公开(公告)号：EP2881972B1

公开(公告)日：2017-03-22

申请号：EP14004439.7

申请日：2013-08-09

Applicant: Carl Zeiss Microscopy Ltd.

Inventor： Gohill, Champ ,  Moralee, Richard

IPC: H01J37/22 ,  H01J37/28 ,  H01J37/26 ,  G06T7/00

CPC classification number: G01N23/225 ,  G06F3/04845 ,  G06T7/0004 ,  G06T7/11 ,  G06T2200/24 ,  G06T2207/10061 ,  G06T2207/20104 ,  G06T2207/20112 ,  H01J37/28 ,  H01J2237/225 ,  H01J2237/2806 ,  H01J2237/2807

公开(公告)号：EP1244132B1

公开(公告)日：2004-08-04

申请号：EP02006070.3

申请日：1994-12-15

Applicant: Hitachi, Ltd.

Inventor： Sato, Mitsugu ,  Ose, Yoichi ,  Fukuhara, Satoru ,  Todokoro, Hideo ,  Ezumi, Makoto

IPC: H01J37/05 ,  H01J37/28

CPC classification number: H01J37/28 ,  H01J2237/225 ,  H01J2237/24495 ,  H01J2237/281

公开(公告)号：EP2450936A1

公开(公告)日：2012-05-09

申请号：EP10014245.4

申请日：2010-11-03

Applicant: Carl Zeiss NTS Ltd.

Inventor： Bean, Stewart ,  Rowland, Roger

IPC: H01J37/22 ,  H01J37/244 ,  H01J37/26 ,  G02B21/36

CPC classification number: H01J37/222 ,  G02B21/367 ,  H01J37/244 ,  H01J37/26 ,  H01J2237/047 ,  H01J2237/22 ,  H01J2237/221 ,  H01J2237/225 ,  H01J2237/2482 ,  H01J2237/28

Abstract: A method of operating a charged-particle microscope, the method comprising: recording a first image of a first region of an object using the charged-particle microscope in a first setting; recording a second image of a second region of the object using the charged-particle microscope in a second setting, wherein the second setting differs from the first setting with respect to at least one of a kinetic energy of primary charged particles used for imaging, a detector setting used for imaging, a beam current of the primary charged particles used for imaging and a pressure in a measuring chamber of the charged-particle microscope; reading a third image of a third region of the object using the charged-particle microscope, wherein the first and second regions are contained at least partially within the third region; displaying at least a portion of the third image; displaying a representation of the first image at least partly within the displayed third image, wherein the representation of the first image includes a first indicator which is indicative of the first setting; displaying a representation of the second image at least partly within the displayed third image, wherein the representation of the second image includes a second indicator which is indicative of the second setting, and wherein the displayed second indicator is different from the displayed first indicator.

Abstract translation: 一种操作带电粒子显微镜的方法，所述方法包括：在第一设置中使用所述带电粒子显微镜记录物体的第一区域的第一图像; 使用所述带电粒子显微镜在第二设定中记录所述物体的第二区域的第二图像，其中所述第二设定与所述第一设定相对于用于成像的初级带电粒子的动能中的至少一个不同， 用于成像的检测器设置，用于成像的初级带电粒子的束电流和带电粒子显微镜的测量室中的压力; 使用所述带电粒子显微镜读取所述物体的第三区域的第三图像，其中所述第一和第二区域至少部分地包含在所述第三区域内; 显示所述第三图像的至少一部分; 至少部分地在所显示的第三图像内显示第一图像的表示，其中第一图像的表示包括指示第一设置的第一指示符; 至少部分地在所显示的第三图像内显示第二图像的表示，其中第二图像的表示包括指示第二设置的第二指示符，并且其中所显示的第二指示符不同于所显示的第一指示符。

公开(公告)号：EP1244132A1

公开(公告)日：2002-09-25

申请号：EP02006070.3

申请日：1994-12-15

Applicant: Hitachi, Ltd.

Inventor： Sato, Mitsugu ,  Ose, Yoichi ,  Fukuhara, Satoru ,  Todokoro, Hideo ,  Ezumi, Makoto

IPC: H01J37/05 ,  H01J37/28

CPC classification number: H01J37/28 ,  H01J2237/225 ,  H01J2237/24495 ,  H01J2237/281

Abstract: A scanning electron microscope suitable for producing an image of high resolution by detecting secondary electrons (450) produced when backscattered electrons (110) hit secondary electron conversion electrode (440) and secondary electrons (109) emitted by the specimen (107), at a low accelerating voltage in a separate or synthesis fashion. In the scanning electron microscope electric and magnetic fields for separating trajectories of backscattered electrons and secondary electrons emitted from the specimen are established, and a secondary electron conversion electrode (440) for converting backscattered electrons into secondary electrons is disposed on the trajectory of the backscattered electrons. Since the secondary electrons emitted by the specimen and the secondary electrons emitted by the secondary electron conversion electrode can be efficiently detected separately from each other and the primary electron beam (104), images of high resolution can be obtained.

