公开(公告)号：EP3255489A1

公开(公告)日：2017-12-13

申请号：EP17174643.1

申请日：2017-06-06

申请人： Lumentum Operations LLC

发明人： MOREHEAD, James J. ,  EYRES, Loren A. ,  JOHNSON, Bertram C. ,  MUENDEL, Martin H. ,  TUCKER, Derek A.

IPC分类号： G02F1/35

CPC分类号： G02F1/353 ,  G02F2001/3507 ,  G02F2001/354 ,  G02F2001/3542

摘要： A cascaded harmonic generator, for cascaded optical harmonic generation from an optical beam provided by a laser source, may include a second harmonic generator to generate a second harmonic optical beam based on a residual beam associated with the optical beam. The cascaded harmonic generator may include a third harmonic generator to generate a third harmonic optical beam based on the second harmonic optical beam and the optical beam. The third harmonic generator may be positioned in an optical path upstream from the second harmonic generator. A harmonic generator delay time, associated with the optical path, may be approximately equal to, or may be an approximate integer multiple of, a laser source round-trip time.

摘要翻译： 级联谐波发生器，用于从由激光源提供的光束级联光谐波，可以包括第二谐波发生器，以基于与光束相关的残余光束产生第二谐波光束。 级联谐波发生器可以包括第三谐波发生器，以基于第二谐波光束和光束生成第三谐波光束。 第三谐波发生器可以位于第二谐波发生器上游的光路中。 与光路相关联的谐波发生器延迟时间可以近似等于或可以是激光源往返时间的近似整数倍。

公开(公告)号：EP3008779A4

公开(公告)日：2017-01-18

申请号：EP14811528

申请日：2014-06-11

申请人： KLA-TENCOR CORP

发明人： CHUANG YUNG-HO ,  LU XIAOXU ,  FIELDEN JOHN

IPC分类号： G02F1/35 ,  G02F1/355 ,  H01S3/109

CPC分类号： H01S3/109 ,  G02F1/353 ,  G02F1/3534 ,  G02F1/3558 ,  G02F2001/3507 ,  G02F2001/354 ,  G02F2201/17 ,  G02F2203/15 ,  H01S3/0092

摘要： A deep ultra-violet (DUV) continuous wave (CW) laser includes a fundamental CW laser configured to generate a fundamental frequency with a corresponding wavelength between about 1 μm and 1.1 μm, a third harmonic generator module including one or more periodically poled non-linear optical (NLO) crystals that generate a third harmonic and an optional second harmonic, and one of a fourth harmonic generator module and a fifth harmonic generator. The fourth harmonic generator module includes a cavity resonant at the fundamental frequency configured to combine the fundamental frequency with the third harmonic to generate a fourth harmonic. The fourth harmonic generator module includes either a cavity resonant at the fundamental frequency for combining the fundamental frequency with the third harmonic to generate a fifth harmonic, or a cavity resonant at the second harmonic frequency for combining the second harmonic and the third harmonic to generate the fifth harmonic.

摘要翻译： 深紫外（DUV）连续波（CW）激光器包括基本CW激光器，其被配置为产生具有在约1μm和1.1μm之间的对应波长的基频;三次谐波发生器模块，包括一个或多个非线性光学 （NLO）晶体，其产生三次谐波和可选的二次谐波，以及五次谐波发生器。 第五谐波发生器模块包括在基频处谐振的腔，并且在第一NLO晶体中组合基频和三次谐波以产生第四谐波，然后在第二NLO晶体中组合四次谐波与未消耗的基频，以产生 五次谐波。 使用一个或多个透镜来分别在第一和第二NLO晶体中聚焦第三和第四谐波。

公开(公告)号：EP3115840A1

公开(公告)日：2017-01-11

申请号：EP15758258.6

申请日：2015-02-09

申请人： National Institute of Advanced Industrial Science and Technology

发明人： KUROSU Takayuki

IPC分类号： G02F1/35 ,  H04B10/299

CPC分类号： H04B10/299 ,  G02F1/3536 ,  G02F1/3538 ,  G02F1/39 ,  G02F2001/354 ,  H01S5/06821 ,  H01S5/4006 ,  H01S5/50 ,  H01S5/5054 ,  H04B10/5561 ,  H04L7/0075

