Invention Grant
- Patent Title: Method for producing a semiconductor component and a semiconductor component
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Application No.: US15009744Application Date: 2016-01-28
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Publication No.: US09887180B2Publication Date: 2018-02-06
- Inventor: Matthew Meitl , Christopher Bower , Tansen Varghese
- Applicant: OSRAM Opto Semiconductors GmbH , X-Celeprint Limited
- Applicant Address: DE Regensburg IE Cork
- Assignee: OSRAM Opto Semiconductors GmbH,X-Celeprint Limited
- Current Assignee: OSRAM Opto Semiconductors GmbH,X-Celeprint Limited
- Current Assignee Address: DE Regensburg IE Cork
- Agency: Slater Matsil, LLP
- Main IPC: H01L25/075
- IPC: H01L25/075 ; H01L33/00 ; H01L33/50 ; H01L33/44 ; H01L21/78 ; H01L33/56 ; H01L33/22 ; H01L33/38 ; H01L33/60

Abstract:
A method for producing a plurality of semiconductor components and a semiconductor component are disclosed. In an embodiment the method includes applying a semiconductor layer sequence on a substrate, structuring the semiconductor layer sequence by forming trenches thereby separating the semiconductor layer sequence into a plurality of semiconductor bodies and applying an insulating layer covering the trenches and vertical surfaces of the plurality of semiconductor bodies. The method further includes forming a plurality of tethers by structuring the insulating layer in regions covering the trenches, locally detaching the substrate from the plurality of semiconductor bodies, wherein the tethers remain attached to the substrate and selectively picking up each semiconductor body by separating the tethers from the substrate, wherein each semiconductor body comprises a portion of the semiconductor layer sequence.
Public/Granted literature
- US20160254253A1 Method for Producing a Semiconductor Component and a Semiconductor Component Public/Granted day:2016-09-01
Information query
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