Invention Grant
- Patent Title: Extreme ultraviolet light generation system
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Application No.: US15284805Application Date: 2016-10-04
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Publication No.: US09980360B2Publication Date: 2018-05-22
- Inventor: Tatsuya Yanagida , Osamu Wakabayashi
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Priority: JP2013-116242 20130531
- Main IPC: H05G2/00
- IPC: H05G2/00 ; H01S3/06 ; H01S3/11 ; H01S3/223 ; H01S3/08 ; H01S3/107 ; H01S3/16 ; H01S3/23 ; H01S3/00

Abstract:
An extreme ultraviolet light (EUV) generation system is configured to improve conversion efficiency of energy of a laser system to EUV energy by improving the efficiency of plasma generation. The EUV generation system includes a target generation unit configured to output a target toward a plasma generation region in a chamber. The laser system is configured to generate a first pre-pulse laser beam, a second pre-pulse laser beam, and a main pulse laser beam so that the target is irradiated with the first pre-pulse laser beam, the second pre-pulse laser beam, and the main pulse laser beam in this order. In addition, the EUV generation system includes a controller configured to control the laser system so that a fluence of the second pre-pulse laser beam is equal to or higher than 1 J/cm2 and equal to or lower than a fluence of the main pulse laser beam.
Public/Granted literature
- US20170027047A1 EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM Public/Granted day:2017-01-26
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