Dual-gate trench IGBT with buried floating P-type shield

    公开(公告)号:US10998264B2

    公开(公告)日:2021-05-04

    申请号:US17060083

    申请日:2020-10-01

    摘要: A method of manufacturing an insulated gate bipolar transistor (IGBT) device comprising 1) preparing a semiconductor substrate with an epitaxial layer of a first conductivity type supported on the semiconductor substrate of a second conductivity type; 2) applying a gate trench mask to open a first trench and second trench followed by forming a gate insulation layer to pad the trench and filling the trench with a polysilicon layer to form the first trench gate and the second trench gate; 3) implanting dopants of the first conductivity type to form an upper heavily doped region in the epitaxial layer; and 4) forming a planar gate on top of the first trench gate and apply implanting masks to implant body dopants and source dopants to form a body region and a source region near a top surface of the semiconductor substrate.

    Topside structures for an insulated gate bipolar transistor (IGBT) device to achieve improved device performances

    公开(公告)号:US10686062B2

    公开(公告)日:2020-06-16

    申请号:US13892259

    申请日:2013-05-11

    摘要: This invention discloses an insulated gate bipolar transistor (IGBT) device formed in a semiconductor substrate. The IGBT device has a split-shielded trench gate that includes an upper gate segment and a lower shield segment. The IGBT device may further include a dummy trench filled with a dielectric layer disposed at a distance away from the split-shielded trench gate. The IGBT device further includes a body region extended between the split-shielded trench gate and the dummy trench encompassing a source region surrounding the split-shielded trench gate near a top surface of the semiconductor substrate. The IGBT device further includes a heavily doped N region disposed below the body region and above a source-dopant drift region above a bottom body-dopant collector region at a bottom surface of the semiconductor substrate. In an alternative embodiment, the IGBT may include a planar gate with a trench shield electrode.

    Forced zero voltage switching flyback converter

    公开(公告)号:US10250152B2

    公开(公告)日:2019-04-02

    申请号:US15971629

    申请日:2018-05-04

    摘要: A flyback converter implements a Forced Zero Voltage Switching (ZVS) timing control by detecting a positive current excursion of the secondary winding current as the synchronous rectifier turn off trigger. The synchronous rectifier switch is turned on near the end of the switching cycle or the on duration is extended to develop a current ripple on the secondary winding current. The control circuit of the flyback converter detects a positive current excursion on the secondary winding current to turn off the synchronous rectifier and to start the next switching cycle. At this point, the voltage across the primary switch has been discharged and the primary switch can be turned on with zero drain-to-source voltage. In other embodiments, zero voltage switching for the off-transition of the primary switch is realized by coupling a capacitor across the primary switch or by coupling a capacitor across the primary winding, or both.

    Method for forming a lateral super-junction MOSFET device and termination structure

    公开(公告)号:US10243072B2

    公开(公告)日:2019-03-26

    申请号:US15971624

    申请日:2018-05-04

    摘要: A method for forming a lateral superjunction MOSFET device includes forming a semiconductor body including a lateral superjunction structure and a first column connected to the lateral superjunction structure. The MOSFET device includes the first column to receive current from the channel when the MOSFET is turned on and to distribute the channel current to the lateral superjunction structure functioning as the drain drift region. In some embodiment, the MOSFET device includes a second column disposed in close proximity to the first column. The second column disposed near the first column is used to pinch off the first column when the MOSFET device is to be turned off and to block the high voltage being sustained by the MOSFET device at the drain terminal from reaching the gate structure. In some embodiments, the MOSFET device further includes termination structures for the drain, source and body contact doped region fingers.