Invention Grant
- Patent Title: Polishing apparatus
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Application No.: US14808252Application Date: 2015-07-24
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Publication No.: US09969048B2Publication Date: 2018-05-15
- Inventor: Itsuki Kobata , Yoichi Kobayashi , Katsutoshi Ono , Masaki Kinoshita , Toshifumi Kimba
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Ebara Corporation
- Current Assignee: Ebara Corporation
- Current Assignee Address: JP Tokyo
- Agency: Baker & Hostetler LLP
- Priority: JP2010-289209 20101227
- Main IPC: B24B49/12
- IPC: B24B49/12 ; B24B37/013 ; B24B37/10 ; B24B37/26 ; H01L21/67 ; H01L21/687 ; B24B37/04 ; B24B37/005 ; H01L21/3105 ; H01L21/66

Abstract:
A polishing apparatus for polishing a substrate is provided. The polishing apparatus includes: a polishing table holding a polishing pad; a top ring configured to press the substrate against the polishing pad; first and second optical heads each configured to apply the light to the substrate and to receive reflected light from the substrate; spectroscopes each configured to measure at each wavelength an intensity of the reflected light received; and a processor configured to produce a spectrum indicating a relationship between intensity and wavelength of the reflected light. The first optical head is arranged so as to face a center of the substrate, and the second optical head is arranged so as to face a peripheral portion of the substrate.
Public/Granted literature
- US20150332943A1 POLISHING APPARATUS Public/Granted day:2015-11-19
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