Invention Grant
- Patent Title: Resilient electrical interposers, systems that include the interposers, and methods for using and forming the same
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Application No.: US14788288Application Date: 2015-06-30
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Publication No.: US09874585B2Publication Date: 2018-01-23
- Inventor: Kenneth R. Smith , Mike Jolley , Eric Strid , Peter Hanaway , K. Reed Gleason , Koby L. Duckworth
- Applicant: Cascade Microtech, Inc.
- Applicant Address: US OR Beaverton
- Assignee: Cascade Microtech, Inc.
- Current Assignee: Cascade Microtech, Inc.
- Current Assignee Address: US OR Beaverton
- Agency: Dascenzo Intellectual Property Law, P.C.
- Main IPC: G01R31/00
- IPC: G01R31/00 ; G01R31/02 ; G01R31/28 ; G01R1/073 ; H01L21/48 ; G01R1/067

Abstract:
Resilient electrical interposers that may be utilized to form a plurality of electrical connections between a first device and a second device, as well as systems that may utilize the resilient electrical interposers and methods of use and/or fabrication thereof. The resilient electrical interposers may include a resilient dielectric body with a plurality of electrical conduits contained therein. The plurality of electrical conduits may be configured to provide a plurality of electrical connections between a first surface of the electrical interposer and/or the resilient dielectric body and a second, opposed, surface of the electrical interposer and/or the resilient dielectric body. The systems and methods disclosed herein may provide for improved vertical compliance, improved contact force control, and/or improved dimensional stability of the resilient electrical interposers.
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