Teaching method and substrate treating apparatus using the same
Abstract:
Disclosed is a teaching method of setting a location of a robot that transports a substrate onto a rotatable support plate that supports the substrate, the teaching method including setting the location of the robot by using decentering values that are acquired by performing an operation of loading the substrate on the support plate with the robot, rotating the support plate by a preset angle, unloading the substrate from the support plate with the robot, and detecting a decentering value of the substrate positioned on a hand of the robot a plurality of times.
Public/Granted literature
Information query
Patent Agency Ranking
0/0