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公开(公告)号：US20170242194A1
公开(公告)日：2017-08-24
申请号：US15591023
申请日：2017-05-09
CPC分类号： G02B6/29338 , G01N21/431 , G01N21/552 , G01N21/648 , G01N21/65 , G01N21/7746 , G02B6/122 , G02B6/29395 , G02B2006/12038 , G02B2006/12061
摘要： A device includes a substrate, a pedestal extending from the substrate, and a ring resonator disposed on the pedestal above the substrate. The ring resonator has a resonance wavelength greater than 1.5 μm and includes at least one of silicon and chalcogenide glass. The device can be used as a ring resonator sensor or a light source. The ring resonator is substantially transparent to mid-infrared radiation to reduce optical losses. The pedestal has a narrower width compared to the ring resonator to generate improved interaction between evanescent fields of light in the ring resonator and analytes nearby the ring resonator, thereby increasing sensing sensitivity. In addition, fabrication of the device is compatible with complementary metal-oxide-semiconductor (CMOS) processes and hence is amenable to large scale manufacturing.
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公开(公告)号：US20190129094A1
公开(公告)日：2019-05-02
申请号：US16179470
申请日：2018-11-02
申请人： Pao Tai Lin
发明人： Pao Tai Lin
摘要： A waveguide structure including a mid-infrared-transparent waveguide on a mid-infrared-transparent undercladding may serve as a photonic chemical sensor for measuring characteristic absorptions of analytes brought in physical contact with the waveguide. In some embodiments, a sensor including an amorphous-silicon waveguide on a barium-titanate undercladding can operate at wavelengths ranging from 2.5 μm to about 7 μm; this sensor may be manufactured by epitaxial growth of the undercladding on a substrate, followed by CMOS-compatible creation of the waveguide. Additional embodiments are disclosed.
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公开(公告)号：US20190128798A1
公开(公告)日：2019-05-02
申请号：US16179502
申请日：2018-11-02
申请人： Pao Tai Lin
发明人： Pao Tai Lin
IPC分类号： G01N21/25 , G02B6/10 , G01N21/3504 , G01N21/3577
摘要： A flexible waveguide structure including a waveguide on a flexible substrate, both having transparent windows in the mid-infrared range, may serve as a photonic chemical sensor for measuring characteristic absorptions of analytes brought in physical contact with the waveguide. Such a sensor may, in accordance with some embodiments, be formed by an aluminum-nitride waveguide on a borosilicate substrate.
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公开(公告)号：US20140264030A1
公开(公告)日：2014-09-18
申请号：US14076655
申请日：2013-11-11
摘要： A chip-scale, air-clad semiconductor pedestal waveguide can be used as a mid-infrared (mid-IR) sensor capable of in situ monitoring of organic solvents and other analytes. The sensor uses evanescent coupling from a silicon or germanium waveguide, which is highly transparent in the mid-IR portion of the electromagnetic spectrum (e.g., between λ=1.3 μm and λ=6.5 μm for silicon and λ=1.3 μm and λ=12.0 μm for germanium), to probe the absorption spectrum of the fluid surrounding the waveguide. Launching a mid-IR beam into the waveguide exposed to a particular analyte causes attenuation of the evanescent wave's spectral components due to absorption by carbon, oxygen, hydrogen, and/or nitrogen bonds in the surrounding fluid. Detecting these changes at the waveguide's output provides an indication of the type and concentration of one or more compounds in the surrounding fluid. If desired, the sensor may be integrated onto a silicon substrate with a mid-IR light source and a mid-IR detector to form a chip-based spectrometer.
