Invention Application
- Patent Title: CLOSED-LOOP CONTROL FOR IMPROVED POLISHING PAD PROFILES
- Patent Title (中): 用于改进抛光垫轮廓的闭环控制
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Application No.: PCT/US2011/032447Application Date: 2011-04-14
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Publication No.: WO2011133386A2Publication Date: 2011-10-27
- Inventor: DHANDAPANI, Sivakumar , QIAN, Jun , COCCA, Christopher D. , FUNG, Jason Garcheung , CHANG, Shou-Sung , GARRETSON, Charles C. , MENK, Gregory E. , TSAI, Stan D.
- Applicant: APPLIED MATERIALS, INC. , DHANDAPANI, Sivakumar , QIAN, Jun , COCCA, Christopher D. , FUNG, Jason Garcheung , CHANG, Shou-Sung , GARRETSON, Charles C. , MENK, Gregory E. , TSAI, Stan D.
- Applicant Address: 3050 Bowers Avenue Santa Clara, California 95054 US
- Assignee: APPLIED MATERIALS, INC.,DHANDAPANI, Sivakumar,QIAN, Jun,COCCA, Christopher D.,FUNG, Jason Garcheung,CHANG, Shou-Sung,GARRETSON, Charles C.,MENK, Gregory E.,TSAI, Stan D.
- Current Assignee: APPLIED MATERIALS, INC.,DHANDAPANI, Sivakumar,QIAN, Jun,COCCA, Christopher D.,FUNG, Jason Garcheung,CHANG, Shou-Sung,GARRETSON, Charles C.,MENK, Gregory E.,TSAI, Stan D.
- Current Assignee Address: 3050 Bowers Avenue Santa Clara, California 95054 US
- Agency: PATTERSON, B. Todd et al.
- Priority: US61/325,986 20100420
- Main IPC: B24B37/00
- IPC: B24B37/00 ; B24B49/03 ; B24B53/007 ; H01L21/304
Abstract:
Embodiments described herein use closed-loop control (CLC) of conditioning sweep to enable uniform groove depth removal across the pad, throughout pad life. A sensor integrated into the conditioning arm enables the pad stack thickness to be monitored in-situ and in real time. Feedback from the thickness sensor is used to modify pad conditioner dwell times across the pad surface, correcting for drifts in the pad profile that may arise as the pad and disk age. Pad profile CLC enables uniform reduction in groove depth with continued conditioning, providing longer consumables lifetimes and reduced operating costs.
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