摘要:
A thin film magnetic sensor (20) comprises a pair of first thin film yoke (24b) and second thin film yoke (24c) each formed of a soft magnetic material, the first and second thin film yokes being positioned to face each other with a gap (24a) interposed therebetween; a GMR film (26) having an electrical resistivity higher than that of the soft magnetic material and formed in the gap so as to be electrically connected to the first thin film yoke and the second thin film yoke; and an insulating substrate (22) made of an insulating nonmagnetic material and serving to support the first thin film yoke, the second thin film yoke and the GMR film. The GMR film is formed on a facing surface of the first thin film yoke positioned to face the second thin film yoke, and the length of the gap is defined by the thickness of the GMR film positioned on the facing surface of the first thin film yoke.
摘要:
A thin film magnetic sensor (20) comprises a pair of thin film yokes (24b,24c) each formed of a soft magnetic material, the thin film yokes being arranged to face each other with a gap (24a) interposed therebetween; a GMR film (26) electrically connected to the pair of the thin film yokes and having an electrical resistivity higher than that of the soft magnetic material; and an insulating substrate (22) supporting the thin film yokes and the GMR film and formed of an insulating nonmagnetic material. A gap column of a multilayer structure including a layer formed of an insulating nonmagnetic material and a layer of the GMR film is arranged within the gap, and the thickness of the GMR film is uniform over the gap length.
摘要:
A thin film magnetic sensor (20) comprises a pair of thin film yokes (24b,24c) each formed of a soft magnetic material, the thin film yokes being arranged to face each other with a gap (24a) interposed therebetween; a GMR film (26) electrically connected to the pair of the thin film yokes and having an electrical resistivity higher than that of the soft magnetic material; and an insulating substrate (22) supporting the thin film yokes and the GMR film and formed of an insulating nonmagnetic material. A gap column of a multilayer structure including a layer formed of an insulating nonmagnetic material and a layer of the GMR film is arranged within the gap, and the thickness of the GMR film is uniform over the gap length.