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    An apparatus for measuring electromagnetic field distribution using a focused electron beam
    3.
    发明公开
    An apparatus for measuring electromagnetic field distribution using a focused electron beam 失效
    装置，用于测量的电磁场的分布用聚焦电子束。

    公开(公告)号：EP0595548A1

    公开(公告)日：1994-05-04

    申请号：EP93308385.9

    申请日：1993-10-21

    申请人： HITACHI, LTD.

    发明人： Yajima, Yusuke ,  Takahashi, Yoshio ,  Ichikawa, Masakazu ,  Hosoki, Shigeyuki

    IPC分类号： G01R31/305

    CPC分类号： G01R31/305

    摘要： A disclosure is made on an apparatus for measuring an electromagnetic field distribution using a focused electron beam which can measure the electromagnetic field distribution in a specimen with a high resolution and a high reliability. The present apparatus comprises: a focused electron beam radiation system for irradiating a specimen with a focused electron beam; a specimen tilt mechanism for tilting a specimen by 180° with a tilt axis being perpendicular to the optical axis of the focused electron beam; an electron beam position detector for measuring the direction and the quantity of the deflection given to the focused electron beam when it is transmitted through the specimen; and a processing system for calculating the direction and the intensity of an electric field, and the direction and the intensity of a magnetic field separately at a point on the specimen through which the focused electron beam is transmitted from the data on the direction and the quantity of the deflection of the focused electron beam measured by the electron beam position detector before and after the turnover of the specimen by the specimen tilt mechanism. Owing to the present apparatus, an electric field and a magnetic field in a specimen can be separately observed independent of each other.

    摘要翻译： 甲公开用于使用聚焦的电子束能够测量试样中的电磁场分布以高分辨率和高可靠性的电磁场分布的测量装置上制成。 本装置包括：聚焦的电子束的辐射系统，用于照射与聚焦的电子束的检体; 试样倾斜机构用于倾斜180°与倾斜轴线垂直于聚焦电子束的光轴的试样; 用于测量的方向和提供给聚焦的电子束。当它是通过样品的反式mitted偏转的量的电子束位置检测器; 和用于计算方向和电场的强度，以及方向和磁场的分别在试样上的一个点的强度，通过该聚焦的电子束是从上方向和数量的数据的反式mitted的处理系统 的前和试样倾斜机构的营业额试样之后，由电子束位置检测器测量的聚焦电子束的偏转。 由于本装置中，在电场和试样中的磁场可以分别观测的独立海誓山盟。

    Scanning tunnel microscope
    4.
    发明公开
    Scanning tunnel microscope 失效
    Rastertunnelmikroskop。

    公开(公告)号：EP0461393A1

    公开(公告)日：1991-12-18

    申请号：EP91107547.1

    申请日：1991-05-08

    申请人： HITACHI, LTD. ,  HITACHI CONSTRUCTION MACHINERY CO., LTD.

    发明人： Hazaki, Eiichi ,  Yamada, Osamu ,  Nakaizumi, Yasushi ,  Hosoki, Shigeyuki ,  Hosaka, Sumio ,  Hashimoto, Akira

    IPC分类号： G01N27/00 ,  H01J37/28

    CPC分类号： G01Q60/16 ,  G01Q30/02 ,  Y10S977/861

    摘要： A scanning tunnel microscope comprising: a SEM stage (23) provided in a specimen chamber (3) of a SEM and having a mechanism (60-64) for moving in a two dimensional manner along a surface perpendicular to an electron beam (34); a specimen stage (25) provided on the SEM stage and provided with a mechanism (26-28) for holding a specimen (33) so that a surface of the specimen makes an angle of 45° with the electron beam and for moving the specimen in a two dimensional manner along the specimen surface; an STM scanning mechanism (41-57) provided on the SEM stage and provided with a probe (41) held perpendicularly to the specimen surface, an approaching mechanism (44-54) for making the probe approach to a position at a desired distance from the specimen surface, and a probe fine movement mechanism (53-56) for making the probe scan along the specimen surface; and a display unit (D1, D2) for displaying an image by the SEM together with an image of the probe on the basis of signal obtained from a secondary electron detector (4) provided in a specimen chamber (3) and for displaying an image by the STM on the basis of signals from said prove fine movement mechanism.

    摘要翻译： 一种扫描隧道显微镜，包括：设置在SEM的样本室（3）中的具有用于沿垂直于电子束（34）的表面以二维方式移动的机构（60-64）的SEM台（23） ; 设置在SEM台上的具有用于保持试样（33）的机构（26-28）的试样台（25），使得试样的表面与电子束成45°角，并移动试样 沿着试样表面以二维方式; 设置在SEM台上的STM扫描机构（41-57），并且设置有垂直于试样表面保持的探针（41），用于使探针接近到与试样表面垂直的位置的接近机构（44-54） 试样表面和用于使探针沿试样表面扫描的探针精细运动机构（53-56）; 以及显示单元（D1，D2），用于基于从设置在样本室（3）中的二次电子检测器（4）获得的信号和用于显示图像的步骤，通过SEM与探针的图像一起显示图像 由STM根据来自所述证明机芯的信号。

    Surface microscope apparatus
    5.
    发明公开
    Surface microscope apparatus 失效
    OberflächenmikroskopeundOberflächenmikroskopie。

    公开(公告)号：EP0441311A2

    公开(公告)日：1991-08-14

    申请号：EP91101503.0

    申请日：1991-02-05

    申请人： HITACHI, LTD.

    发明人： Hasegawa, Tsuyoshi, Hitachi Daiyon Kyoshinryo B208 ,  Hosaka, Sumio ,  Hosoki, Shigeyuki ,  Honda, Yukio ,  Ichikawa, Masakazu

    IPC分类号： H01J37/252 ,  G01N27/00

    CPC分类号： G01Q10/06 ,  G01Q20/00 ,  G01Q30/16 ,  G01Q70/02 ,  Y10S977/852 ,  Y10S977/86 ,  Y10S977/861 ,  Y10S977/863 ,  Y10S977/873

    摘要： An atomic force microscope is provided for sensing displacement of a cantilever (1) based on a scanning tunneling microscopy. Concretely, the present invention comprises a first microscope having a cantilever (1) for sensing atomic force or magnetic force and an STM (Scanning Tunneling Microscope) functioned as a second microscope for sensing tunneling current and keeping the tunneling current constant. It results in the microscope being able to carry out atomic force microscopy and tunneling microscopy without changing a single STM tip (1b) and to control the minimal force between the sample (3) and the tip (1b) to be constant.

    摘要翻译： 提供了一种用于感测基于扫描隧道显微镜的悬臂（1）位移的原子力显微镜。 具体地，本发明包括具有用于感测原子力或磁力的悬臂（1）的第一显微镜和用作感测隧道电流并保持隧道电流恒定的第二显微镜的STM（扫描隧道显微镜）。 这导致显微镜能够进行原子力显微镜和隧道显微镜，而不改变单个STM尖端（1b）并且控制样品（3）和尖端（1b）之间的最小力保持恒定。

    Surface observing apparatus and method
    9.
    发明公开
    Surface observing apparatus and method 失效
    Verfahren und Vorrichtung zum Beobachten einerFläche。

    公开(公告)号：EP0551814A1

    公开(公告)日：1993-07-21

    申请号：EP93100055.8

    申请日：1993-01-05

    申请人： HITACHI, LTD.

    发明人： Hosaka, Sumio ,  Kikugawa, Atsushi ,  Honda, Yukio ,  Koyanagi, Hajime ,  Hosoki, Shigeyuki ,  Hasegawa, Tsuyoshi

    IPC分类号： G01B7/34 ,  G01N27/00

    CPC分类号： G01Q20/02 ,  G01Q60/02 ,  G01Q60/08 ,  G01Q60/26 ,  G01Q60/32 ,  G11B5/00 ,  G11B9/1409 ,  G11B11/007 ,  G11B2005/0002 ,  G11B2005/0005 ,  Y10S977/849 ,  Y10S977/851 ,  Y10S977/852 ,  Y10S977/873 ,  Y10S977/953

    摘要： A surface observing apparatus for obtaining information of a specimen comprises a probe (17) disposed in the close vicinity of the specimen (2), a deformable cantilever (1) for holding the probe (17), a scanning mechanism for scanning a surface of the specimen with the probe (17), and detectors (3, 4, 5) for detecting displacements of the cantilever (1) to thereby allow information of the specimen to be derived on the basis of the displacement of the cantilever (1). The apparatus further comprise a first detector (9) for detecting a force acting on the probe from the displacement of the cantilever, and a second detector (7) for measuring a change in the force acting on the probe on the basis of the displacement of the cantilever.

    摘要翻译： 用于获取样本信息的表面观察装置包括设置在样本（2）附近的探针（17），用于保持探针（17）的可变形悬臂（1），用于扫描探针 具有探针（17）的样本和用于检测悬臂（1）的位移的检测器（3,4,5），从而允许基于悬臂（1）的位移导出样本的信息。 所述装置还包括第一检测器（9），用于根据所述悬臂的位移检测作用在所述探头上的力;以及第二检测器（7），用于根据所述悬臂的位移来测量作用在所述探针上的力的变化 悬臂。