公开(公告)号：US09099449B2

公开(公告)日：2015-08-04

申请号：US14592749

申请日：2015-01-08

Applicant: Cascade Microtech, Inc.

Inventor： Kenneth R. Smith ,  Mike Jolley ,  Eric Strid ,  Peter Hanaway ,  K. Reed Gleason ,  Koby L. Duckworth

IPC: G01R1/067 ,  H01L21/48

CPC classification number: G01R1/0735 ,  G01R1/06727 ,  G01R1/06733 ,  G01R1/07342 ,  H01L21/4825 ,  H01L21/4828 ,  H01L21/4842 ,  H01L21/4853 ,  H01L21/4857 ,  Y10T29/49155

Abstract: Resilient electrical interposers that may be utilized to form a plurality of electrical connections between a first device and a second device, as well as systems that may utilize the resilient electrical interposers and methods of use and/or fabrication thereof. The resilient electrical interposers may include a resilient dielectric body with a plurality of electrical conduits contained therein. The plurality of electrical conduits may be configured to provide a plurality of electrical connections between a first surface of the electrical interposer and/or the resilient dielectric body and a second, opposed, surface of the electrical interposer and/or the resilient dielectric body. The systems and methods disclosed herein may provide for improved vertical compliance, improved contact force control, and/or improved dimensional stability of the resilient electrical interposers.

公开(公告)号：US20150301082A1

公开(公告)日：2015-10-22

申请号：US14788288

申请日：2015-06-30

Applicant: Cascade Microtech, Inc.

Inventor： Kenneth R. Smith ,  Mike Jolley ,  Eric Strid ,  Peter Hanaway ,  K. Reed Gleason ,  Koby L. Duckworth

IPC: G01R1/073

CPC classification number: G01R1/0735 ,  G01R1/06727 ,  G01R1/06733 ,  G01R1/07342 ,  H01L21/4825 ,  H01L21/4828 ,  H01L21/4842 ,  H01L21/4853 ,  H01L21/4857 ,  Y10T29/49155

Abstract: Resilient electrical interposers that may be utilized to form a plurality of electrical connections between a first device and a second device, as well as systems that may utilize the resilient electrical interposers and methods of use and/or fabrication thereof. The resilient electrical interposers may include a resilient dielectric body with a plurality of electrical conduits contained therein. The plurality of electrical conduits may be configured to provide a plurality of electrical connections between a first surface of the electrical interposer and/or the resilient dielectric body and a second, opposed, surface of the electrical interposer and/or the resilient dielectric body. The systems and methods disclosed herein may provide for improved vertical compliance, improved contact force control, and/or improved dimensional stability of the resilient electrical interposers.

公开(公告)号：US20180088149A1

公开(公告)日：2018-03-29

申请号：US15708681

申请日：2017-09-19

Applicant: Cascade Microtech, Inc.

Inventor： Gavin Neil Fisher ,  Thomas Reiner Thaerigen ,  Peter McCann ,  Rodney Jones ,  Koby L. Duckworth

IPC: G01R1/067

CPC classification number: G01R1/06794 ,  G01R1/07364 ,  G01R31/2891 ,  G01R35/00

Abstract: Probe systems and methods are disclosed herein. The methods include directly measuring a distance between a first manipulated assembly and a second manipulated assembly, contacting first and second probes with first and second contact locations, providing a test signal to an electrical structure, and receiving a resultant signal from the electrical structure. The methods further include characterizing at least one of a probe system and the electrical structure based upon the distance. In one embodiment, the probe systems include a measurement device configured to directly measure a distance between a first manipulated assembly and a second manipulated assembly. In another embodiment, the probe systems include a probe head assembly including a platen, a manipulator operatively attached to the platen, a vector network analyzer (VNA) extender operatively attached to the manipulator, and a probe operatively attached to the VNA extender.

公开(公告)号：US20150114925A1

公开(公告)日：2015-04-30

申请号：US14592749

申请日：2015-01-08

Applicant: Cascade Microtech, Inc.