摘要： In a signal regeneration device in which recovery of a signal quality which has been degraded during transmission in optical communication and extension of a transmission distance are achieved, the most representative method of quantizing an optical phase is a phase sensitive amplifier (PSA) and a technique that utilizes an optical parametric process through use of a highly nonlinear optical medium, but there is a demand for a technique of quantizing an optical phase which is not accompanied with an optical parametric gain, has small-sized elements, is easily integrated, and does not require high power pump light By a technique of a hybrid optical phase squeezer (HOPS), when a phase of input light is quantized to M levels (M > 2), phase conjugate light of the input light and (M-1)th phase harmonic light of the input light are subjected to power modulation to be coherently added, so that quantization of the optical phase is performed through use of a simple four-wave mixing (FWM) that is not accompanied with the optical parametric gain and a general optical amplifier by using a general nonlinear optical medium such as silicon, and accordingly, a GER of equal to or higher than 30 dB can be obtained, even if a nonlinear optical element having a low nonlinearity is used.

摘要翻译： 在实现在光通信传输和扩展传输距离方面已经劣化的信号质量的恢复的信号再生装置中，用于量化光学相位的最具代表性的方法是相位敏感放大器（PSA）和技术 它通过使用高度非线性的光学介质利用光学参数化过程，但是需要量化光学相位的技术，其不伴随光学参量增益，具有小尺寸的元件，易于集成，并且 不需要高功率泵浦光通过混合光学相位压缩器（HOPS）的技术，当输入光的相位被量化到M个电平（M> 2）时，输入光的相位共轭光和（M-1） 输入光的相位谐波光经受功率调制以相干相加，从而通过使用简单的四波混频（FWM）来执行光学相位的量化，其中i 通过使用诸如硅的通用非线性光学介质不伴随光参量增益和通用光放大器，因此，即使具有低的非线性光学元件，也可以获得等于或高于30dB的GER 使用非线性。

公开(公告)号：EP2936245A1

公开(公告)日：2015-10-28

申请号：EP13801501.1

申请日：2013-11-26

申请人： Rofin Sinar Laser GmbH

发明人： LEHMANN, Uwe ,  REISER, Axel

IPC分类号： G02F1/35

CPC分类号： G02F1/3544 ,  G02F1/3501 ,  G02F1/3534 ,  G02F2001/3503 ,  G02F2001/3507 ,  G02F2001/3509 ,  G02F2001/354 ,  G02F2201/305 ,  H01S3/0071 ,  H01S3/0092

摘要： A device for frequency conversion of a first laser beam (6) generated with a first frequency (ω
1 ) by a laser beam source (4) comprises: a) an optically non-linear first crystal (2) for generating a second laser beam (8) having a second frequency (ω
2 ), which differs from the first frequency (ω
1 ), said second laser beam propagating parallel to the first laser beam (6) after leaving the first optically non-linear crystal (2), b) an optically non-linear second crystal (10), which generates from the first and second laser beams (6, 8) at least one third laser beam (18) having a third frequency (ω
3 ), which differs from the first frequency (ω
1 ) and the second frequency (ω
2 ), c) an optical deflection device (12) for influencing the relative beam position between first and second laser beams (6, 8) in such a way that d) first and second laser beams (6, 8), before entering into the second crystal (10), propagate at an angle (a) with respect to one another, which angle differs from zero, and e) enter in a manner spaced apart from one another at an entrance surface (16) of the second crystal (10) and intersect within the second crystal (10) with at the same time collinear phase matching, wherein f) the entrance surface (16) of the second crystal (10) is inclined at a wedge angle (γ) which differs from 0° with respect to two mutually parallel, mutually opposite side surfaces (17) of the second crystal (10).

公开(公告)号：EP2759027A1

公开(公告)日：2014-07-30

申请号：EP12834106.2

申请日：2012-09-20

申请人： Kla-Tencor Corporation

发明人： CHUANG, Yung-Ho, Alex ,  DRIBINKSI, Vladimir ,  ARMSTRONG, Joseph, J.

