Invention Grant
- Patent Title: Switchable filters and design structures
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Application No.: US14940815Application Date: 2015-11-13
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Publication No.: US09935600B2Publication Date: 2018-04-03
- Inventor: James W. Adkisson , Panglijen Candra , Thomas J. Dunbar , Jeffrey P. Gambino , Mark D. Jaffe , Anthony K. Stamper , Randy L. Wolf
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran Cole & Calderon P.C.
- Agent Steven Meyers; Andrew M. Calderon
- Main IPC: H03H9/64
- IPC: H03H9/64 ; H03H3/04 ; H03H3/08 ; H03H9/05 ; H03H9/10 ; H01L41/09 ; B81B7/00 ; B81B7/02 ; G06F17/50 ; H03H9/48 ; H03H9/54 ; H01P1/205

Abstract:
Switchable and/or tunable filters, methods of manufacture and design structures are disclosed herein. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed on a piezoelectric substrate. The method further includes forming a micro-electro-mechanical structure (MEMS) comprising a MEMS beam formed above the piezoelectric substrate and at a location in which, upon actuation, the MEMS beam shorts the piezoelectric filter structure by contacting at least one of the plurality of electrodes.
Public/Granted literature
- US20160072469A1 SWITCHABLE FILTERS AND DESIGN STRUCTURES Public/Granted day:2016-03-10
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