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18 条记录 (耗时 0.013 秒)

    Method of measuring magnetic field and charged particle beam apparatus using the same method
    2.
    发明公开
    Method of measuring magnetic field and charged particle beam apparatus using the same method 失效
    一种用于测量磁场和带电粒子线装置与使用该方法的方法。

    公开(公告)号：EP0669538A3

    公开(公告)日：1996-12-11

    申请号：EP95301077.4

    申请日：1995-02-21

    申请人： HITACHI, LTD.

    发明人： Suzuki, Hiroshi ,  Shinada, Hiroyuki ,  Kuroda, Katsuhiro ,  Yajima, Yusuke ,  Takahashi, Yoshio ,  Nakajima, Masato ,  Saito, Hideo

    IPC分类号： G01R33/02

    CPC分类号： G01R33/0213 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/24564

    摘要： A charged particle beam (12a, 12b) is transmitted through a specimen (14) for producing an irregular pattern as a first image. Further, a magnetic field to be measured (16) is arranged in space where a charged particle beam is passed between the specimen and an image plane thereby to produce a second image having an irregular pattern as in the foregoing case. The first image and the second image are processed to produce the deflection angle of the charged particle beam due to the magnetic field. This deflection angle is extracted from the entire positions of a cross section of the space where measurement is desired, thereby constructing projection data of a magnetic field by a charged particle beam. Furthermore, the magnetic field to be measured is rotated and the above-mentioned processing is performed from each direction to construct projection data. The projection data thus obtained and the computer tomography technique are used to determine a magnetic field at each point in space.

    Cathode having a reservoir and method of manufacturing the same
    3.
    发明公开
    Cathode having a reservoir and method of manufacturing the same 失效
    阴极与它们的供应容器及其制造方法

    公开(公告)号：EP0755064A3

    公开(公告)日：1997-06-11

    申请号：EP96111123.4

    申请日：1996-07-10

    申请人： HITACHI, LTD.

    发明人： Shinada, Hiroyuki ,  Fukuhara, Satoru ,  Kuroda, Katsuhiro

    IPC分类号： H01J1/15 ,  H01J9/04

    CPC分类号： H01J1/15

    摘要： A cathode includes a hairpin type filament made of a refractory metal such as W, Mo or Re; a single crystal needle, made of a refractory metal such as W, Mo or Re joined to the filament; and a reservoir formed by applying a slurry of a powder of a metal or metal compound and an organic solvent containing nitrocellulose in the vicinity of a junction between the single crystal needle and the filament. The powder for a reservoir is made of a metal lower than the single crystal needle in a work function or electron affinity, such as Ti, Zr, Hf, Y, Th, Sc or Se, or a compound thereof.

    Charged particle detector
    5.
    发明公开
    Charged particle detector 失效
    Detektorfürgeladene Teilchen。

    公开(公告)号：EP0308953A1

    公开(公告)日：1989-03-29

    申请号：EP88115653.3

    申请日：1988-09-23

    申请人： HITACHI, LTD.

    发明人： Fukuhara, Satoru ,  Shinada, Hiroyuki ,  Todokoro, Hideo

    IPC分类号： H01J37/244

    CPC分类号： H01J37/244 ,  G01R31/305 ,  H01J2237/24435 ,  H01J2237/24465 ,  H01J2237/2448 ,  H01J2237/2449 ,  H01J2237/24507 ,  H01J2237/24564

    摘要： A charged particle detector comprises a micro-­channel plate (3, 3′) for detecting charged particles secondarily generated from a specimen (1) irradiated with a narrowly defined beam of charged particles, a signal outputting circuit (4, 5, 6) for transmitting therein a signal detected by the micro-channel plate and then outputting the signal, and a processing circuit (32; 32′, 4a-4c, d a , d b , 10) for simultaneously output­ting signals of secondary charged particles generated from the specimen at the same instant of time. Prefer­ably, the processing circuit is constructed by a vortex-­shaped electrode (321) or the combination of concentric electrode segments (321a-321c) and delaying elements (d a , d b ).

    摘要翻译： 一种带电粒子检测器，包括用于检测从照射有限定的带电粒子束的样本（1）次要产生的带电粒子的微通道板（3,3分钟），用于 在其中传输由微通道板检测到的信号，然后输出信号;以及处理电路（32; 32分钟，4a-4c，da，db，10），用于同时输出从样本产生的二次带电粒子的信号 同一时刻。 优选地，处理电路由涡旋形电极（321）或同心电极段（321a-321c）和延迟元件（da，db）的组合构成。

    Schottky emission cathode and a method of stabilizing the same
    6.
    发明公开
    Schottky emission cathode and a method of stabilizing the same 失效
    肖特基辐射和德法尔森

    公开(公告)号：EP0696043A1

    公开(公告)日：1996-02-07

    申请号：EP95112077.3

    申请日：1995-08-01

    申请人： HITACHI, LTD.

    发明人： Shinada, Hiroyuki ,  Kimura, Shingo ,  Kuroda, Katsuhiro ,  Fukuhara, Satoru ,  Ohshima, Takashi

    IPC分类号： H01J1/30

    CPC分类号： H01J1/304 ,  H01J2201/317 ,  H01J2237/06316

    摘要： A Schottky emission cathode has a filament, a needle-shaped piece of single crystal refractory metal which is attached to the filament and has a flat crystal surface at a tip thereof, and an adsorbed layer including at least one kind of a metal other than the single crystal refractory metal on the flat crystal surface.
    The piece of single crystal refractory metal is heated by passing a current through the filament and electrons are extracted by an electric field applied on a tip of the needle-shaped piece of single crystal refractory metal. The tip of the needle-shaped piece of single crystal refractory metal has a radius of curvature of a value to produce an energy width among electrons extracted from the tip not exceeding a predetermined value when the electric field is sufficient to prevent the flat crystal surface from collapsing during operation of the cathode.

    摘要翻译： 肖特基发射阴极具有长丝，单晶耐火金属针形片，其附着于灯丝，并且在其顶端具有平坦的晶体表面，以及包含至少一种不同于 单晶难熔金属在平面晶面上。 通过使电流通过灯丝来加热单晶难熔金属片，并通过施加在针状单晶耐火金属片的尖端上的电场来提取电子。 针状单晶耐火金属片的尖端具有一个值的曲率半径，以在电场足以防止平坦的晶体表面时产生从尖端提取的电子之间的能量宽度不超过预定值 在阴极运行期间塌陷。

    Method of measuring magnetic field and charged particle beam apparatus using the same method
    7.
    发明公开
    Method of measuring magnetic field and charged particle beam apparatus using the same method 失效
    韦尔法罕zur Magnetfeldmessung undLadungsteilchenstrahlgerätmit Benutzung死了Verfahrens

    公开(公告)号：EP0669538A2

    公开(公告)日：1995-08-30

    申请号：EP95301077.4

    申请日：1995-02-21

    申请人： HITACHI, LTD.

    发明人： Suzuki, Hiroshi ,  Shinada, Hiroyuki ,  Kuroda, Katsuhiro ,  Yajima, Yusuke ,  Takahashi, Yoshio ,  Nakajima, Masato ,  Saito, Hideo

    IPC分类号： G01R33/02

    CPC分类号： G01R33/0213 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/24564

    摘要： A charged particle beam (12a, 12b) is transmitted through a specimen (14) for producing an irregular pattern as a first image. Further, a magnetic field to be measured (16) is arranged in space where a charged particle beam is passed between the specimen and an image plane thereby to produce a second image having an irregular pattern as in the foregoing case. The first image and the second image are processed to produce the deflection angle of the charged particle beam due to the magnetic field. This deflection angle is extracted from the entire positions of a cross section of the space where measurement is desired, thereby constructing projection data of a magnetic field by a charged particle beam. Furthermore, the magnetic field to be measured is rotated and the above-mentioned processing is performed from each direction to construct projection data. The projection data thus obtained and the computer tomography technique are used to determine a magnetic field at each point in space.

    摘要翻译： 带电粒子束（12a，12b）通过用于产生不规则图案的样本（14）作为第一图像传输。 此外，如上所述，在被检测体和像面之间通过带电粒子束的空间内设置被测量磁场（16），由此产生具有不规则图案的第二图像。 处理第一图像和第二图像以产生由于磁场引起的带电粒子束的偏转角。 从需要测量的空间的横截面的整个位置提取该偏转角度，由此构成通过带电粒子束的磁场的投影数据。 此外，要测量的磁场旋转，并且从每个方向执行上述处理以构造投影数据。 由此获得的投影数据和计算机断层摄影技术用于确定每个空间点处的磁场。