Invention Application
WO2016094580A1 SCREEN PRINTING SYSTEMS AND TECHNIQUES FOR CREATING THIN-FILM TRANSISTORS USING SEPARATED CARBON NANOTUBES
审中-公开
使用分离碳纳米管制造薄膜晶体管的屏幕打印系统和技术
- Patent Title: SCREEN PRINTING SYSTEMS AND TECHNIQUES FOR CREATING THIN-FILM TRANSISTORS USING SEPARATED CARBON NANOTUBES
- Patent Title (中): 使用分离碳纳米管制造薄膜晶体管的屏幕打印系统和技术
-
Application No.: PCT/US2015/064830Application Date: 2015-12-09
-
Publication No.: WO2016094580A1Publication Date: 2016-06-16
- Inventor: ZHOU, Chongwu , CAO, Xuan , CHEN, Haitian , LIU, Bilu , CAO, Yu , GU, Xiaofei , WANG, Wenli , WU, Fanqi
- Applicant: UNIVERSITY OF SOUTHERN CALIFORNIA
- Applicant Address: 1150 South Olive Street Suite 2300 Los Angeles, California 90015 US
- Assignee: UNIVERSITY OF SOUTHERN CALIFORNIA
- Current Assignee: UNIVERSITY OF SOUTHERN CALIFORNIA
- Current Assignee Address: 1150 South Olive Street Suite 2300 Los Angeles, California 90015 US
- Agency: YEH, Ka-Lo et al.
- Priority: US62/089,797 20141209
- Main IPC: H01L27/11
- IPC: H01L27/11
Abstract:
A method of fabricating a thin film transistor, the method includes applying a first ink containing metallic particles to a first screen mask, and using the first screen mask to deposit the first ink to form a source electrode and a drain electrode on a substrate bearing a layer of carbon nanotubes (CNT). The method includes applying a second ink containing a dielectric material to a second screen mask, and using the second screen mask to deposit the second ink to form a layer of the dielectric material on the layer of CNT between the source electrode and the drain electrode. The method includes applying a third ink containing metallic particles to a third screen mask, and using the third screen mask to deposit the first ink to form a metallic gate electrode on the layer of the dielectric material to form the thin film transistor.
Information query
IPC分类:
