Invention Application
- Patent Title: UV-ACTIVATED RED CERAMIC BODIES COMPRISING YAG FOR USE IN SEMICONDUCTOR PROCESSING CHAMBERS
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Application No.: PCT/US2022/075897Application Date: 2022-09-02
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Publication No.: WO2023039357A1Publication Date: 2023-03-16
- Inventor: WALKER, Luke , DONELON, Matthew Joseph , KENNEDY, Steven Roger
- Applicant: HERAEUS CONAMIC NORTH AMERICA LLC
- Applicant Address: 301 North Roosevelt Avenue
- Assignee: HERAEUS CONAMIC NORTH AMERICA LLC
- Current Assignee: HERAEUS CONAMIC NORTH AMERICA LLC
- Current Assignee Address: 301 North Roosevelt Avenue
- Agency: LOGAN, Anthony D. et al.
- Priority: US63/242,631 2021-09-10
- Main IPC: C04B35/44
- IPC: C04B35/44 ; C04B35/626 ; C04B35/645 ; B32B18/00 ; C04B38/00 ; C04B41/00 ; H01J37/00 ; H01L21/00
Abstract:
Disclosed herein is a sintered ceramic body comprising at least one layer comprising from 90% to 99.8% by volume of polycrystalline yttrium aluminum garnet (YAG) and from 15 ppm to 500 ppm of zirconium, wherein the at least one layer comprises at least one surface, wherein the at least one surface comprises pores having a pore size not exceeding 5 pm and having a maximum pore size of 1.5 pm for at least 95% of the pores, wherein the at least one surface exhibits an L* value of from 50 to 77, and an "a" value of from 6 to 12, wherein the at least one layer has a thickness of from 500 pm to 2 cm, and wherein the values of L* and "a" vary no more than 10% across the at least one surface. Also disclosed are methods of making same.
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