公开(公告)号：EP3047520A4

公开(公告)日：2017-07-12

申请号：EP14843577

申请日：2014-09-15

申请人： KLA-TENCOR CORP

发明人： WANG DAVID Y ,  FLOCK KLAUS ,  ROTTER LAWRENCE D ,  KRISHNAN SHANKAR ,  DE VEER JOHANNES D ,  FILIP CATALIN ,  BRADY GREGORY ,  ARAIN MUZAMMIL ,  SHCHEGROV ANDREI

IPC分类号： H01L21/66 ,  G01B11/00 ,  G01B11/06 ,  G01N21/21 ,  G01N21/88 ,  G01N21/95

CPC分类号： G01N21/211 ,  G01B11/0641 ,  G01N21/8806 ,  G01N21/9501 ,  H01L22/12

摘要： An apparatus includes (i) a bright light source for providing an illumination beam at multiple wavelengths selectable with a range from a deep ultraviolet wavelength to an infrared wavelength, (ii) illumination optics for directing the illumination beam towards a sample at selectable sets of angles of incidence (AOI's) or azimuth angles (AZ's) and polarization states to provide spectroscopic ellipsometry, wherein the illumination optics include an apodizer for controlling a spot size of the illumination beam on the sample at each of the selectable AOI/AZ sets, (iii) collection optics for directing an output beam from the sample in response to the illumination beam at each of the selectable AOI/AZ sets and polarization states towards a detector that generates an output signal or image based on the output beam, and (v) a controller for characterizing a feature of the sample based on the output signal or image.

摘要翻译： 一种设备包括：（i）用于提供可选范围从深紫外波长到红外波长的多个波长的照明光束的明亮光源，（ii）照明光学器件，用于将照明光束以可选择的角度集合朝向样品 （AOI）或方位角（AZ）以及偏振态来提供光谱椭圆偏振法，其中所述照明光学器件包括用于在所述可选AOI / AZ集合中的每一个处控制所述样本上的所述照明光束的光斑尺寸的变迹器，（iii ）收集光学器件，用于响应于在每个可选择的AOI / AZ集合处的照明光束和来自基于输出光束生成输出信号或图像的检测器的偏振状态的来自样本的输出光束，以及（v） 控制器，用于基于输出信号或图像来表征样本的特征。

公开(公告)号：EP2959503A4

公开(公告)日：2016-10-26

申请号：EP14753960

申请日：2014-02-21

申请人： KLA TENCOR CORP

发明人： BRADY GREGORY ,  SHCHEGROV ANDREI V ,  ROTTER LAWRENCE D ,  SHAUGHNESSY DERRICK ,  SHCEMELININ ANATOLY ,  BEZEL ILYA ,  ARAIN MUZAMMIL ,  VASILIEV ANATOLY ,  ALLEN JAMES ,  SHULEPOV OLEG ,  HILL ANDREW ,  BACHAR OHAD ,  MARKOWITZ MOSHE ,  ISH-SHALOM YARON ,  SELA ILAN ,  MANASSEN AMNON ,  SVIZHER ALEXANDER ,  KHOKHLOV MAXIM ,  ABRAMOV AVI ,  TSIBULEVSKY OLEG ,  KANDEL DANIEL ,  GHINOVKER MARK

IPC分类号： H01L21/66 ,  F21V13/00 ,  F21V13/08 ,  F21V13/12 ,  G02B6/293 ,  G02B6/35

CPC分类号： G01J3/10 ,  F21V13/00 ,  F21V13/08 ,  F21V13/12 ,  G01J3/0218 ,  G01J3/12 ,  G02B6/29332 ,  G02B6/29362 ,  G02B6/29388 ,  G02B6/29395 ,  G02B6/3508 ,  G02B6/353 ,  H01J65/04

摘要： The disclosure is directed to systems for providing illumination to a measurement head for optical metrology. In some embodiments of the disclosure, illumination beams from a plurality of illumination sources are combined to deliver illumination at one or more selected wavelengths to the measurement head. In some embodiments of the disclosure, intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. In some embodiments of the disclosure, illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.

摘要翻译： 用于向用于光学测量的测量头提供照明的系统被配置为组合来自多个照明源的照明光束以将一个或多个所选波长的照明传送到测量头。 控制传递到测量头的照明的强度和/或空间相干性。 在一个或多个所选波长的照明从配置成在连续波长范围内提供照明的宽带照明源传送。