/00 ,  G01N21/95

CPC classification number: G06T7/001 ,  G01N21/9501 ,  G01N21/9515 ,  G06T2207/10061 ,  G06T2207/30148

Abstract: An analysis system capable of classifying possible defects identified within an inspection image of an inspected object includes a storage device and a processor. The processor matches a template and a portion of the inspection image, thus giving rise to a matching portion of the inspection image. The inspection image is captured by an inspection tool. The processor associates, using a mask corresponding to the template and defining one or more segments within the matching portion of the inspection image, a potential defect with a segment defined by the mask and corresponding to a location of the potential defect, and classifies the potential defect in accordance with the segment defined by the mask within the matching portion of the inspection image and associated with the potential defect.

Abstract translation: 能够分类被检查对象的检查图像内识别出的可能缺陷的分析系统包括存储装置和处理器。 处理器匹配模板和检查图像的一部分，从而产生检查图像的匹配部分。 检查图像由检查工具捕获。 处理器使用与模板相对应的掩模并且在检查图像的匹配部分内定义一个或多个段，具有由掩模限定并对应于潜在缺陷的位置的区段的潜在缺陷，并将潜在的潜在分类 根据由检查图像的匹配部分中的掩模限定的区段并与潜在缺陷相关联的缺陷。