公开(公告)号：EP0393593A2

公开(公告)日：1990-10-24

申请号：EP90107271.0

申请日：1990-04-17

申请人： MITSUBISHI MINING & CEMENT CO., LTD.

发明人： Takenouchi, Takeyoshi ,  Nakagawa, Masumi

IPC分类号： G01N21/71 ,  F27D21/00 ,  G01J5/60

CPC分类号： G01J5/58 ,  F27B7/42 ,  G01N21/716 ,  G01N2021/151

摘要： There is provided a method of monitoring a firing condition in a cement kiln, by measuring an intensity of spectrum of a radiation which radiation is emitted from a clinker being fired in a cement kiln, and processing the intensity of the spectrum to produce a parameter for monitoring the condition in the kiln, by correcting the intensity profile of the spectrum by interpolating a profile (range) which is deformed by the absorption with alkali atom(s) in an atmosphere of the kiln. Further, the absorption intensity of the spectrum at a sodium absorption wavelength and potassium absorption wavelength should be continuously measured and corrected by interpolating so as to produce a parameter for monitoring. An apparatus for monitoring a cement kiln, comprises an optical head collector equiped at a kiln hood of the kiln, to collect a radiation from a clinker being fired in the kiln, an optical fiber for transmitting the collected radiation, a spectrophotometer for analysing the collected radiation, which is connected to said optical fiber, and, a processor for processing said intensity of the spectrum measured by said spectrophotometer, outputing the processed data, and controlling the operation of the spectrophotometer. Further, the apparatus has said optical collector and said optical fiber mounted respectively on each of a plurality of the cement kilns, and a transfer switch(s) for selecting an optical head and an optical fiber connecting the kiln to be monitored, and then, a plurality of the cement kilns can be monitored.

摘要翻译： 提供了一种通过测量在水泥窑中被煅烧的熟料辐射的辐射的光谱的强度，并且处理光谱的强度以产生参数的方法来监测水泥窑中的烧制条件 通过在窑的气氛中内插由碱性原子的吸收变形的轮廓（范围）来校正光谱的强度分布，来监测窑内的状况。 此外，应该通过内插连续地测量和校正钠吸收波长和钾吸收波长处的光谱的吸收强度，以产生用于监测的参数。 一种用于监测水泥窑的装置，包括设置在窑的窑罩处的光学头收集器，用于收集来自窑炉中烧结的熟料的辐射，用于传送收集的辐射的光纤，用于分析所收集的辐射的分光光度计 连接到所述光纤的辐射，以及处理器，用于处理由所述分光光度计测量的所述光谱的强度，输出处理的数据，并控制分光光度计的操作。 此外，该装置具有分别安装在多个水泥窑中的每一个上的所述光收发器和所述光纤，以及用于选择连接要监视的窑的光学头和光纤的转移开关， 可以监测多个水泥窑。

公开(公告)号：EP0256120B1

公开(公告)日：1990-06-13

申请号：EP87901878.6

申请日：1987-02-02

申请人： COMBUSTION ENGINEERING, INC.

发明人： NIZIOLEK, James, M. ,  SUTTON, James, P., III

IPC分类号： G01N15/02

CPC分类号： G01N21/53 ,  G01N15/0211 ,  G01N2015/0046 ,  G01N2021/151 ,  G01N2021/4707 ,  G01N2021/4716 ,  G01N2021/4719 ,  G01N2201/08

摘要： Laser light from the laser light source (14) is conveyed by means of the laser light conveying device (40) to the collimator. After being collimated the laser light is transmitted to the first focusing device (64) whereby the laser light is focused and is then made to pass across the sample path (74). The laser light is scattered by the particles that are present in the sample path (74). Both scattered and collimated light is collected by the second focusing device (78) and then focused thereby on to the detector device (82) such that the intensity distribution of the laser light is gathered by the detector device (82). Particle size distribution is inferred from the light distribution received by the detector device (82).

公开(公告)号：EP0108799A4

公开(公告)日：1984-09-14

申请号：EP83902028

申请日：1983-05-10

申请人： UNITED TECHNOLOGIES CORP

发明人： MELTZ GERALD ,  NEWMAN LEON A ,  DUNPHY JAMES R ,  FOSTER MARTIN C

IPC分类号： G01N21/49 ,  G01N21/53

CPC分类号： G01N21/85 ,  G01N21/53 ,  G01N2021/151

摘要： A sensor employs a laser (12) to obtain a collimated light beam for transmission across the gas effluent of a catalytic cracking process. Particulate matter entrained in the gas flow forward scatters light energy to a collecting aperture (18) which, in turn focuses the scattered light on a first photodetector (22). A second photodetector (30) receives directly transmitted light energy. A ratio (64) between the output signals of the two photodetectors is derived and presented to a threshold level detector (70). If the magnitude of the scatter exceeds a predetermined level it is concluded that a catalyst load dump has occurred. The optical system is carefully selected to ensure that only light energy scattered from a sample volume (16) within the entrained gas flow reaches the first photodetector (22). This is important because it prevents particulate matter on the surfaces of the transparent windows (36 and 50) from affecting the operation of the sensor.

公开(公告)号：EP2909600B1

公开(公告)日：2018-09-12

申请号：EP13846416.9

申请日：2013-10-08

申请人： Vuv Analytics, Inc.

发明人： HARRISON, Dale, A. ,  HAYES, Anthony, T. ,  WALSH, Phillip

IPC分类号： G01N21/05 ,  G01N21/15 ,  G01N21/33 ,  G01N30/74 ,  G01N33/00 ,  G01N21/03

CPC分类号： G01N30/78 ,  G01J3/02 ,  G01N21/0332 ,  G01N21/05 ,  G01N21/15 ,  G01N21/33 ,  G01N30/02 ,  G01N30/74 ,  G01N33/0004 ,  G01N33/0027 ,  G01N2021/0325 ,  G01N2021/151 ,  G01N2021/158 ,  G01N2021/335 ,  G01N2021/8578 ,  G01N2030/025 ,  G01N2030/027 ,  G01N2201/024 ,  G01N2201/0633 ,  G01N2201/12 ,  G01N30/7266

摘要： An efficient absorption spectroscopy system is provided. The spectroscopy system may be configured to measure solid, liquid or gaseous samples. Vacuum ultra-violet wavelengths may be utilized. Some of the disclosed techniques can be used for detecting the presence of trace concentrations of gaseous species. A preferable gas flow cell is disclosed. Some of the disclosed techniques may be used with a gas chromatography system so as to detect and identify species eluted from the column. Some of the disclosed techniques may be used in conjunction with an electrospray interface and a liquid chromatography system so as to detect and identify gas phase ions of macromolecules produced from solution. Some of the disclosed techniques may be used to characterize chemical reactions. Some of the disclosed techniques may be used in conjunction with an ultra short-path length sample cell to measure liquids.

公开(公告)号：EP2959504B1

公开(公告)日：2018-07-04

申请号：EP14754941.4

申请日：2014-02-25

申请人： Kla-Tencor Corporation ,  Sandia Corporation

发明人： DELGADO, Gildardo ,  JOHNSON, Terry ,  ARIENTI, Marco ,  HARB, Salam ,  KLEBANOFF, Lennie ,  GARCIA, Rudy ,  TAHMASSEBPUR, Mohammed ,  SCOTT, Sarah

IPC分类号： G03F7/20

CPC分类号： G01N21/15 ,  G01N21/9501 ,  G01N2021/151 ,  G03F7/705 ,  G03F7/70933

摘要： A computer-implemented method for determining an optimized purge gas flow in a semi-conductor inspection metrology or lithography apparatus, comprising receiving a permissible contaminant mole fraction, a contaminant outgassing flow rate associated with a contaminant, a contaminant mass diffusivity, an outgassing surface length, a pressure, a temperature, a channel height, and a molecular weight of a purge gas, calculating a flow factor based on the permissible contaminant mole fraction, the contaminant outgassing flow rate, the channel height, and the outgassing surface length, comparing the flow factor to a predefined maximum flow factor value, calculating a minimum purge gas velocity and a purge gas mass flow rate from the flow factor, the contaminant mass diffusivity, the pressure, the temperature, and the molecular weight of the purge gas, and introducing the purge gas into the semi-conductor inspection metrology or lithography apparatus with the minimum purge gas velocity and the purge gas flow rate.

公开(公告)号：EP3176564A1

公开(公告)日：2017-06-07

申请号：EP16196554.6

申请日：2016-10-31

申请人： Fuji Electric Co., Ltd.

发明人： HIGASHI, Ryoichi ,  KOIZUMI, Kazuhiro ,  TAKEDA, Naoki ,  HIRAYAMA, Noritomo

IPC分类号： G01N21/31 ,  G01J3/427 ,  G01J3/433 ,  G01N21/39 ,  G01N21/85 ,  G01N21/27 ,  G01N21/03 ,  G01N21/15 ,  G01N21/53

CPC分类号： G01N21/39 ,  G01J3/0208 ,  G01J3/0243 ,  G01J3/10 ,  G01J3/427 ,  G01N21/274 ,  G01N21/314 ,  G01N21/85 ,  G01N2021/0314 ,  G01N2021/151 ,  G01N2021/399 ,  G01N2021/536 ,  G01N2021/8521 ,  G01N2021/8578

摘要： Provided is a laser-type gas analyzing apparatus including a radiating section (106) that radiates laser light from outside a side wall (12) of a flue (10), through an opening portion (14) provided in the side wall (12), and onto an inner surface of the side wall (12) opposite the opening portion (14); a light receiving section (116) that receives the laser light reflected by the inner surface; and a calculating section (104) that calculates a concentration of a target gas passing through the flue (10), based on an intensity of the laser light output by the radiating section (106) and an intensity of the laser light received by the light receiving section (116).

摘要翻译： 本发明提供一种激光式气体分析装置，该激光式气体分析装置具备从设置于侧壁（12）的开口部（14）向烟道（10）的侧壁（12）外部照射激光的照射部（106） 并且延伸到与开口部分（14）相对的侧壁（12）的内表面上; 光接收部分（116），其接收由内表面反射的激光; 和计算部分（104），其基于由所述辐射部分（106）输出的所述激光的强度和由所述光线接收的所述激光的强度来计算经过所述烟道（10）的目标气体的浓度 接收部分（116）。

公开(公告)号：EP2959504A4

公开(公告)日：2017-01-18

申请号：EP14754941

申请日：2014-02-25

申请人： KLA-TENCOR CORP ,  SANDIA CORP

发明人： DELGADO GILDARDO ,  JOHNSON TERRY ,  ARIENTI MARCO ,  HARB SALAM ,  KLEBANOFF LENNIE ,  GARCIA RUDY ,  TAHMASSEBPUR MOHAMMED ,  SCOTT SARAH

IPC分类号： G03F7/20 ,  H01L21/66

CPC分类号： G01N21/15 ,  G01N21/9501 ,  G01N2021/151 ,  G03F7/705 ,  G03F7/70933

摘要： A computer-implemented method for determining an optimized purge gas flow in a semi-conductor inspection metrology or lithography apparatus, comprising receiving a permissible contaminant mole fraction, a contaminant outgassing flow rate associated with a contaminant, a contaminant mass diffusivity, an outgassing surface length, a pressure, a temperature, a channel height, and a molecular weight of a purge gas, calculating a flow factor based on the permissible contaminant mole fraction, the contaminant outgassing flow rate, the channel height, and the outgassing surface length, comparing the flow factor to a predefined maximum flow factor value, calculating a minimum purge gas velocity and a purge gas mass flow rate from the flow factor, the contaminant mass diffusivity, the pressure, the temperature, and the molecular weight of the purge gas, and introducing the purge gas into the semi-conductor inspection metrology or lithography apparatus with the minimum purge gas velocity and the purge gas flow rate.

摘要翻译： 一种用于在半导体检测计量或光刻设备中确定优化的吹扫气体流的计算机实现的方法，包括接收允许的污染物摩尔分数，与污染物相关的污染物除气流量，污染物质量扩散系数，脱气表面长度 ，压力，温度，通道高度和吹扫气体的分子量，基于允许的污染物摩尔分数，污染物除气流量，通道高度和除气表面长度计算流量因子，比较 流量因子到预定的最大流量因子值，从流动因子，污染物质量扩散性，压力，温度和吹扫气体的分子量计算最小净化气体速度和净化气体质量流量，并引入 吹扫气体进入具有最小清洗气体速度的半导体检测计量或光刻设备 净化气体流量。

公开(公告)号：EP3056893A3

公开(公告)日：2016-12-07

申请号：EP16152478.0

申请日：2016-01-22

申请人： J.M. Canty Inc.

发明人： O'Brien, Paul ,  Canty, Thomas M. ,  Jean, David E. ,  Halbach, Justin R. ,  Rizzo, Michael F.

IPC分类号： G01N21/09 ,  G01N21/85 ,  G01N21/05 ,  G01N21/15

CPC分类号： G01N21/85 ,  G01N15/0227 ,  G01N15/1434 ,  G01N21/05 ,  G01N21/09 ,  G01N21/15 ,  G01N2021/0389 ,  G01N2021/052 ,  G01N2021/151 ,  G01N2021/8557 ,  G01N2201/02 ,  G01N2201/062 ,  G01N2201/12

摘要： A flow analyzer includes a flow body having a single-piece construction. The flow body includes a flow path extending through the flow body along a flow direction between opposing inlet and outlet ports and an enclosed wiring conduit extending substantially transverse to the flow direction between a first side of the flow body and a second side of the flow body. The enclosed wiring conduit is isolated from the flow path. An illumination unit is disposed on the first side of the flow body and configured to illuminate fluid within the flow path. An observation unit is disposed on the second side of the flow body and configured to visually observe the fluid within the flow path.

摘要翻译： 流量分析仪包括具有单件结构的流动体。 流动体包括沿相对的入口和出口端口之间的流动方向延伸穿过流动体的流动路径以及基本上横向于流动方向在流动体的第一侧和流动体的第二侧之间延伸的封闭布线管道 。 封闭的接线导管与流路隔离。 照明单元设置在流动体的第一侧上并且构造成照射流动路径内的流体。 观察单元设置在流动体的第二侧上，并被配置为目视观察流动路径内的流体。

公开(公告)号：EP2946193B1

公开(公告)日：2016-11-30

申请号：EP14701019.3

申请日：2014-01-17

申请人： ProAnalysis AS

发明人： MAGNUSSEN, Stian ,  TANGEN, Hallvard ,  DALLAND, Anders ,  ØVERLAND, Bjørn Atle ,  HANSEN, Sindre Rognved ,  SMITH-JAHNSEN, Øyvind

IPC分类号： G01N21/15 ,  G01N21/85

CPC分类号： G01N21/15 ,  B08B3/12 ,  G01N21/8507 ,  G01N2021/151 ,  G01N2021/152 ,  G01N2021/154 ,  G01N2021/8514

公开(公告)号：EP3088865A1

公开(公告)日：2016-11-02

申请号：EP15165324.3

申请日：2015-04-28

申请人： Bayer Technology Services GmbH

发明人： Froese, Ralf

IPC分类号： G01N21/15 ,  G01N21/85 ,  G01N21/3504 ,  G01N21/39

CPC分类号： G01N21/15 ,  G01N21/3504 ,  G01N21/8507 ,  G01N2021/151 ,  G01N2021/399 ,  G01N2021/8578

摘要： Die vorliegende Erfindung betrifft einen Messstutzen zum optischen Untersuchen eines durch eine Gasleitung (12) geleiteten Gases durch Analysieren einer durch das Gas geführten Messstrahlung (22), wobei der Messstutzen (16, 16') an der das zu untersuchende Gas führenden Gasleitung (12) fixierbar ist, und wobei der Messstutzen (16, 16') einen Messkanal (26) zum Durchleiten der Messstrahlung (22) aufweist, wobei der Messstutzen (16, 16') zusätzlich zu dem Messkanal (26) einen von dem Messkanal (16, 16') zumindest teilweise getrennten Dampfkanal (28) aufweist, wobei der Dampfkanal (28) den Messkanal (26) zumindest teilweise umrahmt. Ein vorbeschriebener Messstutzen (16, , 16') erlaubt eine verlängerte Messphase und eine verkürzte Regenerierungsphase bei einem ressourcenschonenden Regeneieren des Messstutzens (16, 16').

摘要翻译： 本发明涉及一种用于通过一个气体管线通过分析通过气体测量辐射（22）的被引导光学检测一个（12）引导的气体，与测量连接（16，16“），以将待测试的气体导致气体管线（12）的测量连接 是固定的，并且其中，所述测量喷嘴（16，16“）包括一个测量信道（26），用于使所述测量光束（22），其中，所述测量喷嘴（16，16”），除了测量通道（26）包括（从测量信道16， 具有16“）至少部分地分开的蒸汽通道（28），其中，所述蒸汽通道（28）至少部分帧测量通道（26）。 将规定测压口（16，16“）允许一个扩展测量相位和缩短的再生阶段，在资源节约雨Eieren测量喷嘴（16，16”）。