摘要:
The present invention provides a TiO 2 -SiO 2 glass whose coefficient of linear thermal expansion in the range of the time of irradiation with EUV light is substantially zero when used as an optical member of an exposure tool for EUVL and which has extremely high surface smoothness. The present invention relates to a TiO 2 -containing silica glass having a TiO 2 content of from 7.5 to 12 % by mass, a temperature at which a coefficient of linear thermal expansion is 0 ppb/°C, falling within the range of from 40 to 110 °C, and a standard deviation (s) of a stress level of striae of 0.03 MPa or lower within an area of 30 mm x 30 mm in at least one plane.
摘要:
The present invention provides a TiO2—SiO2 glass in which when used as an optical member for an exposure tool for EUVL, a thermal expansion coefficient is substantially zero at the time of irradiation with high-EUV energy light, and physical properties of a multilayer can be kept over a long period of time by releasing hydrogen from the glass. The present invention relates to a TiO2-containing silica glass having a fictive temperature of 1,100° C. or lower, a hydrogen molecule concentration of 1×1016 molecules/cm3 or more, and a temperature, at which a linear thermal expansion coefficient is 0 ppb/° C., falling within the range of from 40 to 110° C.
摘要:
To provide a glass plate to be tempered, which has a low thermal expansion coefficient at relatively low temperature, and which can have a sufficiently high surface compression stress by a conventional heat tempering process, even when it is thin. A glass plate to be tempered, which contains B 2 O 3 in a range of from 12.5 to 35 mol% in its composition, the difference [X-Y] between the total content X of compounds selected from MgO, CaO, BaO, Na 2 O and K 2 O in the composition and the content Y of B 2 O 3 in the composition being within a range of from -5 to 10 mol%, and which is to be tempered by heating and quenching.
摘要翻译:为了提供在较低温度下具有低热膨胀系数的回火玻璃板,并且即使在较薄时也能够通过常规的热回火方法具有足够高的表面压缩应力。 要回火的玻璃板,其组成中含有B 2 O 3为12.5〜35摩尔%的范围,选自MgO,CaO,BaO,Na 2 O的化合物的总含量X之间的差异[XY] 和组成中的B 2 O 3的组成中的K 2 O和组成中的K 2 O在-5〜10摩尔%的范围内,通过加热淬火进行回火。
摘要:
A method of cutting a strengthened glass plate includes irradiating a laser beam 20 on a front surface 12 of a strengthened glass plate 10 and moving an irradiation area 22 of the laser beam 20 on the front surface 12 of the strengthened glass plate 10 to cut the strengthened glass plate 10 by causing a crack that penetrates the strengthened glass plate 10 in the thickness direction at the back of the irradiation area 22. By irradiating the laser beam 20 to the front surface 12 of the strengthened glass plate 10, the intermediate layer 17 at the irradiation area 22 is heated to a temperature less than or equal to an annealing point and the propagation of the crack is suppressed by generating a tensile stress less than the internal remaining tensile stress in the intermediate layer 17 or the compression stress at the center of the irradiation area 22.
摘要:
The present invention relates to a substrate for EUV lithography optical member, comprising a silica glass containing TiO 2 , in which the substrate has two opposite surfaces, and the substrate has temperatures at which a coefficient of linear thermal expansion (CTE) is 0 ppb/°C (Cross-Over Temperature: COT), and in which the two opposite surfaces have difference in the COTs of 5°C or more.
摘要:
The present invention is to provide a TiO 2 -SiO 2 glass whose coefficient of linear thermal expansion at the time of irradiating with high EUV energy light becomes substantially zero when used as an optical member of an exposure tool for EUVL. The present invention relates to a TiO 2 -containing silica glass, having a fictive temperature of 1,000°C or lower, a OH concentration of 600 ppm or higher, a temperature at which the coefficient of linear temperature becomes 0 ppb/°C of from 40 to 110°C, and an average coefficient of linear thermal expansion in the temperature range of 20 to 100°C, of 50 ppb/°C or lower.
摘要:
The present invention relates to a method of manufacturing a lithium ion conductive solid electrolyte that is used for a lithium-ion secondary battery or the like and a lithium-ion secondary battery including such a lithium ion conductive solid electrolyte. Although a method is proposed in which glass including monovalent ions whose ionic radii are larger than those of lithium ions is performed with an ion-exchange process in lithium ions contained in molten salt is proposed conventionally, the improved effect of the lithium ion conductivity was not enough. A method of manufacturing a lithium ion conductive solid electrolyte includes (a) a step of preparing an object to be processed including a crystalline material, that includes alkali metal other than lithium and whose ionic conductivity at room temperature is greater than or equal to 1 × 10 -13 S/cm; and (b) a step of performing an ion-exchange process on the object to be processed in molten salt including lithium ions.
摘要:
A method capable of forming a sufficiently thick low alkali concentration region without heating glass to a high temperature and even in an atmosphere which is not an atmosphere of plasma formation gas such as helium and argon, is provided. A glass substrate having a pair of main surfaces and being made of glass containing an alkali oxide in its composition, is disposed between a first electrode and a second electrode so that one main surface is separated from the first electrode and the other main surface is brought into contact with the second electrode, and a corona discharge is generated by applying a direct-current voltage to the first electrode as a positive electrode and the second electrode as a negative electrode, in a positive-electrode-side surface layer portion of the glass substrate, at least one positive ion including an alkali ion migrates toward the negative-electrode-side.