Invention Grant
- Patent Title: Growing graphene on substrates
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Application No.: US15427367Application Date: 2017-02-08
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Publication No.: US09905418B2Publication Date: 2018-02-27
- Inventor: Cara Beasley , Ralf Hofmann , Majeed A. Foad
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: B05D5/12
- IPC: B05D5/12 ; H01L21/02 ; H01L21/288 ; C01B31/04

Abstract:
Embodiments described herein provide methods and apparatus for forming graphitic carbon such as graphene on a substrate. The method includes providing a precursor comprising a linear conjugated hydrocarbon, depositing a hydrocarbon layer from the precursor on the substrate, and forming graphene from the hydrocarbon layer by applying energy to the substrate. The precursor may include template molecules such as polynuclear aromatics, and may be deposited on the substrate by spinning on, by spraying, by flowing, by dipping, or by condensing. The energy may be applied as radiant energy, thermal energy, or plasma energy.
Public/Granted literature
- US20170148631A1 GROWING GRAPHENE ON SUBSTRATES Public/Granted day:2017-05-25
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