公开(公告)号：US20130161283A1

公开(公告)日：2013-06-27

申请号：US13775338

申请日：2013-02-25

Applicant: International Business Machines Corporation

Inventor： James W. Adkisson ,  Panglijen Candra ,  Thomas J. Dunbar ,  Jeffrey P. Gambino ,  Mark D. Jaffe ,  Anthony K. Stamper ,  Randy L. Wolf

IPC: H01L41/33 ,  H01L41/332

CPC classification number: H03H9/14538 ,  H03H3/08

Abstract: Disclosed herein is a surface acoustic wave (SAW) filter and method of making the same. The SAW filter includes a piezoelectric substrate; a planar barrier layer disposed above the piezoelectric substrate, and at least one conductor buried in the piezoelectric substrate and the planar barrier layer.

公开(公告)号：US10164597B2

公开(公告)日：2018-12-25

申请号：US15691272

申请日：2017-08-30

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： James W. Adkisson ,  Panglijen Candra ,  Thomas J. Dunbar ,  Mark D. Jaffe ,  Anthony K. Stamper ,  Randy L. Wolf

IPC: H03H7/00 ,  H03H9/00 ,  H03H3/007 ,  H03H9/56 ,  H03H9/10 ,  H03H9/24 ,  G06F17/50 ,  H03H3/08 ,  H03H9/02 ,  H03H9/54 ,  H03H9/64 ,  H03H9/15 ,  H03H3/02

Abstract: Switchable and/or tunable filters, methods of manufacture and design structures are disclosed herein. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed to be in contact with at least one piezoelectric substrate. The method further includes forming a micro-electro-mechanical structure (MEMS) comprising a MEMS beam in which, upon actuation, the MEMS beam will turn on the at least one piezoelectric filter structure by interleaving electrodes in contact with the piezoelectric substrate or sandwiching the at least one piezoelectric substrate between the electrodes.

公开(公告)号：US10008597B2

公开(公告)日：2018-06-26

申请号：US14505536

申请日：2014-10-03

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： Darshana N. Bhagat ,  Thomas J. Dunbar ,  Yen L. Lim ,  Jed H. Rankin ,  Eva S. Holmes

IPC: H01L29/78 ,  H01L21/265 ,  H01L21/8238 ,  H01L21/266

CPC classification number: H01L29/7835 ,  H01L21/26513 ,  H01L21/26586 ,  H01L21/266 ,  H01L21/823807 ,  H01L29/7833

Abstract: A method includes forming a hardmask over one or more gate structures. The method further includes forming a photoresist over the hardmask. The method further includes forming an opening in the photoresist over at least one of the gate structures. The method further includes stripping the hardmask that is exposed in the opening and which is over the at least one of the gate structures. The method further includes removing the photoresist. The method further includes providing a halo implant on a side of the least one of the at least one of the gate structures.

公开(公告)号：US08957405B2

公开(公告)日：2015-02-17

申请号：US14076714

申请日：2013-11-11

Applicant: International Business Machines Corporation

Inventor： James W. Adkisson ,  Thomas J. Dunbar ,  Jeffrey P. Gambino ,  Molly J. Leitch

IPC: H01L21/00 ,  H01L29/16 ,  H01L29/78 ,  H01L29/66 ,  H01L29/778 ,  H01L29/417 ,  H01L29/786 ,  H01L27/12

CPC classification number: H01L29/1606 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/186 ,  H01L27/1222 ,  H01L29/41733 ,  H01L29/42384 ,  H01L29/66045 ,  H01L29/66742 ,  H01L29/778 ,  H01L29/7786 ,  H01L29/785 ,  H01L29/78684 ,  H01L29/78696

Abstract: Manufacturing a semiconductor structure including: forming a seed material on a sidewall of a mandrel; forming a graphene field effect transistor (FET) on the seed material; and removing the seed material.

Abstract translation: 制造半导体结构，包括：在心轴的侧壁上形成种子材料; 在种子材料上形成石墨烯场效应晶体管（FET）; 并移除种子材料。

公开(公告)号：US10277188B2

公开(公告)日：2019-04-30

申请号：US15971257

申请日：2018-05-04

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： James W. Adkisson ,  Panglijen Candra ,  Thomas J. Dunbar ,  Mark D. Jaffe ,  Anthony K. Stamper ,  Randy L. Wolf

IPC: H03H9/54 ,  H03H3/02 ,  H03H3/08 ,  H03H3/007 ,  H03H9/56 ,  H03H9/10 ,  H03H9/24 ,  G06F17/50 ,  H03H9/02 ,  H03H9/64 ,  H03H9/15

Abstract: Switchable and/or tunable filters, methods of manufacture and design structures are disclosed herein. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed to be in contact with at least one piezoelectric substrate. The method further includes forming a micro-electro-mechanical structure (MEMS) comprising a MEMS beam in which, upon actuation, the MEMS beam will turn on the at least one piezoelectric filter structure by interleaving electrodes in contact with the piezoelectric substrate or sandwiching the at least one piezoelectric substrate between the electrodes.

公开(公告)号：US09843303B2

公开(公告)日：2017-12-12

申请号：US14755522

申请日：2015-06-30

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： James W. Adkisson ,  Panglijen Candra ,  Thomas J. Dunbar ,  Jeffrey P. Gambino ,  Mark D. Jaffe ,  Anthony K. Stamper ,  Randy L. Wolf

IPC: H01L41/047 ,  H03H9/25 ,  H03H9/13 ,  H03H9/64 ,  H01L41/08 ,  G06F17/50 ,  H03H3/08 ,  H03H3/007 ,  H03H9/02

CPC classification number: H03H9/13 ,  G06F17/5081 ,  H01L41/08 ,  H03H3/08 ,  H03H9/02543 ,  H03H9/64 ,  H03H9/6403 ,  H03H9/6413 ,  H03H2003/0071 ,  H03H2009/02299 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49126 ,  Y10T29/49147 ,  Y10T29/49155

Abstract: Switchable and/or tunable filters, methods of manufacture and design structures are disclosed herein. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed on a piezoelectric substrate. The method further includes forming a fixed electrode with a plurality of fingers on the piezoelectric substrate. The method further includes forming a moveable electrode with a plurality of fingers over the piezoelectric substrate. The method further includes forming actuators aligned with one or more of the plurality of fingers of the moveable electrode.

公开(公告)号：US09300272B2

公开(公告)日：2016-03-29

申请号：US14700744

申请日：2015-04-30

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： James W. Adkisson ,  Panglijen Candra ,  Thomas J. Dunbar ,  Mark D. Jaffe ,  Robert K. Leidy ,  Anthony K. Stamper

IPC: H03H9/00 ,  H03H9/54 ,  H03H9/17 ,  H03H9/56 ,  H03H9/05 ,  H03H9/15 ,  H03H9/02

CPC classification number: H03H9/545 ,  H03H9/0547 ,  H03H9/171 ,  H03H9/173 ,  H03H9/56 ,  H03H2009/02204 ,  Y10T29/42

Abstract: Tunable filter structures, methods of manufacture and design structures are disclosed. The method of forming a filter structure includes forming a piezoelectric resonance filter over a cavity structure. The forming of the piezoelectric resonance filter includes: forming an upper electrode on one side of a piezoelectric material; and forming a lower electrode on an opposing side of the piezoelectric material. The method further includes forming a micro-electro-mechanical structure (MEMS) cantilever beam at a location in which, upon actuation, makes contact with the piezoelectric resonance filter.

