- 专利标题: Nanotube semiconductor devices
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申请号: US15617342申请日: 2017-06-08
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公开(公告)号: US09899474B2公开(公告)日: 2018-02-20
- 发明人: Hamza Yilmaz , Xiaobin Wang , Anup Bhalla , John Chen , Hong Chang
- 申请人: Alpha and Omega Semiconductor Incorporated
- 申请人地址: US CA Sunnyvale
- 专利权人: Alpha and Omega Semiconductor, Inc.
- 当前专利权人: Alpha and Omega Semiconductor, Inc.
- 当前专利权人地址: US CA Sunnyvale
- 代理机构: Innovation Counsel LLP
- 主分类号: H01L27/095
- IPC分类号: H01L27/095 ; H01L29/47 ; H01L29/812 ; H01L31/07 ; H01L29/74 ; H01L31/111 ; H01L29/08 ; H01L29/66 ; H01L29/40 ; H01L29/739 ; H01L29/78 ; H01L29/861 ; H01L29/872 ; H01L21/265 ; H01L27/06 ; H01L29/06 ; H01L29/10
摘要:
Semiconductor devices includes a thin epitaxial layer (nanotube) formed on sidewalls of mesas formed in a semiconductor layer. In one embodiment, a semiconductor device includes a first semiconductor layer, a second semiconductor layer formed thereon and of the opposite conductivity type, and a first epitaxial layer formed on mesas of the second semiconductor layer. An electric field along a length of the first epitaxial layer is uniformly distributed.
公开/授权文献
- US20170338307A1 NANOTUBE SEMICONDUCTOR DEVICES 公开/授权日:2017-11-23
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