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公开(公告)号：US09915785B2
公开(公告)日：2018-03-13
申请号：US15591023
申请日：2017-05-09
CPC分类号： G02B6/29338 , G01N21/431 , G01N21/552 , G01N21/648 , G01N21/65 , G01N21/7746 , G02B6/122 , G02B6/29395 , G02B2006/12038 , G02B2006/12061
摘要： A device includes a substrate, a pedestal extending from the substrate, and a ring resonator disposed on the pedestal above the substrate. The ring resonator has a resonance wavelength greater than 1.5 μm and includes at least one of silicon and chalcogenide glass. The device can be used as a ring resonator sensor or a light source. The ring resonator is substantially transparent to mid-infrared radiation to reduce optical losses. The pedestal has a narrower width compared to the ring resonator to generate improved interaction between evanescent fields of light in the ring resonator and analytes nearby the ring resonator, thereby increasing sensing sensitivity. In addition, fabrication of the device is compatible with complementary metal-oxide-semiconductor (CMOS) processes and hence is amenable to large scale manufacturing.
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公开(公告)号：US20180024072A1
公开(公告)日：2018-01-25
申请号：US15425443
申请日：2017-02-06
IPC分类号： G01N21/77 , G01N33/543
CPC分类号： G01N21/7746 , G01N21/41 , G01N21/648 , G01N21/65 , G01N33/54373 , G01N2021/655 , G01N2021/7776 , G01N2021/7783 , G01N2021/7786 , G01N2021/7789 , G01N2201/061
摘要： A sensing apparatus includes a light source to transmit a light beam, an input switch, a first sensing element, a second sensing element, and a detector. The input switch receives the light beam and includes a phase change material having a first state and a second state. The first sensing element receives the light beam from the input switch when the phase change material is in the first state and produces a first change in the light beam in response to a presence of a first analyte. The second sensing element receives the light beam from the input switch when the phase change material is in the second state and produces a second change in the light beam in response to a presence of a second analyte. The detector detects the first change and/or the second change in the light beam.
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公开(公告)号：US20140264030A1
公开(公告)日：2014-09-18
申请号：US14076655
申请日：2013-11-11
摘要： A chip-scale, air-clad semiconductor pedestal waveguide can be used as a mid-infrared (mid-IR) sensor capable of in situ monitoring of organic solvents and other analytes. The sensor uses evanescent coupling from a silicon or germanium waveguide, which is highly transparent in the mid-IR portion of the electromagnetic spectrum (e.g., between λ=1.3 μm and λ=6.5 μm for silicon and λ=1.3 μm and λ=12.0 μm for germanium), to probe the absorption spectrum of the fluid surrounding the waveguide. Launching a mid-IR beam into the waveguide exposed to a particular analyte causes attenuation of the evanescent wave's spectral components due to absorption by carbon, oxygen, hydrogen, and/or nitrogen bonds in the surrounding fluid. Detecting these changes at the waveguide's output provides an indication of the type and concentration of one or more compounds in the surrounding fluid. If desired, the sensor may be integrated onto a silicon substrate with a mid-IR light source and a mid-IR detector to form a chip-based spectrometer.
摘要翻译： 芯片尺寸的空气包层半导体基座波导可用作能够原位监测有机溶剂和其他分析物的中红外（中红外）传感器。 传感器使用来自硅或锗波导的衰减耦合，其在电磁光谱的中红外部分中是高度透明的（例如，对于硅，λ=1.3μm和λ=6.5μm，λ=1.3μm和λ= 12.0 用于锗），以探测波导周围的流体的吸收光谱。 将中红外光束发射到暴露于特定分析物的波导中，由于周围流体中的碳，氧，氢和/或氮键的吸收而导致衰减波的光谱分量的衰减。 在波导的输出处检测这些变化提供了周围流体中一种或多种化合物的类型和浓度的指示。 如果需要，传感器可以用中红外光源和中红外检测器集成到硅衬底上，以形成基于芯片的光谱仪。
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公开(公告)号：US20170299434A1
公开(公告)日：2017-10-19
申请号：US15602323
申请日：2017-05-23
申请人： Juejun Hu , Tian GU , Kazumi WADA , Anuradha Murthy AGARWAL , Lionel Cooper KIMERLING , Derek Matthew KITA , Junying LI , Fleur Jacolien FOK
发明人： Juejun Hu , Tian GU , Kazumi WADA , Anuradha Murthy AGARWAL , Lionel Cooper KIMERLING , Derek Matthew KITA , Junying LI , Fleur Jacolien FOK
CPC分类号： G01J3/12 , G01J3/0208 , G01J3/0218 , G01J3/0237 , G01J3/2823 , G01J3/32 , G01J2003/1226
摘要： An apparatus for generating a spectral image includes a filter to receive incident light. The filter has a variable refractive index. The apparatus also includes a modulator, operably coupled to the filter, to modulate the variable refractive index of the filter so as to generate a plurality of optical patterns from the incident light. The plurality of optical patterns represents the spectral image and each optical pattern in the plurality of optical patterns corresponds to a different modulation of the variable refractive index. The apparatus further includes a detector, in optical communication with the filter, to detect the plurality of optical patterns.
