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    SAMPLE SUPPORTING MEMBER FOR OBSERVING SCANNING ELECTRON MICROSCOPIC IMAGE AND METHOD FOR OBSERVING SCANNING ELECTRON MICROSCOPIC IMAGE
    2.
    发明公开
    SAMPLE SUPPORTING MEMBER FOR OBSERVING SCANNING ELECTRON MICROSCOPIC IMAGE AND METHOD FOR OBSERVING SCANNING ELECTRON MICROSCOPIC IMAGE 审中-公开
    样品载体ELEMENT FOR的扫描电子显微镜图像用于监控扫描电子显微镜图像观察AND METHOD

    公开(公告)号：EP2800123A1

    公开(公告)日：2014-11-05

    申请号：EP12863530.7

    申请日：2012-12-26

    申请人： National Institute of Advanced Industrial Science and Technology

    发明人： OGURA, Toshihiko

    IPC分类号： H01J37/20 ,  H01J37/09 ,  H01J37/18 ,  H01J37/28

    CPC分类号： H01J37/20 ,  G21K5/08 ,  H01J37/28 ,  H01J2237/2003 ,  H01J2237/2004 ,  H01J2237/2813

    摘要： When injection of electrons into a sample supporting member causes a potential gradient between an insulative thin film (11) and a conductive thin film (12) at a site of electron beam injection, the potential barrier of the surface of the insulative thin film (11) becomes thin, and an electron emission phenomenon is caused by tunnel effects. Secondary electrons caused in the insulative thin film (11) tunnel to the conductive thin film (12) along the potential gradient. The secondary electrons, having tunneled, reach a sample (30) while diffusing in the conductive thin film (12). In the case where the sample (30) is a sample with a high electron transmittance, such as a biological sample, the secondary electrons also tunnel through the interior of the sample (30). The secondary electrons (42) are detected to acquire an SEM image in which the inner structure of the sample (30) is reflected.

    摘要翻译： 当电子注入到样品支撑构件使（在绝缘薄膜（11）和一个导电薄膜（12）在电子束注入，绝缘薄膜的表面的势垒的位点之间的电势梯度11 ）变薄，并且电子发射现象是由隧道效应造成的。 在绝缘薄膜（11）隧穿到导电薄膜（12）沿着电势梯度引起的二次电子。 二次电子，具有隧道，到达而在导电薄膜（12）扩散的样品（30）。 在样品（30）是具有高电子透射率，颜色的样品的情况下：如生物样品，二次电子从而通过样品（30）的内​​部通道。 二次电子（42）被检测以获取在其中样品（30）的内​​部结构被反射SEM图像。

    SAMPLE HOLDER AND METHOD FOR OBSERVING ELECTRON MICROSCOPIC IMAGE
    3.
    发明公开
    SAMPLE HOLDER AND METHOD FOR OBSERVING ELECTRON MICROSCOPIC IMAGE 审中-公开
    维生素BURBONHALTER ZUR BEOBACHTUNG EINES ELEKTRONENKKOSOSPOPENCHEN BILDES

    公开(公告)号：EP2876665A1

    公开(公告)日：2015-05-27

    申请号：EP13823532.0

    申请日：2013-06-12

    申请人： National Institute of Advanced Industrial Science and Technology ,  Lifesem Inc.

    发明人： OGURA, Toshihiko

    IPC分类号： H01J37/20

    CPC分类号： H01J37/261 ,  G01N23/225 ,  H01J37/20 ,  H01J2237/004 ,  H01J2237/2003

    摘要： In an upper main body (21) of a sample holder (20), a laminate of an insulative thin film (11) and a secondary electron emission protective thin film (12) is provided. An electron beam (41) emitted from an electron gun (40) enters the secondary electron emission protective thin film side. The undersurface of the insulative thin film (11) is a sample adhesion surface, where a sample (30) to be an observation target is held by adsorption or the like. The secondary electron emission protective thin film (12) is made of a material having a low secondary electron emission coefficient δ and, preferably, is non-insulative. That is, the secondary electron emission protective thin film (12) is conductive even though the electric resistance is high. Accordingly, the charge level of a site irradiated with the electron beam has a low charge level.