IPC分类号： H01S3/109 ,  G01B11/30 ,  G01N21/88

CPC分类号： G01N21/9501 ,  G01J3/10 ,  G01J3/1256 ,  G01N2021/8825 ,  G01N2021/95676 ,  G02F1/3501 ,  G02F1/3532 ,  G02F2001/3507 ,  G02F2001/354 ,  G03F1/84 ,  G03F7/70025 ,  G03F7/7065 ,  H01S3/0092 ,  H01S3/06754 ,  H01S3/1618 ,  H01S3/302

摘要： An improved solid-state laser for generating 193 nm light is described. This laser uses the 6
th harmonic of a fundamental wavelength near 1160 nm to generate the 193 nm light. The laser mixes the 1160 nm fundamental wavelength with the 5
th harmonic, which is at a wavelength of approximately 232 nm. By proper selection of non-linear media, such mixing can be achieved by nearly non-critical phase matching. This mixing results in high conversion efficiency, good stability, and high reliability.

公开(公告)号：EP2083319B1

公开(公告)日：2013-07-17

申请号：EP08001428.5

申请日：2008-01-25

申请人： Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. ,  Ludwig-Maximilians-Universität München

发明人： Krausz, Ferenc ,  Rauschenberger, Jens ,  Apolonskiy, Alexander

IPC分类号： G02F1/35 ,  H01S3/109 ,  H01S5/06 ,  H05G2/00

CPC分类号： G02F1/353 ,  G02F1/3501 ,  G02F1/3511 ,  G02F1/355 ,  G02F2001/3507 ,  G02F2001/354 ,  G02F2203/15 ,  G02F2203/26 ,  H01S3/0604 ,  H01S3/0615 ,  H01S3/08004 ,  H01S3/094053 ,  H01S3/09415 ,  H01S3/102 ,  H01S3/109 ,  H01S3/1112 ,  H05G2/00

公开(公告)号：EP2372449A3

公开(公告)日：2012-02-08

申请号：EP11160798.2

申请日：2011-04-01

申请人： Lasertec Corporation

发明人： Sakuma, Jun

IPC分类号： G02F1/37 ,  G02F1/35

CPC分类号： G02F1/37 ,  G02F1/3534 ,  G02F2001/354

摘要： The present invention provides a radiation source apparatus which can generate a DUV radiation beam having a wavelength of 193.4 nm efficiently. The radiation source apparatus according to the invention has first wavelength conversion means arranged to receive a first laser beam of a first fundamental wavelength and to generate a fourth-harmonic wavelength of the first fundamental wavelength, second wavelength conversion means arranged to receive the beam of the fourth-harmonic wavelength of the first fundamental wavelength (266nm) and a second laser beam of a second fundamental wavelength and to sum-frequency mix the fourth-harmonic with the second fundamental wavelength radiation to generate a beam of second DUV radiation having a wavelength between approximately 232 nm and 237 nm, and third wavelength conversion means arranged to receive the beam of second DUV radiation and the third laser beam of a third fundamental wavelength and to sum-frequency mix the second DUV radiation with the third fundamental wavelength radiation to generate third DUV radiation having a wavelength between approximately 192.5 nm and 194.5 nm.

公开(公告)号：EP1615067A4

公开(公告)日：2008-09-17

申请号：EP04722409

申请日：2004-03-22

申请人： NIPPON KOGAKU KK

发明人： MIWA SATOSHI

IPC分类号： G02B27/00 ,  B23K26/00 ,  G02B3/06 ,  G02F1/35 ,  G02F1/37 ,  G03F1/08 ,  G03F7/20 ,  H01L21/027

CPC分类号： G03F7/70958 ,  G02B3/06 ,  G02B27/0043 ,  G02F1/353 ,  G02F1/3532 ,  G02F2001/354 ,  G03F7/70025 ,  G03F7/70575 ,  G03F7/70666 ,  G03F7/708 ,  G03F7/70825 ,  G03F7/70941 ,  G03F7/70983

摘要： The generatrix directions of cylindrical lenses 11a and 11b are perpendicular to the optical axis, and are perpendicular to each other. As a result, the optical system combining the cylindrical lenses 11a and 11b can achieve the same optical effect as a spherical lens. This system is characterized by the fact that since the respective lenses are cylindrical lenses, there is no shift in the optical axis even if the lenses are moved in the generatrix direction. For example, in cases where scratches on the lenses have become conspicuous, the useful life of the laser device can be extended by moving the lenses in the generatrix direction (direction indicated by the arrow) by means of a moving mechanism (not shown in the figures), e.g., a stage equipped with a micrometer, and using unused portions of the lenses.

