Invention Grant
- Patent Title: Plasma processing apparatus
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Application No.: US14250783Application Date: 2014-04-11
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Publication No.: US09899191B2Publication Date: 2018-02-20
- Inventor: Yohei Yamazawa , Chishio Koshimizu , Masashi Saito , Kazuki Denpoh , Jun Yamawaku
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Priority: JP2009-245988 20091027; JP2009-245991 20091027; JP2010-215113 20100927
- Main IPC: C23C16/00
- IPC: C23C16/00 ; H01L21/306 ; H01J37/32 ; H01L21/67 ; H01L21/683

Abstract:
A plasma processing apparatus includes a processing chamber including a dielectric window; a coil-shaped RF antenna, provided outside the dielectric window; a substrate supporting unit provided in the processing chamber; a processing gas supply unit; an RF power supply unit for supplying an RF power to the RF antenna to generate a plasma of the processing gas by an inductive coupling in the processing chamber, the RF power having an appropriate frequency for RF discharge of the processing gas; a correction coil, provided at a position outside the processing chamber where the correction coil is to be coupled with the RF antenna by an electromagnetic induction, for controlling a plasma density distribution on the substrate in the processing chamber; a switching device provided in a loop of the correction coil; and a switching control unit for on-off controlling the switching device at a desired duty ratio by pulse width modulation.
Public/Granted literature
- US20140216345A1 PLASMA PROCESSING APPARATUS Public/Granted day:2014-08-07
Information query
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