Inventor： Kenneth R. Smith ,  Mike Jolley ,  Eric Strid ,  Peter Hanaway ,  K. Reed Gleason ,  Koby L. Duckworth

IPC: H01L21/48

CPC classification number: G01R1/0735 ,  G01R1/06727 ,  G01R1/06733 ,  G01R1/07342 ,  H01L21/4825 ,  H01L21/4828 ,  H01L21/4842 ,  H01L21/4853 ,  H01L21/4857 ,  Y10T29/49155

Abstract: Resilient electrical interposers that may be utilized to form a plurality of electrical connections between a first device and a second device, as well as systems that may utilize the resilient electrical interposers and methods of use and/or fabrication thereof. The resilient electrical interposers may include a resilient dielectric body with a plurality of electrical conduits contained therein. The plurality of electrical conduits may be configured to provide a plurality of electrical connections between a first surface of the electrical interposer and/or the resilient dielectric body and a second, opposed, surface of the electrical interposer and/or the resilient dielectric body. The systems and methods disclosed herein may provide for improved vertical compliance, improved contact force control, and/or improved dimensional stability of the resilient electrical interposers.

Abstract translation: 可用于在第一装置和第二装置之间形成多个电连接的弹性电插入件，以及可利用弹性电插入件及其使用和/或制造方法的系统。 弹性电插入件可以包括弹性介电体，其中包含多个电导管。 多个电导管可以被配置为在电插入器的第一表面和/或弹性介电体之间提供多个电连接，以及电插入器和/或弹性介电体的第二相对的表面。 本文公开的系统和方法可以提供弹性电插入器的改进的垂直顺应性，改进的接触力控制和/或改进的尺寸稳定性。

公开(公告)号：US10459006B2

公开(公告)日：2019-10-29

申请号：US15708681

申请日：2017-09-19

Applicant: Cascade Microtech, Inc.

Inventor： Gavin Neil Fisher ,  Thomas Reiner Thaerigen ,  Peter McCann ,  Rodney Jones ,  Koby L. Duckworth

IPC: G01R31/00 ,  G01R1/067 ,  G01R35/00 ,  G01R31/28 ,  G01R1/073

Abstract: Probe systems and methods are disclosed herein. The methods include directly measuring a distance between a first manipulated assembly and a second manipulated assembly, contacting first and second probes with first and second contact locations, providing a test signal to an electrical structure, and receiving a resultant signal from the electrical structure. The methods further include characterizing at least one of a probe system and the electrical structure based upon the distance. In one embodiment, the probe systems include a measurement device configured to directly measure a distance between a first manipulated assembly and a second manipulated assembly. In another embodiment, the probe systems include a probe head assembly including a platen, a manipulator operatively attached to the platen, a vector network analyzer (VNA) extender operatively attached to the manipulator, and a probe operatively attached to the VNA extender.

公开(公告)号：US09874585B2

公开(公告)日：2018-01-23

申请号：US14788288

申请日：2015-06-30

Applicant: Cascade Microtech, Inc.

Inventor： Kenneth R. Smith ,  Mike Jolley ,  Eric Strid ,  Peter Hanaway ,  K. Reed Gleason ,  Koby L. Duckworth

IPC: G01R31/00 ,  G01R31/02 ,  G01R31/28 ,  G01R1/073 ,  H01L21/48 ,  G01R1/067

CPC classification number: G01R1/0735 ,  G01R1/06727 ,  G01R1/06733 ,  G01R1/07342 ,  H01L21/4825 ,  H01L21/4828 ,  H01L21/4842 ,  H01L21/4853 ,  H01L21/4857 ,  Y10T29/49155

Abstract: Resilient electrical interposers that may be utilized to form a plurality of electrical connections between a first device and a second device, as well as systems that may utilize the resilient electrical interposers and methods of use and/or fabrication thereof. The resilient electrical interposers may include a resilient dielectric body with a plurality of electrical conduits contained therein. The plurality of electrical conduits may be configured to provide a plurality of electrical connections between a first surface of the electrical interposer and/or the resilient dielectric body and a second, opposed, surface of the electrical interposer and/or the resilient dielectric body. The systems and methods disclosed herein may provide for improved vertical compliance, improved contact force control, and/or improved dimensional stability of the resilient electrical interposers.