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    CW DUV LASER WITH IMPROVED STABILITY
    1.
    发明公开
    CW DUV LASER WITH IMPROVED STABILITY 有权
    CW-DUV-LASER MIT VERBESSERTERSTABILITÄT

    公开(公告)号：EP3008779A4

    公开(公告)日：2017-01-18

    申请号：EP14811528

    申请日：2014-06-11

    申请人： KLA-TENCOR CORP

    发明人： CHUANG YUNG-HO ,  LU XIAOXU ,  FIELDEN JOHN

    IPC分类号： G02F1/35 ,  G02F1/355 ,  H01S3/109

    CPC分类号： H01S3/109 ,  G02F1/353 ,  G02F1/3534 ,  G02F1/3558 ,  G02F2001/3507 ,  G02F2001/354 ,  G02F2201/17 ,  G02F2203/15 ,  H01S3/0092

    摘要： A deep ultra-violet (DUV) continuous wave (CW) laser includes a fundamental CW laser configured to generate a fundamental frequency with a corresponding wavelength between about 1 μm and 1.1 μm, a third harmonic generator module including one or more periodically poled non-linear optical (NLO) crystals that generate a third harmonic and an optional second harmonic, and one of a fourth harmonic generator module and a fifth harmonic generator. The fourth harmonic generator module includes a cavity resonant at the fundamental frequency configured to combine the fundamental frequency with the third harmonic to generate a fourth harmonic. The fourth harmonic generator module includes either a cavity resonant at the fundamental frequency for combining the fundamental frequency with the third harmonic to generate a fifth harmonic, or a cavity resonant at the second harmonic frequency for combining the second harmonic and the third harmonic to generate the fifth harmonic.

    摘要翻译： 深紫外（DUV）连续波（CW）激光器包括基本CW激光器，其被配置为产生具有在约1μm和1.1μm之间的对应波长的基频;三次谐波发生器模块，包括一个或多个非线性光学 （NLO）晶体，其产生三次谐波和可选的二次谐波，以及五次谐波发生器。 第五谐波发生器模块包括在基频处谐振的腔，并且在第一NLO晶体中组合基频和三次谐波以产生第四谐波，然后在第二NLO晶体中组合四次谐波与未消耗的基频，以产生 五次谐波。 使用一个或多个透镜来分别在第一和第二NLO晶体中聚焦第三和第四谐波。

    ULTRA-BROADBAND UV MICROSCOPE IMAGING SYSTEM WITH WIDE RANGE ZOOM CAPABILITY
    2.
    发明公开
    ULTRA-BROADBAND UV MICROSCOPE IMAGING SYSTEM WITH WIDE RANGE ZOOM CAPABILITY 有权
    ULTRABREITBAND UV-MIKROSKOP-ABBILDUNGSSYSTEM MIT WEITREICHENDERZOOMFÄHIGKEIT

    公开(公告)号：EP1000371A4

    公开(公告)日：2008-03-19

    申请号：EP98942028

    申请日：1998-08-07

    申请人： KLA TENCOR CORP

    发明人： SHAFER DAVID ROSS ,  CHUANG YUNG-HO ,  TSAI BIN-MING BENJAMIN

    IPC分类号： G01N21/33 ,  G02B13/14 ,  G02B15/14 ,  G02B15/15 ,  G02B15/16 ,  G02B17/08 ,  G02B21/02 ,  G02B21/16 ,  G03C5/16 ,  G03F1/84 ,  G03F3/00 ,  G03F7/20 ,  H04N5/225 ,  G02B1/00

    CPC分类号： G03F7/70616 ,  G02B17/0808 ,  G02B17/0856 ,  G02B17/0892 ,  G02B21/16 ,  G03F1/84 ,  G03F7/70225 ,  G03F7/70275 ,  G03F7/7065

    摘要： An ultra-broadband ultraviolet (UV) catadioptric imaging microscope system with wide-range zoom capability. The microscope system, which comprises a catadioptric lens group and a zooming tube lens group, has high optical resolution in the deep UV wavelengths, continuously adjustable magnification, and a high numerical aperture. The system integrates microscope modules such as objectives, tube lenses and zoom optics to reduce the number of components, and to simplify the system manufacturing process. The preferred embodiment offers excellent image quality across a very broad deep ultraviolet spectral range, combined with an all-refractive zooming tube lens. The zooming tube lens is modified to compensate for higher-order chromatic aberrations that would normally limit performance.

    摘要翻译： 超宽带紫外（UV）反折射成像显微镜系统，具有广泛的变焦能力。 包括反射折射透镜组和变焦管透镜组的显微镜系统在深紫外波长，连续可调放大倍数和高数值孔径中具有高的光学分辨率。 该系统集成了诸如目标，管镜和变焦光学的显微镜模块，以减少部件数量，并简化系统制造过程。 优选实施例在非常宽的深紫外光谱范围内提供优异的图像质量，与全折射变焦管透镜组合。 变焦管镜头被修改以补偿通常会限制性能的高阶色差。

    A LOW-NOISE SENSOR AND AN INSPECTION SYSTEM USING A LOW-NOISE SENSOR
    3.
    发明公开
    A LOW-NOISE SENSOR AND AN INSPECTION SYSTEM USING A LOW-NOISE SENSOR 审中-公开
    RAUSCHARMER传感器和检测系统MIT RAUSCHARMEM传感器

    公开(公告)号：EP3085077A4

    公开(公告)日：2017-10-04

    申请号：EP14872293

    申请日：2014-12-18

    申请人： KLA-TENCOR CORP

    发明人： BROWN DAVID L ,  CHUANG YUNG-HO ,  FIELDEN JOHN

    IPC分类号： H04N5/335 ,  G01M11/00 ,  H04N5/357 ,  H04N5/376

    CPC分类号： G01N21/8851 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/95676 ,  H01L27/14636 ,  H01L31/02 ,  H04N5/3577 ,  H04N5/3765

    摘要： A method of inspecting a sample at high speed includes directing and focusing radiation onto a sample, and receiving radiation from the sample and directing received radiation to an image sensor. Notably, the method includes driving the image sensor with predetermined signals. The predetermined signals minimize a settling time of an output signal of the image sensor. The predetermined signals are controlled by a phase accumulator, which is used to select look-up values. The driving can further include loading an initial phase value, selecting most significant bits of the phase accumulator, and converting the look-up values to an analog signal. In one embodiment, for each cycle of a phase clock, a phase increment can be added to the phase accumulator. The driving can be performed by a custom waveform generator.

    摘要翻译： 高速检查样本的方法包括将辐射引导和聚焦到样本上，并接收来自样本的辐射并将接收到的辐射引导到图像传感器。 值得注意的是，该方法包括用预定信号驱动图像传感器。 预定信号最小化图像传感器的输出信号的建立时间。 预定信号由相位累加器控制，该相位累加器用于选择查找值。 驱动还可以包括加载初始相位值，选择相位累加器的最高有效位，并将查找值转换为模拟信号。 在一个实施例中，对于相位时钟的每个周期，可以将相位增量添加到相位累加器。 驾驶可以由自定义波形发生器执行。