Invention Grant
- Patent Title: Teaching method and substrate treating apparatus using the same
-
Application No.: US15161410Application Date: 2016-05-23
-
Publication No.: US09966285B2Publication Date: 2018-05-08
- Inventor: Duk Sik Kim , Jun Ho You
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Chungcheongnam-Do
- Assignee: SEMES CO. LTD.
- Current Assignee: SEMES CO. LTD.
- Current Assignee Address: KR Chungcheongnam-Do
- Agency: Carter, Deluca, Farrell & Schmidt, LLP
- Priority: KR10-2015-0076463 20150529
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/677 ; H01L21/68 ; H01L21/687

Abstract:
Disclosed is a teaching method of setting a location of a robot that transports a substrate onto a rotatable support plate that supports the substrate, the teaching method including setting the location of the robot by using decentering values that are acquired by performing an operation of loading the substrate on the support plate with the robot, rotating the support plate by a preset angle, unloading the substrate from the support plate with the robot, and detecting a decentering value of the substrate positioned on a hand of the robot a plurality of times.
Public/Granted literature
- US20160351425A1 TEACHING METHOD AND SUBSTRATE TREATING APPARATUS USING THE SAME Public/Granted day:2016-12-01
Information query
IPC分类: