- 专利标题: Method of manufacturing electron multiplier body, photomultiplier tube, and photomultiplier
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申请号: US15057144申请日: 2016-03-01
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公开(公告)号: US09892892B2公开(公告)日: 2018-02-13
- 发明人: Motohiro Suyama , Hiroshi Kobayashi , Shinya Hattori
- 申请人: HAMAMATSU PHOTONICS K.K.
- 申请人地址: JP Hamamatsu-shi, Shizuoka
- 专利权人: HAMAMATSU PHOTONICS K.K.
- 当前专利权人: HAMAMATSU PHOTONICS K.K.
- 当前专利权人地址: JP Hamamatsu-shi, Shizuoka
- 代理机构: Drinker Biddle & Reath LLP
- 优先权: JP2015-041555 20150303
- 主分类号: H01J43/10
- IPC分类号: H01J43/10 ; H01J9/12 ; H01J43/16 ; B32B3/00 ; H01J43/24 ; B32B9/00 ; B32B9/04 ; C23C14/00
摘要:
A method of manufacturing an electron multiplier body, the method includes a step of preparing a first plate-like member having a surface and a back surface and a pair of second plate-like members, a step of forming, in the first plate-like member, a hole portion reaching from the front surface to the back surface, a step of constituting a laminated body by laminating the first and second plate-like members on each other so that the first plate-like member is interposed between the pair of second plate-like members to form a channel defined by the hole portion in the laminated body, a step of integrating the laminated body, a step of constituting a main body portion by cutting the integrated laminated body so that the channel is open, and a step of forming a resistive layer and a secondary electron multiplication layer on an inner surface of the channel.
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