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公开(公告)号：WO2023283536A1
公开(公告)日：2023-01-12
申请号：PCT/US2022/073375
申请日：2022-07-01
IPC分类号： C04B35/505 , C04B35/645 , C04B35/626 , C04B38/00 , H01J37/32
摘要： Disclosed is a ceramic sintered body comprising yttrium oxide and zirconium oxide wherein the ceramic sintered body comprises not less than 75 mol % to not greater than 95 mol % yttrium oxide and not less than 5 mol % to not greater than 25 mol % zirconium oxide, wherein the ceramic sintered body comprises porosity in an amount of less than 2% by volume, wherein a density of the ceramic sintered body does not vary by more than 2% relative to theoretical density across a greatest dimension. The ceramic sintered body has a grain size of from 0.4 to less than 2 um as measured according to ASTM E1 12-2010. The ceramic sintered body may be machined into plasma resistant components for use in plasma processing chambers. Methods of making are also disclosed.
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2.发明申请
公开(公告)号：WO2023039357A1
公开(公告)日：2023-03-16
申请号：PCT/US2022/075897
申请日：2022-09-02
IPC分类号： C04B35/44 , C04B35/626 , C04B35/645 , B32B18/00 , C04B38/00 , C04B41/00 , H01J37/00 , H01L21/00
摘要： Disclosed herein is a sintered ceramic body comprising at least one layer comprising from 90% to 99.8% by volume of polycrystalline yttrium aluminum garnet (YAG) and from 15 ppm to 500 ppm of zirconium, wherein the at least one layer comprises at least one surface, wherein the at least one surface comprises pores having a pore size not exceeding 5 pm and having a maximum pore size of 1.5 pm for at least 95% of the pores, wherein the at least one surface exhibits an L* value of from 50 to 77, and an "a" value of from 6 to 12, wherein the at least one layer has a thickness of from 500 pm to 2 cm, and wherein the values of L* and "a" vary no more than 10% across the at least one surface. Also disclosed are methods of making same.
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公开(公告)号：WO2022072703A1
公开(公告)日：2022-04-07
申请号：PCT/US2021/052978
申请日：2021-09-30
摘要： A spark plasma sintering tool (1). The tool comprises a die (2) including an inner wall having a diameter that defines an inner volume configured to receive a ceramic powder (5), and an upper punch (4) and a lower punch (4') operably coupled with the die, wherein each of the upper and lower punches have an outer wall defining a diameter that is less than the diameter of the inner wall of the die thereby creating a gap from 10 μm to 100 μm wide between each of the punches and the inner wall of the die when at least one of the punches moves within the inner volume of the die. Also disclosed are a method of using the tool to create a large sintered ceramic body and a computer readable medium storing processor-executable instructions adapted to cause one or more computing devices to operate the tool.
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