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公开(公告)号：EP4302323A1
公开(公告)日：2024-01-10
申请号：EP22709835.7
申请日：2022-03-01
发明人： HENDRIKS, Rob Jacob
IPC分类号： H01L21/683 , H01L25/075 , H01L33/00
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公开(公告)号：EP3902380A1
公开(公告)日：2021-10-27
申请号：EP20171361.7
申请日：2020-04-24
发明人： HENDRIKS, Rob Jacob
摘要： It is proposed to provide a transfer method of a high viscosity functional material (50), such as a conductive paste (50), onto a receiving substrate (20), the method comprising the steps of: providing a plate (10) having a cavity surface that includes at least one cavity (12);
providing said cavity with a resistive heating device (13) and control circuitry (14) connected to said heating device (13); providing a functional material (50) in the at least one cavity (12), having a material composition that, when heated by the heating device, generates a gas at an interface between said cavity surface in the cavity (12) and said functional material (50), to transfer said functional material (50) from said at least one cavity (12) by said gas generation onto the receiving substrate (20).-
公开(公告)号：EP2923380A1
公开(公告)日：2015-09-30
申请号：EP13801908.8
申请日：2013-11-22
发明人： VAN LAMMEREN, Tim Johannes , HENDRIKS, Rob Jacob , RUBINGH, Eric , WOUTERS, Jurgen Cornelis Hubertus , COENEN, Erica Wilhelmina Catharina , ABBEL, Robert J.
CPC分类号： H01L51/5253 , H01L27/3276 , H01L27/3288 , H01L51/0022 , H01L51/56 , H05K3/28 , H05K2201/0769 , H05K2203/102
摘要： A method is disclosed of manufacturing a layered product. The method comprises the subsequent steps of • - providing (SI) a carrier (SB) with a first layer (L1) of a first material that is arranged according to a pattern (L11, L12, L13), • - covering (S2) the carrier (SB) provided with the patterned first layer (LI) with a second layer (L2) of a second material, • - applying (S3) electro-magnetic radiation that is selectively absorbed in the first material (LI), said absorption resulting in a heat development in the first material (LI), which heat causes a curing of second material adjacent the first material (L21, L22, L23) • - removing (S4) non-cured second material.
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公开(公告)号：EP4383321A1
公开(公告)日：2024-06-12
申请号：EP22211797.0
申请日：2022-12-06
IPC分类号： H01L21/683 , H05K3/04
CPC分类号： H05K3/046 , H01L21/6836 , H01L2221/6838120130101 , H01L24/75 , H01L24/95
摘要： A deposition device (1) is provided for depositing components (CMP) on a substrate (STR). The deposition device (1) comprises a substrate holder (2), a component carrier (3), a power supply (4) and a support module (5) for supporting the component carrier (3). The substrate holder (2) has a substrate support surface (2s) for holding the substrate (STR). The component carrier (3), which is supported by the support module has a component carrier surface (3s) facing the substrate support surface (2s) for carrying the components to be deposited on the substrate. The component carrier (3) comprises a resistive heater layer (31) for thermally inducing a deformation of the component carrier (3) to move the component carrier surface (3s) towards the substrate support surface (2s). The power supply (4) is configured to generate a deflection pulse (Pd), being an electric power pulse to the resistive heater layer (31) for said thermally inducing a deformation. Also a corresponding deposition method is provided.
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5.发明公开
公开(公告)号：EP4358121A1
公开(公告)日：2024-04-24
申请号：EP22202269.1
申请日：2022-10-18
IPC分类号： H01L21/67 , H01L21/683
CPC分类号： H01L21/6835 , H01L21/67132 , H01L21/67103 , H01L2221/6838120130101 , H01L2221/6835420130101 , H01L2221/6836320130101 , H01L2221/6832220130101
摘要： A deposition device (1) is disclosed herein for depositing components (Ca, Cb,..) on a target surface (TS) of a target (T), the deposition device comprises a donor plate (3), at least one heater element (33), a power supply (6), a target manipulation device and a controller (5) configured for controlling the power supply (6) and the target manipulation device (2;21, 22). The controller causes the power supply (6) to supply at least a first pulse (Pulse 1) of electric power to the at least one heater element (33) in a zone (32) to heat the donor plate surface (31s) in at least a first subzone (32a) of that zone to a surface temperature exceeding a threshold temperature of an adhesive specimen (7a) in said first subzone (32a). Subsequent to a change of a lateral position of the target (T) relative to the donor plate (3), the controller causes the power supply (6) to supply at least a second pulse (Pulse 2) of electric power to the heater element to heat the donor plate surface (31s) in at least a second subzone (32b) to a surface temperature exceeding a threshold temperature of the adhesive specimen (7b) in said second subzone (32b). Therewith components within a zone sharing a same heater element can be transferred independently from each other.
