摘要:
A light-source device (1) of the present invention includes: a long-wavelength light source (23) that emits a long-wavelength light beam (Lr) that has a peak wavelength in a red wavelength region; a single broadband light source (22) that emits a broadband light beam (Lg) that includes a green wavelength region from 500 nm to 580 nm, that has a peak wavelength in a region that is equal to or less than 580 nm, and that has, on a long-wavelength side, a wavelength region that overlaps with a wavelength region of the long-wavelength light beam (Lr) on a short-wavelength side; and a multiplexing portion (32) that multiplexes a wavelength region of the long-wavelength light beam (Lr) that is greater than a predetermined wavelength and a wavelength region of the broadband light beam (Lg) that is equal to or less than the predetermined wavelength, wherein the predetermined wavelength is a wavelength between the peak wavelength of the long-wavelength light beam (Lr) and the peak wavelength of the broadband light beam (Lg), and is a wavelength at which an intensity of the long-wavelength light beam (Lr) is equal to or greater than 10 % of the peak intensity thereof, and at which an intensity of the broadband light beam (Lg) is equal to or greater than 10 % of the peak intensity thereof.
摘要:
The disclosure is directed to systems for providing illumination to a measurement head for optical metrology. In some embodiments of the disclosure, illumination beams from a plurality of illumination sources are combined to deliver illumination at one or more selected wavelengths to the measurement head. In some embodiments of the disclosure, intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. In some embodiments of the disclosure, illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.
摘要:
The disclosure is directed to systems for providing illumination to a measurement head for optical metrology. In some embodiments of the disclosure, illumination beams from a plurality of illumination sources are combined to deliver illumination at one or more selected wavelengths to the measurement head. In some embodiments of the disclosure, intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. In some embodiments of the disclosure, illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.
摘要:
A light-source device (1) of the present invention includes: a long-wavelength light source (23) that emits a long-wavelength light beam (Lr) that has a peak wavelength in a red wavelength region; a single broadband light source (22) that emits a broadband light beam (Lg) that includes a green wavelength region from 500 nm to 580 nm, that has a peak wavelength in a region that is equal to or less than 580 nm, and that has, on a long-wavelength side, a wavelength region that overlaps with a wavelength region of the long-wavelength light beam (Lr) on a short-wavelength side; and a multiplexing portion (32) that multiplexes a wavelength region of the long-wavelength light beam (Lr) that is greater than a predetermined wavelength and a wavelength region of the broadband light beam (Lg) that is equal to or less than the predetermined wavelength, wherein the predetermined wavelength is a wavelength between the peak wavelength of the long-wavelength light beam (Lr) and the peak wavelength of the broadband light beam (Lg), and is a wavelength at which an intensity of the long-wavelength light beam (Lr) is equal to or greater than 10 % of the peak intensity thereof, and at which an intensity of the broadband light beam (Lg) is equal to or greater than 10 % of the peak intensity thereof.
摘要:
An analytical instrument may have multiple distinct channels. Such may include one or more illumination sources and sensors. Illumination may be delivered to specific locations of a specimen holder, and returned illumination may be delivered to specific locations of a sensor array. Illumination may first pass a specimen, and a mirror or reflector may then return the illumination past the specimen. Optical splitters may be employed to couple pairs of fiber optics proximate a specimen holder. Such channels may further include a plurality of illumination sources positioned on one side of a specimen holder and a plurality of sensors on the other side. The plurality of sensor may capture image of a specimen and a spectrophotometer may concurrently scan the specimen. A plurality of specimens may be imaged and scanned in a single pass of a plurality of passes. Spherical or ball lenses may be placed in an optical path of the illumination to achieve a desired illumination pattern.
摘要:
The disclosure is directed to systems for providing illumination to a measurement head for optical metrology. In some embodiments of the disclosure, illumination beams from a plurality of illumination sources are combined to deliver illumination at one or more selected wavelengths to the measurement head. In some embodiments of the disclosure, intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. In some embodiments of the disclosure, illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.
摘要:
A multiplexing device for an image display includes: a light source part which has light source modules which irradiate laser beams having different wavelengths; a multiplexing part which multiplexes laser beams irradiated from the respective light source modules; optical fiber parts, each optical fiber part including a light-source-side optical fiber which has one end portion thereof connected to the light source module and a multiplexing-side optical fiber which has one end portion thereof connected to the multiplexing part; and a plurality of connecting parts, each connecting part connecting the light-source-side optical fiber and the multiplexing-side optical fiber with each other. The connecting part can change a distance between the other end portion of the light-source-side optical fiber and the other end portion of the multiplexing-side optical fiber which face with each other.
摘要:
A multiplexing device for an image display includes: a light source part which has light source modules which irradiate laser beams having different wavelengths; a multiplexing part which multiplexes laser beams irradiated from the respective light source modules; optical fiber parts, each optical fiber part including a light-source-side optical fiber which has one end portion thereof connected to the light source module and a multiplexing-side optical fiber which has one end portion thereof connected to the multiplexing part; and a plurality of connecting parts, each connecting part connecting the light-source-side optical fiber and the multiplexing-side optical fiber with each other. The connecting part can change a distance between the other end portion of the light-source-side optical fiber and the other end portion of the multiplexing-side optical fiber which face with each other.