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公开(公告)号：US20170242194A1
公开(公告)日：2017-08-24
申请号：US15591023
申请日：2017-05-09
CPC分类号： G02B6/29338 , G01N21/431 , G01N21/552 , G01N21/648 , G01N21/65 , G01N21/7746 , G02B6/122 , G02B6/29395 , G02B2006/12038 , G02B2006/12061
摘要： A device includes a substrate, a pedestal extending from the substrate, and a ring resonator disposed on the pedestal above the substrate. The ring resonator has a resonance wavelength greater than 1.5 μm and includes at least one of silicon and chalcogenide glass. The device can be used as a ring resonator sensor or a light source. The ring resonator is substantially transparent to mid-infrared radiation to reduce optical losses. The pedestal has a narrower width compared to the ring resonator to generate improved interaction between evanescent fields of light in the ring resonator and analytes nearby the ring resonator, thereby increasing sensing sensitivity. In addition, fabrication of the device is compatible with complementary metal-oxide-semiconductor (CMOS) processes and hence is amenable to large scale manufacturing.
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公开(公告)号：US09046650B2
公开(公告)日：2015-06-02
申请号：US14076655
申请日：2013-11-11
摘要： A chip-scale, air-clad semiconductor pedestal waveguide can be used as a mid-infrared (mid-IR) sensor capable of in situ monitoring of organic solvents and other analytes. The sensor uses evanescent coupling from a silicon or germanium waveguide, which is highly transparent in the mid-IR portion of the electromagnetic spectrum, to probe the absorption spectrum of fluid surrounding the waveguide. Launching a mid-IR beam into the waveguide exposed to a particular analyte causes attenuation of the evanescent wave's spectral components due to absorption by carbon, oxygen, hydrogen, and/or nitrogen bonds in the surrounding fluid. Detecting these changes at the waveguide's output provides an indication of the type and concentration of one or more compounds in the surrounding fluid. If desired, the sensor may be integrated onto a silicon substrate with a mid-IR light source and a mid-IR detector to form a chip-based spectrometer.
摘要翻译： 芯片尺寸的空气包层半导体基座波导可用作能够原位监测有机溶剂和其他分析物的中红外（中红外）传感器。 该传感器使用来自硅或锗波导的消逝耦合，其在电磁光谱的中红外部分中是高度透明的，以探测波导周围的流体的吸收光谱。 将中红外光束发射到暴露于特定分析物的波导中，由于周围流体中的碳，氧，氢和/或氮键的吸收而导致衰减波的光谱分量的衰减。 在波导的输出处检测这些变化提供了周围流体中一种或多种化合物的类型和浓度的指示。 如果需要，传感器可以用中红外光源和中红外检测器集成到硅衬底上，以形成基于芯片的光谱仪。
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公开(公告)号：US10240980B2
公开(公告)日：2019-03-26
申请号：US15602323
申请日：2017-05-23
申请人： Juejun Hu , Tian Gu , Kazumi Wada , Anuradha Murthy Agarwal , Lionel Cooper Kimerling , Derek Matthew Kita , Junying Li , Fleur Jacolien Fok
发明人： Juejun Hu , Tian Gu , Kazumi Wada , Anuradha Murthy Agarwal , Lionel Cooper Kimerling , Derek Matthew Kita , Junying Li , Fleur Jacolien Fok
摘要： An apparatus for generating a spectral image includes a filter to receive incident light. The filter has a variable refractive index. The apparatus also includes a modulator, operably coupled to the filter, to modulate the variable refractive index of the filter so as to generate a plurality of optical patterns from the incident light. The plurality of optical patterns represents the spectral image and each optical pattern in the plurality of optical patterns corresponds to a different modulation of the variable refractive index. The apparatus further includes a detector, in optical communication with the filter, to detect the plurality of optical patterns.
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公开(公告)号：US08928883B1
公开(公告)日：2015-01-06
申请号：US12948485
申请日：2010-11-17
申请人： Frank B. Jaworski , Justin Gordon Adams Wehner , Adam M. Kennedy , Darin S. Williams , Anuradha Murthy Agarwal , Juejun Hu
发明人： Frank B. Jaworski , Justin Gordon Adams Wehner , Adam M. Kennedy , Darin S. Williams , Anuradha Murthy Agarwal , Juejun Hu
IPC分类号： G01N21/00
CPC分类号： G01N21/7746 , G01N2021/7776
摘要： In certain embodiments, a system for detecting an agent includes a resonator device configured to receive an agent. The resonator device is also configured to transmit light received from a light source, the transmitted light having an altered peak wavelength due to the presence of the received agent. The system further includes a filter device configured to filter the transmitted light having the altered peak wavelength such that the transmitted light having the altered peak wavelength does not reach one or more detectors of a detector array configured to receive transmitted light not filtered by the filter device. The system further includes a processing system operable to determine that the one or more detectors of the detector array are not generating a signal, the absence of the signal being generated by the one or more detectors of the detector array indicating the presence of the agent.
摘要翻译： 在某些实施例中，用于检测代理的系统包括被配置为接收代理的谐振器装置。 谐振器装置还被配置为透射从光源接收的光，由于接收到的代理的存在，透射光具有改变的峰值波长。 该系统还包括滤波器装置，该滤波器装置被配置为对具有改变的峰值波长的透射光进行滤波，使得具有改变的峰值波长的透射光未达到检测器阵列的一个或多个检测器，其被配置为接收未被滤波器装置滤波的透射光 。 系统还包括处理系统，其可操作以确定检测器阵列的一个或多个检测器不产生信号，由检测器阵列的一个或多个检测器产生的信号的不存在指示代理的存在。
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