Invention Grant
- Patent Title: Curable composition for imprints, patterning method and pattern
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Application No.: US14151367Application Date: 2014-01-09
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Publication No.: US09868846B2Publication Date: 2018-01-16
- Inventor: Kunihiko Kodama , Yuichiro Enomoto , Kazuyuki Usuki , Tadashi Omatsu , Hirotaka Kitagawa
- Applicant: FUJIFILM Corporation
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2011-153468 20110712; JP2012-112278 20120516
- Main IPC: C08K5/053
- IPC: C08K5/053 ; C08F220/22 ; C08F222/10 ; G11B5/855 ; B29C59/00 ; C08F2/48 ; C08F220/10 ; C09D4/06 ; C08F2/46 ; C08F220/18 ; C08F230/08 ; C08F220/38

Abstract:
Disclosed is a to provide a curable composition for imprints capable of keeping a good patternability and of producing less defects even after repetitive pattern transfer. The curable composition for imprints comprising: a polymerizable compound (A); a photo-polymerization initiator (B); and a non-polymerizable compound (C) having a polyalkylene glycol structure having at least one terminal hydroxy group, or at least one etherified terminal hydroxy group, and containing substantially no fluorine atom and no silicon atom.
Public/Granted literature
- US20140154471A1 CURABLE COMPOSITION FOR IMPRINTS, PATTERNING METHOD AND PATTERN Public/Granted day:2014-06-05
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