Invention Application
- Patent Title: THREE-DIMENSIONAL MEMORY DEVICE WITH VERTICAL WORD LINE BARRIER AND METHODS FOR FORMING THE SAME
-
Application No.: PCT/US2021/065375Application Date: 2021-12-28
-
Publication No.: WO2022260708A1Publication Date: 2022-12-15
- Inventor: SHARANGPANI, Rahul , MAKALA, Raghuveer S. , ZHOU, Fei , RAJASHEKHAR, Adarsh
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: 5080 Spectrum Drive
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: 5080 Spectrum Drive
- Agency: RADOMSKY, Leon et al.
- Priority: US17/345,831 2021-06-11
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L21/28 ; H01L27/11556 ; H01L27/1157 ; H01L27/11582 ; H01L27/11519 ; H01L27/11565
Abstract:
A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers, memory openings vertically extending through the alternating stack, and memory opening fill structures located within the memory openings. Each of the electrically conductive layers includes a metallic fill material layer and a plurality of vertical tubular metallic liners laterally surrounding a respective one of the memory opening fill structures and located between the metallic fill material layer and a respective one of the memory opening fill structures. The tubular metallic liners may be formed by selective metal or metal oxide deposition, or by conversion of surface portions of the metallic fill material layers into metallic compound material portions by nitridation, oxidation, or incorporation of boron atoms.
Information query
IPC分类: