- 专利标题： Device and method for treating substrate surfaces
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申请号： US14346109申请日： 2011-09-22
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公开(公告)号： US09960058B2公开(公告)日： 2018-05-01
- 发明人: Thomas Glinsner , Ronald Holzleitner , Thomas Wieser , Florian Schmid
- 申请人： Thomas Glinsner , Ronald Holzleitner , Thomas Wieser , Florian Schmid
- 申请人地址： AT St. Florian Am Inn
- 专利权人： EV GROUP E. THALLNER GMBH
- 当前专利权人： EV GROUP E. THALLNER GMBH
- 当前专利权人地址： AT St. Florian Am Inn
- 代理机构： Kusner & Jaffe
- 国际申请： PCT/EP2011/066529 WO 20110922
- 国际公布： WO2013/041144 WO 20130328
- 主分类号： H01L21/67
- IPC分类号： H01L21/67 ; H01L21/02 ; H01L21/687
摘要：
A device and method for treatment of a substrate treatment surface of a substrate with a fluid by immersion of the substrate treatment surface into the fluid. The device includes: receiving means for receiving the fluid with an immersion opening and immersion means for immersion of the substrate treatment surfaces through the immersion opening into the receiving means, Rotation means are provided for rotation of the receiving means for at least predominant discharge of the fluid from the receiving means.
公开/授权文献
- US20140332036A1 DEVICE AND METHOD FOR TREATING SUBSTRATE SURFACES 公开/授权日：2014-11-13
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