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    SCATTEROMETRISCHE MESSANORDNUNG UND MESSVERFAHREN
    121.
    发明公开
    SCATTEROMETRISCHE MESSANORDNUNG UND MESSVERFAHREN 审中-公开
    Scatterometric测定装置及测定方法

    公开(公告)号：EP1434977A1

    公开(公告)日：2004-07-07

    申请号：EP02785122.9

    申请日：2002-09-18

    Applicant: Carl Zeiss Microelectronic Systems GmbH

    Inventor： DOBSCHAL, Hans-Jürgen ,  MASCHKE, Gunter ,  BISCHOFF, Jörg

    IPC: G01J4/00 ,  G01N21/21

    CPC classification number: G01J4/00 ,  G01J3/28 ,  G01N21/211 ,  G01N21/47

    Abstract: The invention relates to a measuring array having an optical device into which a radiation beam (10) departing and diverging from a sample is injected for measurement and a detector (13) arranged downstream of said optical device, said detector having a plurality of detector pixels which are arranged on a plane and can be evaluated separately from one another, wherein the optical device (11) spectrally splits the diverging radiation beam (10) in a first direction crosswise to the direction of propagation of the radiation beam (10) and directs it towards the detector (13). The optical device parallelizes the radiation beam before it strikes the detector (13) in a second direction crosswise to the direction of propagation in such a manner that adjacent rays in the second direction of the radiation beam striking the detector (13) are parallel relative to one another.

    Wavelength dispersion measuring apparatus and polarization dispersion measuring apparatus
    125.
    发明公开
    Wavelength dispersion measuring apparatus and polarization dispersion measuring apparatus 有权
    设备，用于测量的波长色散和偏振色散测量装置

    公开(公告)号：EP0937973A3

    公开(公告)日：2002-07-17

    申请号：EP99103133.7

    申请日：1999-02-17

    Applicant: ANRITSU CORPORATION ,  Nippon Telegraph and Telephone Corporation

    Inventor： Otani, Akihito ,  Otsubo, Toshinobu ,  Takara, Hidehiko c/o Nippon Telegr. & Tele. Corp. ,  Kawanishi, Satoki c/o Nippon Telegr. & Tele. Corp. ,  Yamabayashi, Yoshiaki c/o Nippon Telegr.& Tel.Cor.

    IPC: G01J9/02 ,  G01M11/00

    CPC classification number: G01M11/336 ,  G01J4/00 ,  G01J7/00 ,  G01J2009/0261 ,  G01M11/332 ,  G01M11/335

    Abstract: A first tunable wavelength pulse light source (22) is driven by a reference signal to emit a first optical pulse. An optical demultiplexer (24) demultiplexes a first optical pulse emitted from the first pulse light source (22) into a reference optical pulse and an incident optical pulse to be sent into an object to be measured. An optical multiplexer (26) multiplexes the reference optical pulse and an outgoing optical pulse passing through the object to output multiplexed light. A second pulse light source (23) generates a second optical pulse which is synchronous with the first optical pulse and delays a predetermined time for each period of the first optical pulse. A sampling unit (27, 27a, 27b) receives the multiplexed light and the second optical pulse to obtain an optical pulse train signal proportional to the intensity of the multiplexed light obtained in synchronism with the second optical pulse. From the optical pulse train signal from the sampling unit (27, 27a, 27b), a signal processor (37) obtains an envelope formed by peaks of individual optical pulses forming the optical pulse train. The wavelength dispersion of the object is obtained by measuring the delay time of the outgoing optical pulse passing through the object on the basis of intervals between the peaks of the envelope.