公开(公告)号：US09252733B2

公开(公告)日：2016-02-02

申请号：US14522676

申请日：2014-10-24

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： James W. Adkisson ,  Panglijen Candra ,  Thomas J. Dunbar ,  Jeffrey P. Gambino ,  Mark D. Jaffe ,  Anthony K. Stamper ,  Randy L. Wolf

IPC: H03H9/64 ,  H03H3/08 ,  H03H9/05 ,  H03H9/10 ,  H01L41/09 ,  B81B7/00 ,  B81B7/02 ,  G06F17/50 ,  H03H9/48 ,  H03H9/54 ,  H01P1/205

CPC classification number: H03H3/04 ,  B81B7/008 ,  B81B7/02 ,  G06F17/5045 ,  H01L41/094 ,  H01L41/0973 ,  H03H3/08 ,  H03H9/0542 ,  H03H9/0547 ,  H03H9/1064 ,  H03H9/1092 ,  H03H9/48 ,  H03H9/542 ,  H03H9/6403 ,  H03H9/6423 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49126 ,  Y10T29/49147 ,  Y10T29/49156

Abstract: Switchable and/or tunable filters, methods of manufacture and design structures are disclosed herein. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed on a piezoelectric substrate. The method further includes forming a micro-electro-mechanical structure (MEMS) comprising a MEMS beam formed above the piezoelectric substrate and at a location in which, upon actuation, the MEMS beam shorts the piezoelectric filter structure by contacting at least one of the plurality of electrodes.

Abstract translation: 本文公开了可切换和/或可调滤波器，制造方法和设计结构。 形成滤波器的方法包括形成至少一个包括形成在压电基片上的多个电极的压电滤波器结构。 该方法还包括形成微电子机械结构（MEMS），该微机电结构（MEMS）包括形成在压电基板上方的MEMS光束，并且在致动时，MEMS光束通过使多个或多个之中的至少一个接触而使压电滤波器结构短路的位置 的电极。

公开(公告)号：US10164596B2

公开(公告)日：2018-12-25

申请号：US15691249

申请日：2017-08-30

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： James W. Adkisson ,  Panglijen Candra ,  Thomas J. Dunbar ,  Mark D. Jaffe ,  Anthony K. Stamper ,  Randy L. Wolf

IPC: H03H7/00 ,  H03H9/00 ,  H03H3/007 ,  H03H9/56 ,  H03H9/10 ,  H03H9/24 ,  G06F17/50 ,  H03H3/08 ,  H03H9/02 ,  H03H9/54 ,  H03H9/64 ,  H03H9/15 ,  H03H3/02

Abstract: Switchable and/or tunable filters, methods of manufacture and design structures are disclosed herein. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed to be in contact with at least one piezoelectric substrate. The method further includes forming a micro-electro-mechanical structure (MEMS) comprising a MEMS beam in which, upon actuation, the MEMS beam will turn on the at least one piezoelectric filter structure by interleaving electrodes in contact with the piezoelectric substrate or sandwiching the at least one piezoelectric substrate between the electrodes.

公开(公告)号：US10020789B2

公开(公告)日：2018-07-10

申请号：US14840834

申请日：2015-08-31

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： James W. Adkisson ,  Panglijen Candra ,  Thomas J. Dunbar ,  Mark D. Jaffe ,  Anthony K. Stamper ,  Randy L. Wolf

IPC: H03H9/54 ,  H03H3/08 ,  H03H3/007 ,  H03H9/56 ,  H03H9/10 ,  H03H9/24 ,  G06F17/50 ,  H03H9/02 ,  H03H9/64 ,  H03H3/02 ,  H03H9/15

CPC classification number: H03H3/007 ,  G06F17/5063 ,  H03H3/02 ,  H03H3/08 ,  H03H9/02007 ,  H03H9/02244 ,  H03H9/02992 ,  H03H9/1071 ,  H03H9/2447 ,  H03H9/2452 ,  H03H9/2457 ,  H03H9/2463 ,  H03H9/54 ,  H03H9/56 ,  H03H9/64 ,  H03H2003/022 ,  H03H2003/023 ,  H03H2003/027 ,  H03H2009/155 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49155

Abstract: Switchable and/or tunable filters, methods of manufacture and design structures are disclosed herein. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed to be in contact with at least one piezoelectric substrate. The method further includes forming a micro-electro-mechanical structure (MEMS) comprising a MEMS beam in which, upon actuation, the MEMS beam will turn on the at least one piezoelectric filter structure by interleaving electrodes in contact with the piezoelectric substrate or sandwiching the at least one piezoelectric substrate between the electrodes.