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公开(公告)号：EP1482319A2
公开(公告)日：2004-12-01
申请号：EP04012425.7
申请日：2004-05-26
申请人： The Foundation: The Research Institute for Electric and Magnetic Materials , Daido Steel Co., Ltd.
IPC分类号： G01R33/09
CPC分类号： B82Y25/00 , G01R33/093 , G11B5/3183 , G11B5/3903 , G11B5/3922 , Y10T29/49002
摘要： A thin film magnetic sensor (20) comprises a pair of first thin film yoke (24b) and second thin film yoke (24c) each formed of a soft magnetic material, the first and second thin film yokes being positioned to face each other with a gap (24a) interposed therebetween; a GMR film (26) having an electrical resistivity higher than that of the soft magnetic material and formed in the gap so as to be electrically connected to the first thin film yoke and the second thin film yoke; and an insulating substrate (22) made of an insulating nonmagnetic material and serving to support the first thin film yoke, the second thin film yoke and the GMR film. The GMR film is formed on a facing surface of the first thin film yoke positioned to face the second thin film yoke, and the length of the gap is defined by the thickness of the GMR film positioned on the facing surface of the first thin film yoke.
摘要翻译： 一种薄膜磁传感器（20）包括一对第一薄膜磁轭（24b）和第二薄膜磁轭（24c），每个第一薄膜磁轭（24b）和第二薄膜磁轭（24c）均由软磁材料形成，第一和第二薄膜磁轭定位成彼此面对 夹在它们之间的间隙（24a） GMR膜（26），其具有比软磁性材料的电阻率高的电阻率，并形成在间隙中以便电连接到第一薄膜轭和第二薄膜轭; 以及由绝缘非磁性材料制成并用于支撑第一薄膜轭，第二薄膜轭和GMR膜的绝缘基板（22）。 GMR膜形成在第一薄膜轭的面对第二薄膜轭的表面上，并且间隙的长度由位于第一薄膜轭的相对表面上的GMR膜的厚度限定 。
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公开(公告)号：EP1484617A3
公开(公告)日：2010-03-03
申请号：EP04012563.5
申请日：2004-05-27
申请人： The Foundation: The Research Institute for Electric and Magnetic Materials , Daido Steel Co., Ltd.
IPC分类号： G01R33/09
CPC分类号： G01R33/09 , G11B5/3163 , G11B5/3183 , G11B5/3925 , Y10T29/49002
摘要： A thin film magnetic sensor (20) comprises a pair of thin film yokes (24b,24c) each formed of a soft magnetic material, the thin film yokes being arranged to face each other with a gap (24a) interposed therebetween; a GMR film (26) electrically connected to the pair of the thin film yokes and having an electrical resistivity higher than that of the soft magnetic material; and an insulating substrate (22) supporting the thin film yokes and the GMR film and formed of an insulating nonmagnetic material. A gap column of a multilayer structure including a layer formed of an insulating nonmagnetic material and a layer of the GMR film is arranged within the gap, and the thickness of the GMR film is uniform over the gap length.
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公开(公告)号：EP1484617B1
公开(公告)日：2011-10-05
申请号：EP04012563.5
申请日：2004-05-27
IPC分类号： G01R33/09
CPC分类号： G01R33/09 , G11B5/3163 , G11B5/3183 , G11B5/3925 , Y10T29/49002
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4.发明公开Thin film magnetic sensor and method of manufacturing the same 有权DünnschichtmagnetischerFühlerund dessen Herstellungsverfahren
公开(公告)号：EP1484617A2
公开(公告)日：2004-12-08
申请号：EP04012563.5
申请日：2004-05-27
申请人： The Foundation: The Research Institute for Electric and Magnetic Materials , Daido Steel Co., Ltd.
IPC分类号： G01R33/09
CPC分类号： G01R33/09 , G11B5/3163 , G11B5/3183 , G11B5/3925 , Y10T29/49002
摘要： A thin film magnetic sensor (20) comprises a pair of thin film yokes (24b,24c) each formed of a soft magnetic material, the thin film yokes being arranged to face each other with a gap (24a) interposed therebetween; a GMR film (26) electrically connected to the pair of the thin film yokes and having an electrical resistivity higher than that of the soft magnetic material; and an insulating substrate (22) supporting the thin film yokes and the GMR film and formed of an insulating nonmagnetic material. A gap column of a multilayer structure including a layer formed of an insulating nonmagnetic material and a layer of the GMR film is arranged within the gap, and the thickness of the GMR film is uniform over the gap length.
摘要翻译： 薄膜磁传感器（20）包括由软磁性材料形成的一对薄膜磁轭（24b，24c），所述薄膜磁轭被布置成彼此间隔开间隔（24a）; 与所述一对所述薄膜磁轭电连接并具有高于所述软磁材料的电阻率的电阻率的GMR膜（26） 以及支撑薄膜磁轭和GMR膜并由绝缘非磁性材料形成的绝缘基板（22）。 包括由绝缘非磁性材料形成的层和GMR膜层的多层结构的间隙列布置在间隙内，并且GMR膜的厚度在间隙长度上是均匀的。
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