THREE-DIMENSIONAL IMAGE CONSTRUCTION METHOD, IMAGE PROCESSING DEVICE, AND ELECTRON MICROSCOPE

    公开(公告)号:EP3185000A4

    公开(公告)日:2018-02-14

    申请号:EP15833770

    申请日:2015-08-21

    摘要: A three-dimensional image reconstruction method capable of analyzing a three-dimensional structure of membrane proteins present within a lipid membrane is offered. A three-dimensional image reconstruction method associated with the present invention comprises the steps of: obtaining a first transmission electron microscope image of a sample containing the membrane proteins present within a lipid membrane, the image having been taken by illuminating an electron beam on the sample from a direction tilted relative to a line normal to the membrane surface of the lipid membrane (step S10); obtaining a second transmission electron microscope image of the sample taken by illuminating the electron beam on the sample perpendicularly to the membrane surface of the lipid membrane (step S12); identifying orientations of the membrane proteins of the first transmission electron microscope image on a basis of the second transmission electron microscope image (step S14); and analyzing a three-dimensional structure of the membrane proteins from the first transmission electron microscope image on a basis of information about the identified orientations of the membrane proteins (step S18).

    CRYOGENIC SPECIMEN PROCESSING IN A CHARGED PARTICLE MICROSCOPE
    5.
    发明公开
    CRYOGENIC SPECIMEN PROCESSING IN A CHARGED PARTICLE MICROSCOPE 审中-公开
    带电粒子显微镜中的低温样品处理

    公开(公告)号:EP3196919A1

    公开(公告)日:2017-07-26

    申请号:EP16194724.7

    申请日:2016-10-20

    申请人: FEI Company

    IPC分类号: H01J37/18

    摘要: A method of performing surface modification of a cryogenic specimen using a charged particle microscope comprising:
    - A vacuum chamber, with a port for loading the specimen into the vacuum chamber;
    - A specimen holder, for holding a specimen in an irradiation position;
    - A particle-optical column, for producing a charged-particle beam and directing it so as to irradiate the specimen,
    which method comprises the steps of:
    - Introducing the specimen into the vacuum chamber, providing it on the specimen holder and maintaining it at a cryogenic temperature;
    - Employing at least one vacuum pump to evacuate the vacuum chamber;
    - Activating said beam and directing it onto a portion of the specimen so as to modify a surface thereof,
    additionally comprising the following steps:
    - Providing a thin film monitor in the vacuum chamber and maintaining at least a detection surface thereof at a cryogenic temperature;
    - Using said monitor to measure a precipitation rate value of frozen condensate in the chamber, and using this value as a trigger to perform at least one of the following actions:
    - Initiating said surface modification, when said value falls below a first pre-defined threshold;
    - Interrupting said surface modification, if said value rises above a second pre-defined threshold.

    摘要翻译: 一种使用带电粒子显微镜对低温试样进行表面改性的方法,包括: - 真空室,其具有用于将试样装载到真空室中的端口; - 用于将样本保持在照射位置的样本保持器; - 粒子光学柱,用于产生带电粒子束并引导它照射样品,该方法包括以下步骤: - 将样品引入真空室中,将样品提供到样品架上并将其保持在 低温; - 使用至少一个真空泵来抽空真空室; - 激活所述束并将其引导到样本的一部分上以便修改其表面,另外包括以下步骤: - 在真空室中提供薄膜监视器并将其至少一个检测表面维持在低温; - 使用所述监测器来测量室中冻结冷凝物的沉淀速率值,并且使用该值作为触发以执行以下动作中的至少一个: - 当所述值低于第一预定义时,发起所述表面修改 阈; - 如果所述值上升到第二预定义阈值以上,则中断所述表面修改。

    SYSTEM AND PROCESS FOR MEASURING STRAIN IN MATERIALS AT HIGH SPATIAL RESOLUTION
    9.
    发明公开
    SYSTEM AND PROCESS FOR MEASURING STRAIN IN MATERIALS AT HIGH SPATIAL RESOLUTION 有权
    系统在VERFAHREN ZUM MESSEN EINER MATERIALDEHNUNG BEI HOHERRÄUMLICHERAUFLÖSUNG

    公开(公告)号:EP2823290A4

    公开(公告)日:2015-11-18

    申请号:EP13757134

    申请日:2013-03-08

    申请人: APPFIVE LLC

    IPC分类号: G01N23/225 G01L1/00 H01J37/26

    摘要: A process for measuring strain is provided that includes placing a sample of a material into a TEM as a sample. The TEM is energized to create a small electron beam with an incident angle to the sample. Electrical signals are generated that control multiple beam deflection coils and image deflection coils of the TEM. The beam deflection control signals cause the angle of the incident beam to change in a cyclic time-dependent manner. A first diffraction pattern from the sample material that shows dynamical diffraction effects is observed and then one or more of the beam deflection coil control signals are adjusted to reduce the dynamical diffraction effects. One or more of the image deflection coil control signals are then adjusted to remove any motion of the diffraction pattern. A diffraction pattern is then collected from a strained area of the material after the adjusting step, and the strain is then determined from a numerical analysis of the strained diffraction pattern compared to a reference diffraction pattern from an unstained area of the material.

    摘要翻译: 提供了一种用于测量应变的方法,其包括将材料样品放置在TEM中作为样品。 TEM被激励以产生具有与样品的入射角的小电子束。 产生控制TEM的多个光束偏转线圈和图像偏转线圈的电信号。 光束偏转控制信号使入射光束的角度以循环时间依赖的方式变化。 观察到来自示出动态衍射效应的样品材料的第一衍射图案,然后调整一个或多个光束偏转线圈控制信号以减少动态衍射效应。 然后调整一个或多个图像偏转线圈控制信号以去除衍射图案的任何运动。 然后在调整步骤之后从材料的应变区域收集衍射图案,然后根据与材料的未染色区域的参考衍射图案的应变衍射图案的数值分析来确定应变。

    HOLDER DEVICE FOR ELECTRON MICROSCOPE
    10.
    发明公开
    HOLDER DEVICE FOR ELECTRON MICROSCOPE 审中-公开
    HALTERVORRICHTUNGFÜRELEKTRONENMIKROSKOP

    公开(公告)号:EP2908328A1

    公开(公告)日:2015-08-19

    申请号:EP13843302.4

    申请日:2013-08-08

    IPC分类号: H01J37/20

    摘要: The present invention relates to a holder device for an electron microscope, and provides a holder device for an electron microscope, which most efficiently collects light emitted when electrons collide with a sample inside the electron microscope and is selectively usable in various electron microscopes since it can be easily attached to and detached from the electron microscopes. To this end, the holder device for an electron microscope includes a frame; a sample support block configured to be supported on the frame and comprise a sample mounting portion to support an edge of a sample; a mirror unit configured to comprise an upper mirror and a lower mirror which are respectively arranged above and below the sample and reflect light radiating from the sample, which is mounted to the sample mounting portion and to which an electron beam is emitted, in a predetermined direction; a condensing lens configured to condense light from the mirror unit on a predetermined target; and an optical fiber configured to collect light from the condensing lens.

    摘要翻译: 本发明涉及一种用于电子显微镜的保持装置,并且提供一种用于电子显微镜的保持装置,其最有效地收集当电子与电子显微镜内部的样品碰撞时发射的光,并且可选择性地可用于各种电子显微镜,因为它可以 容易地附着在电子显微镜上并与电子显微镜分离。 为此,电子显微镜的保持装置包括框架; 样品支撑块,被配置为支撑在所述框架上并且包括样品安装部分以支撑样品的边缘; 反射镜单元,被配置为包括上反射镜和下反射镜,其分别布置在样品的上方和下方,并将从样品辐射的光反射到安装到样品安装部分并且将电子束发射到其上的预定 方向; 聚光透镜,被配置为将来自所述反射镜单元的光在预定目标上进行冷凝; 以及配置成收集来自聚光透镜的光的光纤。