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14 条记录 (耗时 0.011 秒)

    Scanning electron microscope
    2.
    发明公开
    Scanning electron microscope 失效
    扫描电子显微镜

    公开(公告)号：EP1244132A1

    公开(公告)日：2002-09-25

    申请号：EP02006070.3

    申请日：1994-12-15

    申请人： Hitachi, Ltd.

    发明人： Sato, Mitsugu ,  Ose, Yoichi ,  Fukuhara, Satoru ,  Todokoro, Hideo ,  Ezumi, Makoto

    IPC分类号： H01J37/05 ,  H01J37/28

    CPC分类号： H01J37/28 ,  H01J2237/225 ,  H01J2237/24495 ,  H01J2237/281

    摘要： A scanning electron microscope suitable for producing an image of high resolution by detecting secondary electrons (450) produced when backscattered electrons (110) hit secondary electron conversion electrode (440) and secondary electrons (109) emitted by the specimen (107), at a low accelerating voltage in a separate or synthesis fashion. In the scanning electron microscope electric and magnetic fields for separating trajectories of backscattered electrons and secondary electrons emitted from the specimen are established, and a secondary electron conversion electrode (440) for converting backscattered electrons into secondary electrons is disposed on the trajectory of the backscattered electrons. Since the secondary electrons emitted by the specimen and the secondary electrons emitted by the secondary electron conversion electrode can be efficiently detected separately from each other and the primary electron beam (104), images of high resolution can be obtained.

    摘要翻译： 扫描电子显微镜适于通过检测当背散射电子（110）击中样品（107）发射的二次电子转换电极（440）和二次电子（109）时产生的二次电子（450）产生高分辨率图像， 低加速电压以独立或合成的方式。 在扫描电子显微镜中，建立用于分离从样品发射的背向散射电子和二次电子的轨迹的电场和磁场，并且用于将背散射电子转换成二次电子的二次电子转换电极（440）布置在背散射电子的轨迹上 。 由于可以有效地将由样本发射的二次电子和由二次电子转换电极发射的二次电子彼此分开并与一次电子束（104）分开，所以可以获得高分辨率的图像。

    Cathode having a reservoir and method of manufacturing the same
    3.
    发明公开
    Cathode having a reservoir and method of manufacturing the same 失效
    具有储存器的阴极及其制造方法

    公开(公告)号：EP0755064A2

    公开(公告)日：1997-01-22

    申请号：EP96111123.4

    申请日：1996-07-10

    申请人： HITACHI, LTD.

    发明人： Shinada, Hiroyuki ,  Fukuhara, Satoru ,  Kuroda, Katsuhiro

    IPC分类号： H01J1/15 ,  H01J9/04

    CPC分类号： H01J1/15

    摘要： A cathode includes a hairpin type filament made of a refractory metal such as W, Mo or Re; a single crystal needle, made of a refractory metal such as W, Mo or Re joined to the filament; and a reservoir formed by applying a slurry of a powder of a metal or metal compound and an organic solvent containing nitrocellulose in the vicinity of a junction between the single crystal needle and the filament. The powder for a reservoir is made of a metal lower than the single crystal needle in a work function or electron affinity, such as Ti, Zr, Hf, Y, Th, Sc or Se, or a compound thereof.

    摘要翻译： 阴极包括由诸如W，Mo或Re的难熔金属制成的发夹型细丝; 由W，Mo或Re等难熔金属制成的单晶针; 以及通过在单晶针和细丝之间的接合部附近涂覆金属或金属化合物的粉末和含有硝化纤维素的有机溶剂的浆料而形成的储库。 用于储存器的粉末由功函数低于单晶针的金属或电子亲和力制成，例如Ti，Zr，Hf，Y，Th，Sc或Se或其化合物。

    Electron source and electron beam-emitting apparatus equipped therewith
    7.
    发明公开
    Electron source and electron beam-emitting apparatus equipped therewith 失效
    Elektronenquelle undElektronenstrahlgerätmit einer solchen Elektronenquelle

    公开(公告)号：EP0790633A2

    公开(公告)日：1997-08-20

    申请号：EP97101980.7

    申请日：1997-02-07

    申请人： HITACHI, LTD.

    发明人： Fukuhara, Satoru

    IPC分类号： H01J37/073 ,  H01J1/30

    CPC分类号： H01J37/06 ,  H01J2237/06316

    摘要： An SE electron source for an apparatus utilising an electron beam, such as an electron microscope or electron beam lithography machine, has a needle with a tip having a cone angle of less than 15° and a radius of curvature of less than 0.5 µm. In an electron gun using such an SE electron source, the range of variations in probe current caused by a given variation in control voltage increases. Therefore, one extraction voltage setting is sufficient. Furthermore, the value of the extraction voltage decreases. Damage to the needle tip due to electric discharge is prevented. This adds to the stability of the electron gun.

    摘要翻译： 用于使用电子束的装置的SE电子源，例如电子显微镜或电子束光刻机，具有尖端具有锥角小于15°且曲率半径小于0.5μm的针。 在使用这种SE电子源的电子枪中，由给定的控制电压变化引起的探针电流的变化范围增加。 因此，一个提取电压设置就足够了。 此外，提取电压的值降低。 防止由于放电对针尖的损伤。 这增加了电子枪的稳定性。

    Schottky emission cathode and a method of stabilizing the same
    8.
    发明公开
    Schottky emission cathode and a method of stabilizing the same 失效
    肖特基辐射和德法尔森

    公开(公告)号：EP0696043A1

    公开(公告)日：1996-02-07

    申请号：EP95112077.3

    申请日：1995-08-01

    申请人： HITACHI, LTD.

    发明人： Shinada, Hiroyuki ,  Kimura, Shingo ,  Kuroda, Katsuhiro ,  Fukuhara, Satoru ,  Ohshima, Takashi

    IPC分类号： H01J1/30

    CPC分类号： H01J1/304 ,  H01J2201/317 ,  H01J2237/06316

    摘要： A Schottky emission cathode has a filament, a needle-shaped piece of single crystal refractory metal which is attached to the filament and has a flat crystal surface at a tip thereof, and an adsorbed layer including at least one kind of a metal other than the single crystal refractory metal on the flat crystal surface.
    The piece of single crystal refractory metal is heated by passing a current through the filament and electrons are extracted by an electric field applied on a tip of the needle-shaped piece of single crystal refractory metal. The tip of the needle-shaped piece of single crystal refractory metal has a radius of curvature of a value to produce an energy width among electrons extracted from the tip not exceeding a predetermined value when the electric field is sufficient to prevent the flat crystal surface from collapsing during operation of the cathode.

    摘要翻译： 肖特基发射阴极具有长丝，单晶耐火金属针形片，其附着于灯丝，并且在其顶端具有平坦的晶体表面，以及包含至少一种不同于 单晶难熔金属在平面晶面上。 通过使电流通过灯丝来加热单晶难熔金属片，并通过施加在针状单晶耐火金属片的尖端上的电场来提取电子。 针状单晶耐火金属片的尖端具有一个值的曲率半径，以在电场足以防止平坦的晶体表面时产生从尖端提取的电子之间的能量宽度不超过预定值 在阴极运行期间塌陷。