摘要翻译： 芯片尺寸的空气包层半导体基座波导可用作能够原位监测有机溶剂和其他分析物的中红外（中红外）传感器。 传感器使用来自硅或锗波导的衰减耦合，其在电磁光谱的中红外部分中是高度透明的（例如，对于硅，λ=1.3μm和λ=6.5μm，λ=1.3μm和λ= 12.0 用于锗），以探测波导周围的流体的吸收光谱。 将中红外光束发射到暴露于特定分析物的波导中，由于周围流体中的碳，氧，氢和/或氮键的吸收而导致衰减波的光谱分量的衰减。 在波导的输出处检测这些变化提供了周围流体中一种或多种化合物的类型和浓度的指示。 如果需要，传感器可以用中红外光源和中红外检测器集成到硅衬底上，以形成基于芯片的光谱仪。
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公开(公告)号：US09915785B2
公开(公告)日：2018-03-13
申请号：US15591023
申请日：2017-05-09
CPC分类号： G02B6/29338 , G01N21/431 , G01N21/552 , G01N21/648 , G01N21/65 , G01N21/7746 , G02B6/122 , G02B6/29395 , G02B2006/12038 , G02B2006/12061
摘要： A device includes a substrate, a pedestal extending from the substrate, and a ring resonator disposed on the pedestal above the substrate. The ring resonator has a resonance wavelength greater than 1.5 μm and includes at least one of silicon and chalcogenide glass. The device can be used as a ring resonator sensor or a light source. The ring resonator is substantially transparent to mid-infrared radiation to reduce optical losses. The pedestal has a narrower width compared to the ring resonator to generate improved interaction between evanescent fields of light in the ring resonator and analytes nearby the ring resonator, thereby increasing sensing sensitivity. In addition, fabrication of the device is compatible with complementary metal-oxide-semiconductor (CMOS) processes and hence is amenable to large scale manufacturing.
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公开(公告)号：US20180024072A1
公开(公告)日：2018-01-25
申请号：US15425443
申请日：2017-02-06
IPC分类号： G01N21/77 , G01N33/543
CPC分类号： G01N21/7746 , G01N21/41 , G01N21/648 , G01N21/65 , G01N33/54373 , G01N2021/655 , G01N2021/7776 , G01N2021/7783 , G01N2021/7786 , G01N2021/7789 , G01N2201/061
摘要： A sensing apparatus includes a light source to transmit a light beam, an input switch, a first sensing element, a second sensing element, and a detector. The input switch receives the light beam and includes a phase change material having a first state and a second state. The first sensing element receives the light beam from the input switch when the phase change material is in the first state and produces a first change in the light beam in response to a presence of a first analyte. The second sensing element receives the light beam from the input switch when the phase change material is in the second state and produces a second change in the light beam in response to a presence of a second analyte. The detector detects the first change and/or the second change in the light beam.
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公开(公告)号：US09046650B2
公开(公告)日：2015-06-02
申请号：US14076655
申请日：2013-11-11
摘要： A chip-scale, air-clad semiconductor pedestal waveguide can be used as a mid-infrared (mid-IR) sensor capable of in situ monitoring of organic solvents and other analytes. The sensor uses evanescent coupling from a silicon or germanium waveguide, which is highly transparent in the mid-IR portion of the electromagnetic spectrum, to probe the absorption spectrum of fluid surrounding the waveguide. Launching a mid-IR beam into the waveguide exposed to a particular analyte causes attenuation of the evanescent wave's spectral components due to absorption by carbon, oxygen, hydrogen, and/or nitrogen bonds in the surrounding fluid. Detecting these changes at the waveguide's output provides an indication of the type and concentration of one or more compounds in the surrounding fluid. If desired, the sensor may be integrated onto a silicon substrate with a mid-IR light source and a mid-IR detector to form a chip-based spectrometer.
摘要翻译： 芯片尺寸的空气包层半导体基座波导可用作能够原位监测有机溶剂和其他分析物的中红外（中红外）传感器。 该传感器使用来自硅或锗波导的消逝耦合，其在电磁光谱的中红外部分中是高度透明的，以探测波导周围的流体的吸收光谱。 将中红外光束发射到暴露于特定分析物的波导中，由于周围流体中的碳，氧，氢和/或氮键的吸收而导致衰减波的光谱分量的衰减。 在波导的输出处检测这些变化提供了周围流体中一种或多种化合物的类型和浓度的指示。 如果需要，传感器可以用中红外光源和中红外检测器集成到硅衬底上，以形成基于芯片的光谱仪。
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