- Patent Title: Metal bond pad with cobalt interconnect layer and solder thereon
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Application No.: US14665799Application Date: 2015-03-23
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Publication No.: US09960135B2Publication Date: 2018-05-01
- Inventor: Helmut Rinck , Gernot Bauer , Robert Zrile , Kai-Alexander Schachtschneider , Michael Otte , Harald Wiesner
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Jacqueline J. Garner; Charles A. Brill; Frank D. Cimino
- Main IPC: H01L21/28
- IPC: H01L21/28 ; H01L23/00 ; H01L23/522 ; H01L23/532

Abstract:
A method of forming bond pads includes providing a substrate including an integrated circuit (IC) device formed thereon having an oxidizable uppermost metal interconnect layer which provides a plurality of bond pads that are coupled to circuit nodes on the IC device. The plurality of bond pads includes a metal bond pad area. A cobalt including connection layer is deposited directly on the metal bond pad area. The cobalt including connection layer is patterned to provide a cobalt bond pad surface for the plurality of bond pads, and a solder material is formed on the cobalt bond pad surface.
Public/Granted literature
- US20160284656A1 METAL BOND PAD WITH COBALT INTERCONNECT LAYER AND SOLDER THEREON Public/Granted day:2016-09-29
Information query
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