    摘要翻译： 在样品保持器（20）的上主体（21）中，设置绝缘薄膜（11）和二次电子发射保护薄膜（12）的叠层体。 从电子枪（40）发射的电子束（41）进入二次电子发射保护薄膜侧。 绝缘性薄膜（11）的下表面是通过吸附等保持作为观察对象物的样品（30）的样品粘合面。 二次电子发射保护薄膜（12）由二次电子发射系数低的材料制成，优选为非绝缘性。 也就是说，即使电阻高，二次电子发射保护薄膜（12）也是导电的。 因此，用电子束照射的部位的电荷水平具有低电荷水平。

    SAMPLE-CONTAINING CELL FOR X-RAY MICROSCOPE AND METHOD FOR OBSERVING X-RAY MICROSCOPIC IMAGE
    4.
    发明公开
    SAMPLE-CONTAINING CELL FOR X-RAY MICROSCOPE AND METHOD FOR OBSERVING X-RAY MICROSCOPIC IMAGE 有权
    样品含有细胞X射线显微镜和监测方法的X射线图像微观

    公开(公告)号：EP2755209A1

    公开(公告)日：2014-07-16

    申请号：EP12830348.4

    申请日：2012-08-31

    申请人： National Institute of Advanced Industrial Science and Technology

    发明人： OGURA, Toshihiko ,  TAKAHASHI, Toru

    IPC分类号： G21K7/00 ,  G21K5/08

    CPC分类号： G21K5/08 ,  G01N23/04 ,  G01N2223/309 ,  G01N2223/612 ,  G21K7/00

    摘要： Observation samples 16 in a sample solution 15 are held due to absorption or the like on the rear face of a first X-ray transmission film 14a. In a mirror body, while an X-ray emission film 13 and X-ray transmission films 14a and 14b are bent to be convex outward due to the pressure difference, an X-ray transmission film 14c is bent to be convex toward the X-ray transmission film 14a side due to gas expansion in a second cavity part 11b. This bending results in widening of a gap between the first and second X-ray transmission films 14a and 14b in the center part of these more compared with a gap between the end parts of these. However, despite the fact that lengthening of the X-ray optical path length over the primary visual field region of X-ray microscope observation arises between the X-ray transmission films 14b and 14c, there is almost no change between the X-ray transmission films 14a and 14c. Accordingly, even when the X-ray emission film and the X-ray transmission films are bent inside the mirror body, lengthening of the X-ray optical path length takes place in the second cavity part 11 b (gas portion) in which X-ray absorption does not take place, this enabling absorption of the X-rays by the sample solution 15 to be suppressed.

    摘要翻译： 样品溶液中的15个观测样品16被保持由于吸收或在第一X射线透射膜14a的背面等。 在一个反射镜体，同时，在X射线发射膜13和X射线透射膜14A和14B被弯曲以向外凸出是由于压力差，在X射线透射膜14C被弯曲以朝向X轴凸 在第二空腔部11b由于气体膨胀射线透射膜14a侧。 在本文中的中心部分的第一和第二X射线透射膜14A和14B之间的间隙加宽该弯曲结果与本文的端部之间的间隙更相比。 然而，尽管X射线的光路长度上的X射线显微镜观察主视野区域的factthat延长的X射线透射膜14b和14c之间产生，有X射线透射之间几乎没有变化 膜14a和14c。 因此，即使当X射线发射膜和X射线透射膜镜体内侧弯曲，在X射线的光路长度的延长发生在第二空腔部11b（气体部分），其中x 射线吸收不会发生，要被抑制由样品溶液15中的X射线的这个有利的吸收。