Abstract translation: 扫描电子显微镜适于通过检测当背散射电子（110）击中样品（107）发射的二次电子转换电极（440）和二次电子（109）时产生的二次电子（450）产生高分辨率图像， 低加速电压以独立或合成的方式。 在扫描电子显微镜中，建立用于分离从样品发射的背向散射电子和二次电子的轨迹的电场和磁场，并且用于将背散射电子转换成二次电子的二次电子转换电极（440）布置在背散射电子的轨迹上 。 由于可以有效地将由样本发射的二次电子和由二次电子转换电极发射的二次电子彼此分开并与一次电子束（104）分开，所以可以获得高分辨率的图像。

公开(公告)号：EP3401942A1

公开(公告)日：2018-11-14

申请号：EP18171519.4

申请日：2018-05-09

Applicant: Jeol Ltd.

Inventor： ABE, Akira

IPC: H01J37/22 ,  H01J37/28 ,  G06T7/11 ,  G06T7/136

CPC classification number: H01J37/28 ,  G01N23/225 ,  G06T7/11 ,  G06T7/136 ,  G06T2200/24 ,  G06T2207/10061 ,  G06T2207/20104 ,  H01J37/147 ,  H01J37/222 ,  H01J37/252 ,  H01J2237/225 ,  H01J2237/2803 ,  H01J2237/2807

Abstract: An electron microscope includes: a display control unit which sequentially acquires electron microscope images of a sample and causes a display unit to display the electron microscope images as a live image; an analysis area setting unit which sets an analysis area on the sample based on a designated position on the live image designated by pointing means; and an analysis control unit which performs control for executing elemental analysis of the set analysis area, wherein the analysis area setting unit sets, as the analysis area, an area on the sample which corresponds to a continuous area including the designated position and having brightness comparable to brightness of the designated position.

公开(公告)号：EP2835817B1

公开(公告)日：2017-12-20

申请号：EP13003977.9

申请日：2013-08-09

Applicant: Carl Zeiss Microscopy Ltd.

Inventor： Gohil, Champ ,  Moralee, Richard

IPC: H01J37/28 ,  G06T7/11 ,  G06T7/00 ,  H01J37/22

CPC classification number: G01N23/225 ,  G06F3/04845 ,  G06T7/0004 ,  G06T7/11 ,  G06T2200/24 ,  G06T2207/10061 ,  G06T2207/20104 ,  G06T2207/20112 ,  H01J37/28 ,  H01J2237/225 ,  H01J2237/2806 ,  H01J2237/2807

Abstract: A data analysis system for generating analysis data depending on microscopic data of an object generated by a charged particle microscope. The microscopic data comprises an image showing a structure. The method comprises displaying a graphical representation of the structure on the display by the graphical user interface. The method further comprises generating separation data representing at least one path of a separation cut, which separates pixels of the structure from each other. The method further comprises visually marking the separation cut by the graphical user interface, depending on the separation data, by differently marking different area portions of the representation, which represent different pixels of the structure which are separated from each other by the separation cut. The method further comprises generating separate analysis data for each of at least two portions of the object, depending on the microscopic data and depending on the separation data.

公开(公告)号：EP2835817A1

公开(公告)日：2015-02-11

申请号：EP13003977.9

申请日：2013-08-09

Applicant: Carl Zeiss Microscopy Ltd.

Inventor： Gohil, Champ ,  Moralee, Richard

IPC: H01J37/22 ,  H01J37/26 ,  G06T7/00

CPC classification number: G01N23/225 ,  G06F3/04845 ,  G06T7/0004 ,  G06T7/11 ,  G06T2200/24 ,  G06T2207/10061 ,  G06T2207/20104 ,  G06T2207/20112 ,  H01J37/28 ,  H01J2237/225 ,  H01J2237/2806 ,  H01J2237/2807

Abstract: A data analysis system for generating analysis data depending on microscopic data of an object generated by a charged particle microscope. The microscopic data comprises an image showing a structure. The method comprises displaying a graphical representation of the structure on the display by the graphical user interface. The method further comprises generating separation data representing at least one path of a separation cut, which separates pixels of the structure from each other. The method further comprises visually marking the separation cut by the graphical user interface, depending on the separation data, by differently marking different area portions of the representation, which represent different pixels of the structure which are separated from each other by the separation cut. The method further comprises generating separate analysis data for each of at least two portions of the object, depending on the microscopic data and depending on the separation data.

Abstract translation: 一种数据分析系统，用于根据由带电粒子显微镜产生的物体的显微数据产生分析数据。 显微数据包括显示结构的图像。 该方法包括由图形用户界面在显示器上显示结构的图形表示。 该方法还包括生成分离数据，该分离数据表示将结构的像素彼此分开的分离切割的至少一个路径。 所述方法进一步包括通过不同地标记所述表示的不同区域部分来视觉地标记所述图形用户界面根据所述分离数据切割的所述分离，所述不同区域部分表示通过所述分离切割彼此分离的所述结构的不同像素。 该方法进一步包括取决于微观数据并取决于分离数据，为物体的至少两个部分中的每一个生成单独的分析数据。

公开(公告)号：EP1525450A2

公开(公告)日：2005-04-27

申请号：EP03766372.1

申请日：2003-07-30

Applicant: Deutsches Krebsforschungszentrum

Inventor： TRENDELENBURG, Michael ,  SPRING, Herbert ,  MONTEIRO-LEAL, Luiz Henrique ,  CAMPANATI-ARAUJO, Loraine ,  TRÖSTER, Helmut

IPC: G01N15/14 ,  G01N23/04

CPC classification number: G01N15/1475 ,  G01N33/54333 ,  G01N2015/1472 ,  G06K9/0014 ,  H01J2237/225

Abstract: The invention relates to a transmission electron microscope equipped with a 2k x 2k pixel area Slow Scan Cooled Charge Coupled Device Camera connected to an image processing software for generating an image of a sample. A segmentation of gold particles in the sample is achieved by the separation from specimen structure and background noise. An identification and classification of particle types is carried out according to the shape and size of the detected particles or particle pairs and finally, the gold particle distribution is visualized by the generation of false color overlay images as well as the indication of the numbers in the image.

公开(公告)号：EP2946398B1

公开(公告)日：2018-03-07

申请号：EP14701440.1

申请日：2014-01-20

Applicant: Delmic B.V.

Inventor： HOOGENBOOM, Jacob Pieter ,  HARING, Martijn Theo

IPC: H01J37/22 ,  H01J37/30 ,  H01J37/304 ,  G02B21/36

CPC classification number: H01J37/22 ,  G02B21/367 ,  H01J37/228 ,  H01J37/3005 ,  H01J37/3045 ,  H01J2237/225 ,  H01J2237/2482

Abstract: The invention relates to an apparatus and method for inspecting a sample, provided with an optical microscope to observe a region of interest on a sample and a charged particle system generating a focused charged particle beam to observe or modify the same or parts of the same region of interest, the apparatus provided with a control unit for electronically controlling said systems, adapted for recording two or more spectrally separated images of the region of interest on the sample, the control unit adapted for acquiring processing and representing the images as detected with said optical and said charged particle microscope systems, the unit further adapted for performing a registration procedure mutually correlating a region of interest in the optical images, wherein the apparatus is adapted for using a detection of a change in the optical images as caused therein by the charged particle beam for correlating said images.

公开(公告)号：EP2946398A1

公开(公告)日：2015-11-25

申请号：EP14701440.1

申请日：2014-01-20

Applicant: Delmic B.V.

Inventor： HOOGENBOOM, Jacob Pieter ,  HARING, Martijn Theo

IPC: H01J37/22 ,  H01J37/30 ,  H01J37/304 ,  G02B21/36

CPC classification number: H01J37/22 ,  G02B21/367 ,  H01J37/228 ,  H01J37/3005 ,  H01J37/3045 ,  H01J2237/225 ,  H01J2237/2482

Abstract: The invention relates to an apparatus and method for inspecting a sample, provided with an optical microscope to observe a region of interest on a sample and a charged particle system generating a focused charged particle beam to observe or modify the same or parts of the same region of interest, the apparatus provided with a control unit for electronically controlling said systems, adapted for recording two or more spectrally separated images of the region of interest on the sample, the control unit adapted for acquiring processing and representing the images as detected with said optical and said charged particle microscope systems, the unit further adapted for performing a registration procedure mutually correlating a region of interest in the optical images, wherein the apparatus is adapted for using a detection of a change in the optical images as caused therein by the charged particle beam for correlating said images.

Abstract translation: 本发明涉及一种用于检查样品的装置和方法，其具有光学显微镜以观察样品上的感兴趣区域和产生聚焦带电粒子束的带电粒子系统以观察或修改相同或相同区域的相同或部分 所述设备设置有用于电子控制所述系统的控制单元，适用于在所述样本上记录所述感兴趣区域的两个或多个频谱分离的图像，所述控制单元适于获取处理并表示所述图像， 和所述带电粒子显微镜系统，所述单元还适于执行将所述光学图像中的感兴趣区域相互关联的登记过程，其中所述装置适于使用由所述带电粒子在其中引起的光学图像的变化的检测 用于使所述图像相关联。