公开(公告)号：WO2022035678A1

公开(公告)日：2022-02-17

申请号：PCT/US2021/044706

申请日：2021-08-05

Applicant: APPLIED MATERIALS, INC.

Inventor： CHOWDHURY, Abhishek ,  GRIFFIN, Kevin ,  DOERING, Kenneth Brian ,  NANJUNDEGOWDA, Santhoshkumar Doddegowdanapalya ,  KOSTHI, Somashekhar ,  GHOSH, Abhijit

IPC: B66F19/00 ,  H01L21/67

Abstract: Apparatus and methods for lifting loads are described. The load lift includes a support frame and a lift assembly with main cylinder and at least one standby cylinder connecting a rotatable cross beam with a clamp plate. A rotary actuator assembly is connected to the lift beam to move the lift assembly out of the way while not in use by rotating the lift assembly from a lift position to a standby position.

公开(公告)号：WO2019246038A1

公开(公告)日：2019-12-26

申请号：PCT/US2019/037652

申请日：2019-06-18

Applicant: APPLIED MATERIALS, INC.

Inventor： DOERING, Kenneth Brian ,  SILVETTI, Mario D. ,  GRIFFIN, Kevin

IPC: H01L21/67 ,  H01L21/02 ,  C23C16/455

Abstract: Gas injector inserts having a wedge-shaped housing, at least one first slot and at least one second slot are described. The housing has a first opening in the back face that is in fluid communication with the first slot in the front face and a second opening in the back face that is in fluid communication with the second slot in the front face. Each of the first slot and the second slot has an elongate axis that extends from the inner peripheral end to the outer peripheral end of the housing. The gas injector insert is configured to provide a flow of gas through the first slots at supersonic velocity. Gas distribution assemblies and processing chambers including the gas injector inserts are described.

公开(公告)号：WO2023034559A1

公开(公告)日：2023-03-09

申请号：PCT/US2022/042442

申请日：2022-09-02

Applicant: APPLIED MATERIALS, INC.

Inventor： DOERING, Kenneth Brian ,  SHAH, Vivek B. ,  AGARWAL, Ashutosh ,  BALUJA, Sanjeev ,  SAMPATHKUMAR, Shrihari ,  ZHANG, Chunlei

IPC: H01L21/67 ,  H01L21/677 ,  H01L21/687 ,  C23C16/52 ,  C23C16/455 ,  C23C16/458

Abstract: Metrology slot plates, processing chamber lids and processing chambers having metrology slot plates are described. Each of the metrology slot plates independently comprises one or more of a plate blank, a reflectometer, a capacitance sensor, a gas flow meter, a manometer, a pyrometer, a distance sensor (laser) or an emissometer.

公开(公告)号：WO2022086927A1

公开(公告)日：2022-04-28

申请号：PCT/US2021/055557

申请日：2021-10-19

Applicant: APPLIED MATERIALS, INC.

Inventor： LEE, Jared Ahmad ,  BALUJA, Sanjeev ,  AUBUCHON, Joseph ,  DOERING, Kenneth Brian ,  KASHYAP, Dhritiman Subha ,  SHAH, Kartik

IPC: C23C16/455 ,  C23C16/44

Abstract: Gas distribution assemblies and methods for providing a flow of gases to a process station are described. The gas distribution assemblies comprise a pumping liner with a showerhead and a gas funnel positioned therein. The pumping liner has an inner wall that slants at a first angle relative to a central axis of the gas distribution assembly so that the inner wall adjacent the bottom wall of the pumping liner is closer to the central axis than the inner wall adjacent the top wall. The gas funnel and pumping liner form a plenum between the outer wall of the gas funnel, a cavity in the bottom wall of the gas funnel and the inner wall of the pumping liner.

公开(公告)号：WO2019164865A1

公开(公告)日：2019-08-29

申请号：PCT/US2019/018668

申请日：2019-02-20

Applicant: APPLIED MATERIALS, INC.

Inventor： DOERING, Kenneth Brian ,  WILSON, Gregory J. ,  RAMANATHAN, Karthik ,  SILVETTI, Mario D. ,  GRIFFIN, Kevin

IPC: H01L21/67 ,  H01L21/683 ,  C23C16/455

Abstract: Heaters having a body with having a top and bottom comprising pyrolytic boron nitride (PBN), a first heater electrode and a second heater electrode are described. The heater electrodes can be enclosed within an electrically insulating standoff and connected to separate busbars to provide power. Heater assemblies including one or more of the heaters and processing chambers including the heater assemblies are also described.