公开(公告)号：EP0745015B1

公开(公告)日：2006-05-03

申请号：EP95909534.0

申请日：1995-02-09

申请人： NEW WAVE RESEARCH

发明人： LEONG, Tony, P. ,  NORTH, Edward, S. ,  HERBST, Richard, Linsley

IPC分类号： B23K26/06

CPC分类号： B23K26/0665 ,  B23K26/032 ,  B23K26/06 ,  B23K26/0648 ,  G02B5/3083 ,  G02B26/007 ,  G02B26/023 ,  G02F1/1309 ,  G02F1/37 ,  G02F2001/354 ,  H01L22/22 ,  H01L2924/0002 ,  H01L2924/00

摘要： A probe station which includes a base machine (10), a probe platen (17) mounted on the base machine (10), and a single passive air cooled Nd:YAG laser (100), mounted with a microscope (22). The single laser supplies an output beam to a first non-linear crystal (106) for generating the second harmonic of the fundamental output wavelength. A mirror (107) then directs the beam at a 90 degree angle through a polarizer (108) to repolarize the fundamental wavelength. The beam then passes to a second non-linear crystal (109) for generating the third and fourth harmonic of the fundamental wavelength. A reflecting mirror (111) then directs the beam to a variable attenuator (112) to select the appropriate output wavelength in the infrared (1064 nm), in the green (532 nm), or in the ultraviolet (355 or 266 nm).

公开(公告)号：EP1010221A4

公开(公告)日：2005-11-30

申请号：EP98923476

申请日：1998-05-14

申请人： EXCEL QUANTRONIX CORP

发明人： ZHOU FUZHENG ,  FU QIANG ,  MAIKOWSKI MICHAEL

IPC分类号： G02F1/37 ,  G02F1/35 ,  H01S3/109 ,  H01S3/10

CPC分类号： H01S3/109 ,  G02F2001/354 ,  G02F2001/3542

摘要： Intra-cavity and/or inter-cavity sub-resonators (10, 20, 22, 50, 52, 32, 54) with dielectric coated mirrors (10, 50, 52, 54) have anti-reflection and high-reflection coatings to attain high efficiency third (32) and higher order harmonics generation of laser radiation. Main-resonators and sub-resonators enhance the fundamental and harmonic oscillation, respectively, which result is high conversion efficiency of third harmonics (32) and higer, such improved lasing efficiency may be implemented in higher power lasers for improved power performance to attain over 8 W of UV output power with a high repetition rate. The use of intra-cavity THG techniques provide high efficiency by using existing high intensities of the input fundamental frequencies available in the intra-cavity region of the laser to avoid damage to components of the laser, such as the laser crystal. The THG utilizes a double-pass and/or multi-pass arrangement, which results in about a 60 % increase in output power compared to a single pass configuration. Also, blocking of UV energy generated in a return pass is performed to eliminate damage by the UV to components in the main cavity.

摘要翻译： 具有介电涂层镜的腔内和/或腔间次谐振器具有抗反射和高反射涂层，以实现激光辐射的高效率三次谐波和高次谐波产生。 主谐振器和副谐振器分别增强了基波和谐波振荡，导致三次谐波的高转换效率和更高的谐波振荡。 这种改进的激光效率可以在高功率激光器中实现，以改善功率性能，以获得具有高重复率的超过8W的UV输出功率。 腔内THG技术的使用通过使用激光器的腔内区域内可用的输入基频的现有高强度来避免对诸如激光晶体的激光器的部件的损坏而提供高效率。 THG采用双通和/或多通道布置，与单通配置相比，输出功率增加约60％。 此外，执行在返回通道中产生的UV能量的阻挡以消除UV对主腔中的部件的损伤。