UV-ACTIVATED RED CERAMIC BODIES COMPRISING YAG FOR USE IN SEMICONDUCTOR PROCESSING CHAMBERS
Abstract:
Disclosed herein is a sintered ceramic body comprising at least one layer comprising from 90% to 99.8% by volume of polycrystalline yttrium aluminum garnet (YAG) and from 15 ppm to 500 ppm of zirconium, wherein the at least one layer comprises at least one surface, wherein the at least one surface comprises pores having a pore size not exceeding 5 pm and having a maximum pore size of 1.5 pm for at least 95% of the pores, wherein the at least one surface exhibits an L* value of from 50 to 77, and an "a" value of from 6 to 12, wherein the at least one layer has a thickness of from 500 pm to 2 cm, and wherein the values of L* and "a" vary no more than 10% across the at least one surface. Also disclosed are methods of making same.
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