Invention Grant
- Patent Title: Liquid processing method, memory medium and liquid processing apparatus
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Application No.: US15716663Application Date: 2017-09-27
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Publication No.: US09972512B2Publication Date: 2018-05-15
- Inventor: Akiko Kai , Takafumi Niwa , Shogo Takahashi , Hiroshi Nishihata , Yuichi Terashita , Teruhiko Kodama
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Minato-ku
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2014-203176 20141001
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/311 ; H01L21/687 ; G03F7/30 ; H01L21/033 ; H01L21/02

Abstract:
A liquid processing apparatus for liquid-processing a substrate includes a substrate holding device that rotates a substrate in horizontal position, a nozzle holding device holding processing liquid and gas nozzles, the liquid nozzle discharging processing liquid from a discharge port such that the liquid is discharged obliquely to surface of the substrate, the gas nozzle discharging gas perpendicularly to the surface of the substrate, a moving device that moves the nozzle device with respect to the surface of the substrate, and a control device including circuitry that controls the nozzle, substrate and moving devices such that while the substrate is rotated, the liquid is discharged to peripheral portion toward downstream side in rotation direction and along tangential direction of the substrate and gas is discharged from the gas nozzle toward position adjacent to liquid landing position of the liquid on the surface and is on center side of the substrate.
Public/Granted literature
- US20180019112A1 LIQUID PROCESSING METHOD, MEMORY MEDIUM AND LIQUID PROCESSING APPARATUS Public/Granted day:2018-01-18
Information query
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