    Abstract translation: 第一波长可调谐脉冲光源（22）由一个参考信号驱动以发射第一光脉冲。 光解复用器（24）解复用从第一脉冲光源（22）转换成参照光脉冲，并射入光脉冲发射的第一光脉冲在物体被发送到要被测量。 光复用器（26）复用该参照光脉冲和出射光脉冲通过对象传递到输出多路复用的光。 第二脉冲光源（23）基因速率的第2光脉冲的所有这是同步于所述第一光脉冲，并延迟一个预定时间的第1光脉冲的每个周期。 取样单元（27，27A，27B）接收多路复用的光以及第2光脉冲，以获得在光脉冲串信号正比于同步获得了与第2光脉冲的复用的光的强度。 从采样单元的光脉冲列信号（27，27A，27B），信号处理器（37）获取通过形成光脉冲列单独的光学脉冲的波峰形成的包络线。 对象的波长分散是通过测量穿过物体通过包络线的峰之间的间隔的基础上，输出光脉冲的延迟时间而获得。

    SYSTEM ZUR BERÜHRUNGSLOSEN HAND- UND FINGERLINIEN-ERKENNUNG
    127.
    发明授权
    SYSTEM ZUR BERÜHRUNGSLOSEN HAND- UND FINGERLINIEN-ERKENNUNG 有权
    系统非接触式手指纹线检测

    公开(公告)号：EP1073988B1

    公开(公告)日：2002-01-16

    申请号：EP99927701.5

    申请日：1999-04-21

    Applicant: TST-Touchless Sensor Technology AG

    Inventor： HAUKE, Rudolf ,  EINIGHAMMER, Hans, J. ,  EINIGHAMMER, Jens

    IPC: G06K9/20 ,  A61B5/117

    CPC classification number: G06K9/00033 ,  G01J4/00 ,  G06K9/2036 ,  G07C9/00158

    Abstract: The invention relates to a method for imaging hand and/or finger lines with a camera which functions without contacting the skin with the recording device. By using linear or circular polarized light in the illuminating and imaging beam path, a separate representation of the upper and lower skin pattern is made possible. In doing this, an image of the skin relief which is rich in contrast is obtained. In addition, the information regarding the deeper lying skin layers through which blood flows can be obtained. An algorithm searches the skin pattern of the hand surface for line elements of different thicknesses and direction (vectors). The calculated numeric identification contains total frequencies of occurrence of vectors, amplitudes and phases of harmonic components of projections of vector images of both patterns. The method makes it possible to identify people from a distance, to completely protect the measuring device and to provide an improved security against deception.

    Spectroscopic investigation system and compensator therefor
    128.
    发明公开
    Spectroscopic investigation system and compensator therefor 审中-公开
    系统zur spektroskopischen Untersuchung unddafürgeeigneter Kompensator

    公开(公告)号：EP1124120A2

    公开(公告)日：2001-08-16

    申请号：EP00310168.0

    申请日：2000-11-16

    Applicant: J.A. WOOLLAM CO. INC.

    Inventor： Herzinger, Craig M. ,  Johs, Blaine D.

    IPC: G01J4/00

    CPC classification number: G01J3/447 ,  G01J4/00 ,  G01J2003/2866 ,  G01N21/21 ,  G01N21/211 ,  G02B5/3058 ,  G02B5/3083 ,  G02B27/46

    Abstract: A spectroscopic investigation system comprises: a source (LS) of a polychromatic beam of electromagnetic radiation (PPCLB); a polarizer (P); a stage (STG) for supporting a material system to be investigated; an analyser (A); at least one detector system (DET); and at least one compensator (C) (C') (C'') arranged to be continuously rotated during operation while said beam of electromagnetic radiation (PPCLB) passes therethrough. Said polychromatic beam of electromagnetic radiation is caused to interact with a material system (MS) on said stage (STG), pass through said analyser (A), and enter said at least one detector system (DET). The compensator comprises a combination of at least two zero-order wave plates (MOA, MOB), having their respective fast axes offset from zero or ninety degrees with respect to one another; or a combination of at least a first and a second effective zero-order wave plate (ZO1, ZO2), each effective zero-order wave plate comprising two multiple order wave plates (MOA1, MOA2, MOB1, MOB2) which are combined with the fast axes thereof oriented at substantially ninety degrees to one another; or a combination of at least one zero-order wave plate (MOA , MOB), and at least one effective zero-order wave plate (ZO2, ZO1).

    Abstract translation: 光谱调查系统包括：多色光束的源（LS）; 偏振器（P）; 支持待调查材料系统的阶段（STG） 分析仪（A）; 至少一个检测器系统（DET）; 以及在操作期间连续旋转的至少一个补偿器（C）（C'）（C“）。 补偿器包括至少两个零级波片（MOA，MOB）的组合，它们各自的快轴相对于彼此偏离零或九十度; 或者至少第一和第二有效零级波片（ZO1，ZO2）的组合，每个有效的零级波片包括两个波形板，两个波片（MOA1，MOA2，MOB1，MOB2），它们与 其快轴相对于基本上九十度定向; 或至少一个零级波片（MOA，MOB）和至少一个有效零级波片（ZO2，ZO1）的组合。

    REGRESSION CALIBRATED SPECTROSCOPIC ROTATING COMPENSATOR ELLIPSOMETER SYSTEM WITH PHOTO ARRAY DETECTOR
    129.
    发明公开
    REGRESSION CALIBRATED SPECTROSCOPIC ROTATING COMPENSATOR ELLIPSOMETER SYSTEM WITH PHOTO ARRAY DETECTOR 失效
    ELLIPSOMETER-SYSTEM MIT REGRESSIONSKALIBRIERTEN SPEKTROSKOPISCHEN ROATIONSKOMPENSATOR UND PHOTARRAY-DETEKTOR

    公开(公告)号：EP1038165A4

    公开(公告)日：2000-10-25

    申请号：EP98907397

    申请日：1998-02-02

    Applicant: J A WOOLLAM CO INC

    Inventor： JOHS BLAINE D ,  THOMPSON DANIEL W

    IPC: G01J3/28 ,  G01J3/447 ,  G01J4/00 ,  G01N21/21

    CPC classification number: G01N21/211 ,  G01J3/447 ,  G01J4/00 ,  G01J2003/2866

    Abstract: A spectroscopic rotating compensator material system investigation system including a photo array (DE's) for simultaneously detecting a multiplicity of wavelengths is disclosed. The spectroscopic rotating compensator material system investigation system is calibrated by a mathematical regression based technique involving, where desirable, parameterization of calibration parameters. Calibration is possible of calibration parameters. Calibration is possible utilizing a single two-dimensional data set obtained with the spectroscopic rotating compensator material system investigation system in a "material system present" or in a "straight-through" configuration.

    Abstract translation: 公开了一种包括用于同时检测多个波长的光阵列（DE）的光谱旋转补偿器材料系统调查系统。 光谱旋转补偿器材料系统调查系统通过基于数学回归的技术进行校准，该技术涉及在需要时对校准参数进行参数化。 校准是可能的校准参数。 使用通过光谱旋转补偿器材料系统调查系统在“材料系统存在”或“直通”配置中获得的单个二维数据集进行校准是可能的。

    SENSOR APPARATUS WITH POLARIZATION MAINTAINING FIBERS
    130.
    发明公开
    SENSOR APPARATUS WITH POLARIZATION MAINTAINING FIBERS 失效
    WITH偏振保持光纤传感器装置

    公开(公告)号：EP1012641A1

    公开(公告)日：2000-06-28

    申请号：EP97912656.2

    申请日：1997-09-25

    Applicant: CORNING INCORPORATED

    Inventor： NOLAN, Daniel, A.

    IPC: G02B6/00 ,  G01J4/00

    CPC classification number: G01M11/083 ,  G01D5/344 ,  G01D5/35383 ,  G01J4/00 ,  G01K11/32 ,  G02B6/105

    Abstract: A distributed sensor (10) includes a plurality of stages (24, 28, 32, 36, 40) connected in series, each stage incorporating a length of polarization maintaining fiber (12) exposed to a phenomena such as mechanical deformation or temperature to be sensed. Inter-mode couplers are provided between the sensing fibers (26, 30, 34, 38) of the various stages. The overall transfer function of the device at a plurality of wavelengths is deconvoluted to determine the birefringence of each sensing region and does monitor plural phenomena independently of one another.

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