Invention Grant
- Patent Title: Illumination system with monitoring optical output power
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Application No.: US15087173Application Date: 2016-03-31
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Publication No.: US09907152B2Publication Date: 2018-02-27
- Inventor: Jeffrey Kaskey , Thomas Laidig , David Markle , Jang Fung Chen
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: H05B37/04
- IPC: H05B37/04 ; H05B37/03 ; G03F7/20

Abstract:
An illumination system and methods for controlling the illumination system are provided. In one embodiment, the method includes providing a plurality of illumination sources, monitoring optical output power of the plurality of illumination sources over a period of time, and controlling the plurality of illumination sources to maintain a predetermined level of optical output power. The method further includes compensating for degradations of one or more of the plurality of illumination sources to maintain the predetermined level of optical output power, predicting a lifetime of the illumination system based on the parameters of the plurality of illumination sources, and performing periodic maintenance of the plurality of illumination sources according to a quality control schedule.
Public/Granted literature
- US20160219684A1 ILLUMINATION SYSTEM WITH MONITORING OPTICAL OUTPUT POWER Public/Granted day:2016-07-28
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