Invention Application
- Patent Title: METROLOGY SLOT PLATES
-
Application No.: PCT/US2022/042442Application Date: 2022-09-02
-
Publication No.: WO2023034559A1Publication Date: 2023-03-09
- Inventor: DOERING, Kenneth Brian , SHAH, Vivek B. , AGARWAL, Ashutosh , BALUJA, Sanjeev , SAMPATHKUMAR, Shrihari , ZHANG, Chunlei
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: 3050 Bowers Avenue
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: 3050 Bowers Avenue
- Agency: BLANKMAN, Jeffrey I.
- Priority: US17/466,403 2021-09-03
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/677 ; H01L21/687 ; C23C16/52 ; C23C16/455 ; C23C16/458
Abstract:
Metrology slot plates, processing chamber lids and processing chambers having metrology slot plates are described. Each of the metrology slot plates independently comprises one or more of a plate blank, a reflectometer, a capacitance sensor, a gas flow meter, a manometer, a pyrometer, a distance sensor (laser) or an emissometer.
Information query
IPC分类:
