公开(公告)号：EP0661727A3

公开(公告)日：1998-02-25

申请号：EP94309387.2

申请日：1994-12-15

申请人： HITACHI, LTD.

发明人： Sato, Mitsugu ,  Ose, Yoichi ,  Fukuhara, Satoru ,  Todokoro, Hideo ,  Ezumi, Makoto

IPC分类号： H01J37/28 ,  H01J37/244

CPC分类号： H01J37/28 ,  H01J2237/225 ,  H01J2237/24495 ,  H01J2237/281

摘要： A scanning electron microscope suitable for producing an image of high resolution by detecting secondary electrons (109) and backscattered electrons (110) generated from a specimen (107) at a low accelerating voltage in a separate or synthesis fashion. In the scanning electron microscope electric and magnetic fields for separating trajectories of backscattered electrons and secondary electrons generated from a specimen are established, and a backscattered electron detector (121) for detecting generated backscattered electrons is disposed on the trajectory of the backscattered electrons. According to the microscope, since secondary electrons and backscattered electrons can be detected efficiently in a separate fashion even at a low accelerating voltage of several kilovolts or less and besides the detector does not exert the deflection action on a primary electron beam (104), backscattered and secondary electron images of high resolution can be obtained.

公开(公告)号：EP0755064A3

公开(公告)日：1997-06-11

申请号：EP96111123.4

申请日：1996-07-10

申请人： HITACHI, LTD.

发明人： Shinada, Hiroyuki ,  Fukuhara, Satoru ,  Kuroda, Katsuhiro

IPC分类号： H01J1/15 ,  H01J9/04

CPC分类号： H01J1/15

摘要： A cathode includes a hairpin type filament made of a refractory metal such as W, Mo or Re; a single crystal needle, made of a refractory metal such as W, Mo or Re joined to the filament; and a reservoir formed by applying a slurry of a powder of a metal or metal compound and an organic solvent containing nitrocellulose in the vicinity of a junction between the single crystal needle and the filament. The powder for a reservoir is made of a metal lower than the single crystal needle in a work function or electron affinity, such as Ti, Zr, Hf, Y, Th, Sc or Se, or a compound thereof.

公开(公告)号：EP0661727A2

公开(公告)日：1995-07-05

申请号：EP94309387.2

申请日：1994-12-15

申请人： HITACHI, LTD.

发明人： Sato, Mitsugu ,  Ose, Yoichi ,  Fukuhara, Satoru ,  Todokoro, Hideo ,  Ezumi, Makoto

IPC分类号： H01J37/28 ,  H01J37/244

CPC分类号： H01J37/28 ,  H01J2237/225 ,  H01J2237/24495 ,  H01J2237/281

摘要： A scanning electron microscope suitable for producing an image of high resolution by detecting secondary electrons (109) and backscattered electrons (110) generated from a specimen (107) at a low accelerating voltage in a separate or synthesis fashion. In the scanning electron microscope electric and magnetic fields for separating trajectories of backscattered electrons and secondary electrons generated from a specimen are established, and a backscattered electron detector (121) for detecting generated backscattered electrons is disposed on the trajectory of the backscattered electrons. According to the microscope, since secondary electrons and backscattered electrons can be detected efficiently in a separate fashion even at a low accelerating voltage of several kilovolts or less and besides the detector does not exert the deflection action on a primary electron beam (104), backscattered and secondary electron images of high resolution can be obtained.

摘要翻译： 一种扫描电子显微镜，其适用于通过以低分子或合成的方式以低加速电压检测从样品（107）产生的二次电子（109）和后向散射电子（110）来产生高分辨率的图像。 在扫描电子显微镜中，建立用于分离由样品产生的背散射电子和二次电子的轨迹的电场和磁场，并且用于检测产生的反向散射电子的反向散射电子检测器（121）设置在背散射电子的轨迹上。 根据显微镜，由于二次电子和后向散射电子可以以几千伏或更小的低加速电压以单独的方式被有效地检测，并且除了检测器不对一次电子束（104）施加偏转作用外，反向散射 并且可以获得高分辨率的二次电子图像。

公开(公告)号：EP0308953A1

公开(公告)日：1989-03-29

申请号：EP88115653.3

申请日：1988-09-23

申请人： HITACHI, LTD.

发明人： Fukuhara, Satoru ,  Shinada, Hiroyuki ,  Todokoro, Hideo

IPC分类号： H01J37/244

CPC分类号： H01J37/244 ,  G01R31/305 ,  H01J2237/24435 ,  H01J2237/24465 ,  H01J2237/2448 ,  H01J2237/2449 ,  H01J2237/24507 ,  H01J2237/24564

摘要： A charged particle detector comprises a micro-­channel plate (3, 3′) for detecting charged particles secondarily generated from a specimen (1) irradiated with a narrowly defined beam of charged particles, a signal outputting circuit (4, 5, 6) for transmitting therein a signal detected by the micro-channel plate and then outputting the signal, and a processing circuit (32; 32′, 4a-4c, d a , d b , 10) for simultaneously output­ting signals of secondary charged particles generated from the specimen at the same instant of time. Prefer­ably, the processing circuit is constructed by a vortex-­shaped electrode (321) or the combination of concentric electrode segments (321a-321c) and delaying elements (d a , d b ).

摘要翻译： 一种带电粒子检测器，包括用于检测从照射有限定的带电粒子束的样本（1）次要产生的带电粒子的微通道板（3,3分钟），用于 在其中传输由微通道板检测到的信号，然后输出信号;以及处理电路（32; 32分钟，4a-4c，da，db，10），用于同时输出从样本产生的二次带电粒子的信号 同一时刻。 优选地，处理电路由涡旋形电极（321）或同心电极段（321a-321c）和延迟元件（da，db）的组合构成。