公开(公告)号：EP0577667A4

公开(公告)日：1994-02-23

申请号：EP92907222

申请日：1992-03-25

申请人： COMMONWEALTH SCIENTIFIC AND INDUSTRIAL RESEARCH ORGANISATION

发明人： MARTIN, PHILIP, JAMES ,  NETTERFIELD, ROGER, PRICE ,  KINDER, TERENCE, JOHN

IPC分类号： H01J27/08 ,  C23C14/08 ,  C23C14/22 ,  H01J37/05 ,  H01J37/08 ,  H01J37/317 ,  H01J37/32 ,  H01J37/36 ,  H01L21/265 ,  H01L21/31 ,  H01L21/314 ,  H01L21/316 ,  H05H1/46

CPC分类号： H01J37/32055 ,  C23C14/083 ,  C23C14/221 ,  H01J37/3178 ,  H01J37/3266 ,  H01J37/36 ,  H01J2237/022 ,  H05H1/46

摘要： An arc source macroparticle filter (1) includes a circular cathode (2) for emitting particles and an extended cylindrical anode (3) adjacent to and co-axial with the cathode for accelerating the emitted particles. Torroids (4) generate a magnetic field to define a continuous non-linear plasma duct (5) for directing charged particles and separating therefrom undesirable larger particles. The duct is minimally non-linear to permit high rates of charged particle transmission. Arc source filter (1) allows heating and/or the deposition of a variety of surface coatings to a workpiece (8). Also claimed is a method of producing vanadium dioxide.

摘要翻译： 电弧源大颗粒过滤器（1）包括用于发射颗粒的圆形阴极（2）和与阴极相邻并与其同轴以加速所发射的颗粒的延伸圆柱形阳极（3）。 陀螺（4）产生磁场以限定连续的非线性等离子体导管（5），用于引导带电粒子并从中分离不希望的较大粒子。 该管道是非常小的非线性以允许带电粒子传输的高速率。 电弧源滤波器（1）允许将多种表面涂层加热和/或沉积到工件（8）。 还要求保护一种生产二氧化钒的方法。