- 专利标题: Methods and apparatus for pedestal ring resonators
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申请号: US15591023申请日: 2017-05-09
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公开(公告)号: US09915785B2公开(公告)日: 2018-03-13
- 发明人: Pao Tai Lin , Jurgen Michel , Anuradha Murthy Agarwal
- 申请人: Pao Tai Lin , Jurgen Michel , Anuradha Murthy Agarwal
- 申请人地址: US MA Cambridge
- 专利权人: Massachusetts Institute of Technology
- 当前专利权人: Massachusetts Institute of Technology
- 当前专利权人地址: US MA Cambridge
- 代理机构: Cooley LLP
- 主分类号: G01J5/02
- IPC分类号: G01J5/02 ; G02B6/293 ; G02B6/122 ; G01N21/64 ; G01N21/65 ; G01N21/77 ; G02B6/12
摘要:
A device includes a substrate, a pedestal extending from the substrate, and a ring resonator disposed on the pedestal above the substrate. The ring resonator has a resonance wavelength greater than 1.5 μm and includes at least one of silicon and chalcogenide glass. The device can be used as a ring resonator sensor or a light source. The ring resonator is substantially transparent to mid-infrared radiation to reduce optical losses. The pedestal has a narrower width compared to the ring resonator to generate improved interaction between evanescent fields of light in the ring resonator and analytes nearby the ring resonator, thereby increasing sensing sensitivity. In addition, fabrication of the device is compatible with complementary metal-oxide-semiconductor (CMOS) processes and hence is amenable to large scale manufacturing.
公开/授权文献
- US20170242194A1 METHODS AND APPARATUS FOR PEDESTAL RING RESONATORS 公开/授权日:2017-08-24
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