Invention Grant
- Patent Title: Si recess method in HKMG replacement gate technology
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Application No.: US15438907Application Date: 2017-02-22
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Publication No.: US09865610B2Publication Date: 2018-01-09
- Inventor: Harry-Hak-Lay Chuang , Wei Cheng Wu , Chin-Yi Huang , Shih-Chang Liu , Chang-Ming Wu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semicondutor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semicondutor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L27/115 ; H01L27/11534 ; H01L29/66 ; H01L27/11521

Abstract:
The present disclosure relates to an integrated circuit (IC). The IC includes a substrate, which includes a periphery region having a first substrate surface and a memory cell region having a second substrate surface. The second substrate surface is recessed within the substrate relative to the first substrate surface. A high k metal gate (HKMG) transistor is disposed on the first substrate surface and includes a HKMG gate. Two neighboring flash memory cells are disposed on the second substrate surface and include a pair of flash memory cell control gates. Top surfaces of the HKMG gate and flash memory cell control gates are co-planar.
Public/Granted literature
- US20170162590A1 Si RECESS METHOD IN HKMG REPLACEMENT GATE TECHNOLOGY Public/Granted day:2017-06-08
Information query
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