Invention Grant
- Patent Title: Substrate treatment apparatus and substrate treatment method
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Application No.: US14644772Application Date: 2015-03-11
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Publication No.: US09934958B2Publication Date: 2018-04-03
- Inventor: Katsuhiro Sato , Junichi Igarashi
- Applicant: TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Minato-ku
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2014-232989 20141117
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/67

Abstract:
The substrate treatment apparatus includes a first nozzle, a second nozzle, a detector, and a controller. The first nozzle supplies an organic sublimable material-containing liquid capable of displacing a rinsing liquid, to a surface of a substrate treated with the rinsing liquid. The second nozzle supplies vapor of a solvent in which the organic sublimable material is capable of dissolving, to the surface of the substrate. The detector detects a first physical amount of the vapor on the surface of the substrate. The controller controls a second physical amount of the vapor according to the first physical amount.
Public/Granted literature
- US20160141170A1 SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD Public/Granted day:2016-05-19
Information query
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