Invention Grant
- Patent Title: Multiple patterning techniques for metal gate
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Application No.: US15001364Application Date: 2016-01-20
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Publication No.: US09960085B2Publication Date: 2018-05-01
- Inventor: Hsiang-Pi Chang , Chih-Hao Wang , Wei-Hao Wu , Hung-Chang Sun , Lung-Kun Chu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L21/338
- IPC: H01L21/338 ; H01L21/8238 ; H01L27/092 ; H01L29/49

Abstract:
The present disclosure relates to an integrated circuit with a work function metal layer disposed directly on a high-k dielectric layer, and an associated method of formation. In some embodiments, the integrated circuit is formed by forming a first work function metal layer directly on a high-k dielectric layer. Then the first work function metal layer is patterned to be left within a first gate region of a first device region and to be removed within a second gate region of a second device region. Thereby, the first work function metal layer is patterned directly on the high-k dielectric layer, using the high-k dielectric layer as an etch stop layer, and the patterning window is improved.
Public/Granted literature
- US20170207133A1 MULTIPLE PATTERNING TECHNIQUES FOR METAL GATE Public/Granted day:2017-07-20
Information query
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