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公开(公告)号：EP4335641A1
公开(公告)日：2024-03-13
申请号：EP22194620.5
申请日：2022-09-08
发明人： HENDRIKS, Rob Jacob
摘要： A printing device (1) is provided for printing a substance on a target surface (TS) of a target (T). The printing device comprises a carrier (2) having at a first main side (21) a hydrophobic coating (22) for carrying a specimen (SB1, SB2, SB3) of the substance to be printed, said specimen resting with a contact surface on the coating. The printing device further comprises a heater facility (23) to locally heat the specimen at its contact surface to vaporize a portion of the specimen at the side of its contact surface and inducing a vapor pressure that causes a transfer of a remainder of said specimen towards the target surface. Additionally a printing method is provided.
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公开(公告)号：EP3889319A8
公开(公告)日：2021-11-17
申请号：EP20167549.3
申请日：2020-04-01
发明人： HENDRIKS, Rob Jacob
摘要： A plate (1) is provided herein, comprising functional material (2) to be deposited onto a target surface (51) using monochromatic photon radiation (R3) having a wavelength (λ R3 ). The plate comprises a substrate (10) with a first surface (11) to be directed towards the target surface and with a second surface (12) to receive the monochromatic photon radiation. The first surface (11) is patterned with one or more recessed areas (111) that have a dielectric coating (4) and that are filled with the functional material. The dielectric coating (4) comprises a sequence of dielectric coating layers (41, 42, 43) alternating in refractive index. The dielectric coating (4) therewith has a relatively high reflectivity for said monochromatic radiation (R3) incident perpendicular to the dielectric coating (4) in comparison to a reflectivity for said monochromatic radiation (R3) incident at an angle of 45 degrees to the dielectric coating (4). Therewith shear forces are mitigated without requiring a high alignment accuracy.
The present application further provides a deposition device comprising the plate and a method involving the plate.-
9.发明公开
公开(公告)号：EP3893611A1
公开(公告)日：2021-10-13
申请号：EP20168510.4
申请日：2020-04-07
发明人： HENDRIKS, Rob Jacob
摘要： A method of depositing a donor material (2) onto a target surface (51) is provided herein, in which a first main side (11) of a substrate (10) is covered with a stretchable layer (4) that is attaching thereto with a sealing (43) around an enclosed area (13) at the first main side, therewith defining an enclosure (6). The stretchable layer (4) has an outer surface (41) that faces away from the substrate, and that is patterned with one or more recessed areas (42a,...,42e) filled with the donor material (2) to be deposited. A relatively high pressure is provided in an interior (61) of the enclosure (6) so that its volume (V 61 ) is increased and the patterned surface (41) of the stretchable layer (4) is pressed against the target surface (51). In that state of the stretchable layer (4) the substrate is irradiated at a second main side (12) opposite its first main side (11) with photon radiation that has an intensity and a duration that causes a transfer of donor material (2) from the one or more recessed areas (42a,...,42e) to the target surface (51). Also a plate (1) and a deposition device (100) are provided.
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公开(公告)号：EP4108628A1
公开(公告)日：2022-12-28
申请号：EP21180945.4
申请日：2021-06-22
IPC分类号： B81C1/00
摘要： A method of manufacturing a layered 3D product comprises providing (S2) a radiation transparent film (5) that carries a resin layer (6) which in at least a first lateral region (51) of a first sublayer (61) at a side of the film is at least substantially cured and which is at least substantially uncured in a second sublayer (62) thereof that has a free surface (622) at a side of the resin layer facing away from the radiation transparent film. The film is laminated (S3) with a target, wherein the resin layer faces the target. The resin layer is fully cured (S4) in at least a third lateral region (53). Subsequently, the film is delaminated (S5) from the target. Therewith the fully cured material of the resin layer present in the at least a third lateral region remains on the target and the film and the remainder of resin material thereon are removed from the target.
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